Zihao Ouyang

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Milpitas, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for depositing a coating on a substrate at atm...
- Patent number 10,752,994
- Issue date Aug 25, 2020
- The Board of Trustees of the University of Illinois
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Porous low-k dielectric etch
- Patent number 10,361,091
- Issue date Jul 23, 2019
- Lam Research Corporation
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for depositing a coating on a substrate at atm...
- Patent number 10,167,556
- Issue date Jan 1, 2019
- The Board of Trustees of the University of Illinois
- David N. Ruzic
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...
- Publication number 20190093229
- Publication date Mar 28, 2019
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POROUS LOW-K DIELECTRIC ETCH
- Publication number 20180350618
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Eric HUDSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...
- Publication number 20150259802
- Publication date Sep 17, 2015
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...