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Zhounan Wang
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Shanghai, CN
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last 30 patents
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Patent Grant
Method for monitoring alignment between contact holes and polycryst...
Patent number
9,080,863
Issue date
Jul 14, 2015
SHANGAI HUALI MICROELECTRONICS CORPORATION
Qiliang Ni
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MONITORING ALIGNMENT BETWEEN CONTACT HOLES AND POLYCRYST...
Publication number
20130342842
Publication date
Dec 26, 2013
Shangai Huali Microelectronics Corporation
Qiliang Ni
G01 - MEASURING TESTING