Zhongmin Yang

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Boston, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation system for implanting workpieces
- Patent number 6,025,602
- Issue date Feb 15, 2000
- Eaton Corporation
- Peter H. Rose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for cooling workpieces processed by an ion implan...
- Patent number 5,828,070
- Issue date Oct 27, 1998
- Eaton Corporation
- Adam A. Brailove
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation system for implanting workpieces
- Patent number 5,793,050
- Issue date Aug 11, 1998
- Eaton Corporation
- Peter H. Rose
- H01 - BASIC ELECTRIC ELEMENTS