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Patents Grants
last 30 patents
Information
Patent Grant
Method of cleaning an optical film-thickness measuring system
Patent number
11,919,048
Issue date
Mar 5, 2024
Ebara Corporation
Nobuyuki Takahashi
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing apparatus and method of detecting indentation...
Patent number
11,221,239
Issue date
Jan 11, 2022
Ebara Corporation
Zhongxin Wen
B08 - CLEANING
Information
Patent Grant
Head height adjustment device and substrate processing apparatus pr...
Patent number
10,556,314
Issue date
Feb 11, 2020
Ebara Corporation
Suguru Sakugawa
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CLEANING AN OPTICAL FILM-THICKNESS MEASURING SYSTEM
Publication number
20220072590
Publication date
Mar 10, 2022
EBARA CORPORATION
Nobuyuki Takahashi
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DETECTING INDENTATION...
Publication number
20190025096
Publication date
Jan 24, 2019
EBARA CORPORATION
Zhongxin Wen
B08 - CLEANING
Information
Patent Application
HEAD HEIGHT ADJUSTMENT DEVICE AND SUBSTRATE PROCESSING APPARATUS PR...
Publication number
20180001438
Publication date
Jan 4, 2018
EBARA CORPORATION
Suguru SAKUGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20170352573
Publication date
Dec 7, 2017
EBARA CORPORATION
Zhongxin WEN
H01 - BASIC ELECTRIC ELEMENTS