Zin-Chein Wei

Person

Hsin-Chu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-zone temperature control for semiconductor wafer
- Patent number 10,113,233
- Issue date Oct 30, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotatable and tunable heaters for semiconductor furnace
- Patent number 9,105,591
- Issue date Aug 11, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zin-Chang Wei
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Multi-zone temperature control for semiconductor wafer
- Patent number 9,023,664
- Issue date May 5, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controlling silicon nitride etching tank
- Patent number 8,834,671
- Issue date Sep 16, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zin-Chang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotatable and tunable heaters for semiconductor furnace
- Patent number 8,536,491
- Issue date Sep 17, 2013
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zin-Chang Wei
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Apparatus and method for controlling silicon nitride etching tank
- Patent number 8,409,997
- Issue date Apr 2, 2013
- Taiwan Semiconductor Maufacturing Co., LTD
- Zin-Chang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone temperature control for semiconductor wafer
- Patent number 8,404,572
- Issue date Mar 26, 2013
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slurry dispenser for chemical mechanical polishing (CMP) apparatus...
- Patent number 8,277,286
- Issue date Oct 2, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kun-Ku Hung
- B24 - GRINDING POLISHING
Information Patent Grant
High selectivity etching process for metal gate N/P patterning
- Patent number 7,732,344
- Issue date Jun 8, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fang Wen Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process to define N/PMOS poly patterns
- Patent number 6,566,184
- Issue date May 20, 2003
- Taiwan Semiconductor Manufacturing Company
- Zin-Chein Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical-mechanical polishing method and apparatus
- Patent number 6,386,960
- Issue date May 14, 2002
- Taiwan Semiconductor Manufacturing Company
- Zin-Chein Wei
- B24 - GRINDING POLISHING
Information Patent Grant
Process design for wafer edge in VLSI
- Patent number 6,114,747
- Issue date Sep 5, 2000
- Taiwan Semiconductor Manufacturing Company
- Zin-Chein Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process design for wafer edge in vlsi
- Patent number 5,966,628
- Issue date Oct 12, 1999
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Zin-Chein Wei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
- Publication number 20170022611
- Publication date Jan 26, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
- Publication number 20150211122
- Publication date Jul 30, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATABLE AND TUNABLE HEATERS FOR SEMICONDUCTOR FURNACE
- Publication number 20130330938
- Publication date Dec 12, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Zin-Chang WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING SILICON NITRIDE ETCHING TANK
- Publication number 20130217235
- Publication date Aug 22, 2013
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Zin-Chang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
- Publication number 20130171746
- Publication date Jul 4, 2013
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CONDITIONING CHEMICAL MECHANICAL POLISHING AP...
- Publication number 20100291840
- Publication date Nov 18, 2010
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Soon Kang HUANG
- B24 - GRINDING POLISHING
Information Patent Application
ROTATABLE AND TUNABLE HEATERS FOR SEMICONDUCTOR FURNACE
- Publication number 20100248496
- Publication date Sep 30, 2010
- Talwan Semiconductor Manufacturing Co., Ltd.
- Zin-Chang WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER
- Publication number 20100210041
- Publication date Aug 19, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLURRY DISPENSER FOR CHEMICAL MECHANICAL POLISHING (CMP) APPARATUS...
- Publication number 20100210189
- Publication date Aug 19, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Kun-Ku Hung
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND SYSTEM FOR LOW TEMPERATURE ION IMPLANTATION
- Publication number 20100181500
- Publication date Jul 22, 2010
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin Chang
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING SILICON NITRIDE ETCHING TANK
- Publication number 20080179293
- Publication date Jul 31, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Zin-Chang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS OF CLEANING SUBSTRATES
- Publication number 20080047589
- Publication date Feb 28, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Min Huang
- B08 - CLEANING
Information Patent Application
Vertical metal-insulator-metal (MIM) capacitors
- Publication number 20060273427
- Publication date Dec 7, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Yi Hsin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming metal-insulator-metal (MIM) capacitors at copper...
- Publication number 20050087838
- Publication date Apr 28, 2005
- Taiwan Semiconductor Manufacturing Co.
- Ping-Yi Hsin
- H01 - BASIC ELECTRIC ELEMENTS

Zin-Chein Wei

Person

Patents Grantslast 30 patents

Multi-zone temperature control for semiconductor wafer

Rotatable and tunable heaters for semiconductor furnace

Multi-zone temperature control for semiconductor wafer

Apparatus and method for controlling silicon nitride etching tank

Rotatable and tunable heaters for semiconductor furnace

Apparatus and method for controlling silicon nitride etching tank

Multi-zone temperature control for semiconductor wafer

Slurry dispenser for chemical mechanical polishing (CMP) apparatus...

High selectivity etching process for metal gate N/P patterning

Process to define N/PMOS poly patterns

Chemical-mechanical polishing method and apparatus

Process design for wafer edge in VLSI

Process design for wafer edge in vlsi

Patents Applicationslast 30 patents

MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER

MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER

ROTATABLE AND TUNABLE HEATERS FOR SEMICONDUCTOR FURNACE

APPARATUS AND METHOD FOR CONTROLLING SILICON NITRIDE ETCHING TANK

MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER

SYSTEM AND METHOD FOR CONDITIONING CHEMICAL MECHANICAL POLISHING AP...

ROTATABLE AND TUNABLE HEATERS FOR SEMICONDUCTOR FURNACE

MULTI-ZONE TEMPERATURE CONTROL FOR SEMICONDUCTOR WAFER

SLURRY DISPENSER FOR CHEMICAL MECHANICAL POLISHING (CMP) APPARATUS...

METHOD AND SYSTEM FOR LOW TEMPERATURE ION IMPLANTATION

APPARATUS AND METHOD FOR CONTROLLING SILICON NITRIDE ETCHING TANK

APPARATUS AND METHODS OF CLEANING SUBSTRATES

Vertical metal-insulator-metal (MIM) capacitors

Method of forming metal-insulator-metal (MIM) capacitors at copper...