Membership
Tour
Register
Log in
Zili ZHOU
Follow
Person
Eindhoven, NL
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Metrology method, patterning device, apparatus and computer program
Patent number
11,385,553
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Zili Zhou
G01 - MEASURING TESTING
Information
Patent Grant
Measurement apparatus and method of measuring a target
Patent number
11,042,100
Issue date
Jun 22, 2021
ASML Netherlands B.V.
Jin Lian
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, patterning device, apparatus and computer program
Patent number
10,996,570
Issue date
May 4, 2021
ASML Netherlands B.V.
Zili Zhou
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for measuring a parameter of interest using im...
Patent number
10,983,445
Issue date
Apr 20, 2021
ASML Netherlands B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Grant
Method of determining a value of a parameter of interest, method of...
Patent number
10,795,269
Issue date
Oct 6, 2020
ASML Netherlands B.V.
Zili Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of measuring a target, metrology apparatus, polarizer assembly
Patent number
10,747,124
Issue date
Aug 18, 2020
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus, lithographic system, and method of measuring a...
Patent number
10,599,047
Issue date
Mar 24, 2020
ASML Netherlands B.V.
Janneke Ravensbergen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
10,423,077
Issue date
Sep 24, 2019
ASML Netherlands B.V.
Nitesh Pandey
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a target, metrology apparatus, polarizer assembly
Patent number
10,353,298
Issue date
Jul 16, 2019
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, computer program and lithographic s...
Patent number
10,191,391
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY TOOL
Publication number
20240288782
Publication date
Aug 29, 2024
ASML NETHERLANDS B.V.
Zili ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for Coherence Scrambling in Metrology Applicat...
Publication number
20240231115
Publication date
Jul 11, 2024
ASML NETHERLANDS B.V.
Zili ZHOU
G02 - OPTICS
Information
Patent Application
Method and Apparatus for Coherence Scrambling in Metrology Applicat...
Publication number
20240134208
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Zili ZHOU
G02 - OPTICS
Information
Patent Application
METHODS AND APPARATUS FOR ACOUSTIC METROLOGY
Publication number
20240085379
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Mustafa Ümit ARABUL
G01 - MEASURING TESTING
Information
Patent Application
ILLUMINATION APPARATUS AND ASSOCIATED METROLOGY AND LITHOGRAPHIC AP...
Publication number
20230229094
Publication date
Jul 20, 2023
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G02 - OPTICS
Information
Patent Application
METHOD AND METROLOGY TOOL FOR DETERMINING INFORMATION ABOUT A TARGE...
Publication number
20220283122
Publication date
Sep 8, 2022
ASML NETHERLANDS B.V.
Zili ZHOU
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, PATTERNING DEVICE, APPARATUS AND COMPUTER PROGRAM
Publication number
20210255553
Publication date
Aug 19, 2021
ASML NETHERLANDS B.V.
Zili ZHOU
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method, Patterning Device, Apparatus and Computer Program
Publication number
20200110342
Publication date
Apr 9, 2020
ASML NETHERLANDS B.V.
Zili ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Measurement Apparatus and Method of Measuring a Target
Publication number
20190369505
Publication date
Dec 5, 2019
ASML NETHERLANDS B.V.
Jin LIAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly
Publication number
20190294054
Publication date
Sep 26, 2019
ASML NETHERLANDS B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR MEASURING A PARAMETER OF INTEREST USING IM...
Publication number
20190250094
Publication date
Aug 15, 2019
ASML NETHERLANDS B.V.
Nitesh PANDEY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
Publication number
20190146356
Publication date
May 16, 2019
ASML NETHERLANDS B.V.
Nitesh PANDEY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method Of Determining A Value Of A Parameter Of Interest, Method Of...
Publication number
20190129316
Publication date
May 2, 2019
ASML NETHERLANDS B.V.
Zili ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Apparatus, Lithographic System, And Method Of Measuring A...
Publication number
20180348645
Publication date
Dec 6, 2018
ASML NETHERLANDS B.V.
Janneke Ravensbergen
G01 - MEASURING TESTING
Information
Patent Application
Method of Measuring a Target, Metrology Apparatus, Polarizer Assembly
Publication number
20180157180
Publication date
Jun 7, 2018
ASML NETHERLANDS B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
Publication number
20170097575
Publication date
Apr 6, 2017
ASML NETHERLANDS B.V.
Nitesh PANDEY
G01 - MEASURING TESTING