Zhongping Cai

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for simultaneous tilt and height control of a sub...
- Patent number 9,810,619
- Issue date Nov 7, 2017
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for high speed height control of a substrate surf...
- Patent number 9,097,645
- Issue date Aug 4, 2015
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Extended defect sizing range for wafer inspection
- Patent number 9,091,666
- Issue date Jul 28, 2015
- KLA-Tencor Corp.
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for producing and measuring dynamically focuss...
- Patent number 9,068,952
- Issue date Jun 30, 2015
- KLA-Tencor Corporation
- Aleksey Petrenko
- G01 - MEASURING TESTING
Information Patent Grant
Inspection systems and methods for extending the detection range of...
- Patent number 7,746,462
- Issue date Jun 29, 2010
- KLA-Tencor Technologies Corporation
- Zhongping Cai
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method and System for High Speed Height Control of a Substrate Surf...
- Publication number 20150055141
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Tilt and Height Control of a Substrate Surfac...
- Publication number 20140071457
- Publication date Mar 13, 2014
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
Extended Defect Sizing Range for Wafer Inspection
- Publication number 20130208269
- Publication date Aug 15, 2013
- KLA-Tencor Corporation
- Zhongping Cai
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for producing and Measuring dynamically focuss...
- Publication number 20110051132
- Publication date Mar 3, 2011
- Aleksey Petrenko
- G02 - OPTICS
Information Patent Application
Inspection Systems and Methods for Extending the Detection Range of...
- Publication number 20080291454
- Publication date Nov 27, 2008
- KLA-TENCOR TECHNOLOGIES CORP.
- Zhongping Cai
- G01 - MEASURING TESTING