Zishu Zhang

Person

Boise, ID, US

People

Patents Grantslast 30 patents

Information Patent Grant
Lens heating compensation in photolithography
- Patent number 9,235,134
- Issue date Jan 12, 2016
- Micron Technology, Inc.
- Yuan He
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging devices, methods of forming same, and methods of forming se...
- Patent number 9,140,977
- Issue date Sep 22, 2015
- Micron Technology, Inc.
- Yuan He
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reticle with composite polarizer and method of simultaneous optimiz...
- Patent number 8,883,372
- Issue date Nov 11, 2014
- Nanya Technology Corp.
- Scott Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticles, and methods of mitigating asymmetric lens heating in phot...
- Patent number 8,845,908
- Issue date Sep 30, 2014
- Micron Technology, Inc.
- Scott L. Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor constructions and methods of forming patterns
- Patent number 8,815,497
- Issue date Aug 26, 2014
- Micron Technology, Inc.
- Dan Millward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography wave-front control system and method
- Patent number 8,736,814
- Issue date May 27, 2014
- Micron Technology, Inc.
- Yuan He
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of processing substrates
- Patent number 8,728,721
- Issue date May 20, 2014
- Micron Technology, Inc.
- Scott L. Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination design for lens heating mitigation
- Patent number 8,625,078
- Issue date Jan 7, 2014
- Nanya Technology Corp.
- Jianming Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of forming a patterned, silicon-enriched developable antire...
- Patent number 8,507,191
- Issue date Aug 13, 2013
- Micron Technology, Inc.
- Dan B. Millward
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor constructions and methods of forming patterns
- Patent number 8,486,611
- Issue date Jul 16, 2013
- Micron Technology, Inc.
- Dan Millward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming patterned masks
- Patent number 8,476,002
- Issue date Jul 2, 2013
- Micron Technology, Inc.
- Zishu Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging devices, methods of forming same, and methods of forming se...
- Patent number 8,440,371
- Issue date May 14, 2013
- Micron Technology, Inc.
- Yuan He
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods of forming a photoresist-comprising pattern on a substrate
- Patent number 8,409,457
- Issue date Apr 2, 2013
- Micron Technology, Inc.
- Zishu Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of forming patterned masks
- Patent number 8,288,083
- Issue date Oct 16, 2012
- Micron Technology, Inc.
- Zishu Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Phot...
- Publication number 20150015860
- Publication date Jan 15, 2015
- Micron Technology, Inc.
- Scott L. Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY WAVE-FRONT CONTROL SYSTEM AND METHOD
- Publication number 20140247476
- Publication date Sep 4, 2014
- Micron Technology, Inc.
- Yuan He
- G02 - OPTICS
Information Patent Application
RETICLE WITH COMPOSITE POLARIZER AND METHOD OF SIMULTANEOUS OPTIMIZ...
- Publication number 20130323628
- Publication date Dec 5, 2013
- Scott Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor Constructions And Methods Of Forming Patterns
- Publication number 20130302981
- Publication date Nov 14, 2013
- Dan Millward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING DEVICES, METHODS OF FORMING SAME, AND METHODS OF FORMING SE...
- Publication number 20130252142
- Publication date Sep 26, 2013
- Micron Technology, Inc.
- Yuan He
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Methods Of Processing Substrates
- Publication number 20130040245
- Publication date Feb 14, 2013
- Scott L. Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods of Forming Patterned Masks
- Publication number 20130004889
- Publication date Jan 3, 2013
- Micron Technology, Inc.
- Zishu Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY WAVE-FRONT CONTROL SYSTEM AND METHOD
- Publication number 20120314196
- Publication date Dec 13, 2012
- Micron Technology, Inc.
- Yuan He
- G02 - OPTICS
Information Patent Application
ILLUMINATION DESIGN FOR LENS HEATING MITIGATION
- Publication number 20120257177
- Publication date Oct 11, 2012
- Jianming Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF FORMING A PATTERNED, SILICON-ENRICHED DEVELOPABLE ANTIRE...
- Publication number 20120177891
- Publication date Jul 12, 2012
- Micron Technology, Inc.
- Dan B. Millward
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICES, METHODS OF FORMING SAME, AND METHODS OF FORMING SE...
- Publication number 20120178026
- Publication date Jul 12, 2012
- Micron Technology, Inc.
- Yuan He
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods Of Forming Patterned Masks
- Publication number 20120115074
- Publication date May 10, 2012
- Zishu Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Phot...
- Publication number 20120052416
- Publication date Mar 1, 2012
- Scott L. Light
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LENS HEATING COMPENSATION IN PHOTOLITHOGRAPHY
- Publication number 20120038895
- Publication date Feb 16, 2012
- Yuan He
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor Constructions And Methods Of Forming Patterns
- Publication number 20120015486
- Publication date Jan 19, 2012
- Dan Millward
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods Of Forming A Photoresist-Comprising Pattern On A Substrate
- Publication number 20100055913
- Publication date Mar 4, 2010
- Zishu Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Zishu Zhang

Person

Patents Grantslast 30 patents

Lens heating compensation in photolithography

Imaging devices, methods of forming same, and methods of forming se...

Reticle with composite polarizer and method of simultaneous optimiz...

Reticles, and methods of mitigating asymmetric lens heating in phot...

Semiconductor constructions and methods of forming patterns

Lithography wave-front control system and method

Methods of processing substrates

Illumination design for lens heating mitigation

Methods of forming a patterned, silicon-enriched developable antire...

Semiconductor constructions and methods of forming patterns

Methods of forming patterned masks

Imaging devices, methods of forming same, and methods of forming se...

Methods of forming a photoresist-comprising pattern on a substrate

Methods of forming patterned masks

Patents Applicationslast 30 patents

Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Phot...

LITHOGRAPHY WAVE-FRONT CONTROL SYSTEM AND METHOD

RETICLE WITH COMPOSITE POLARIZER AND METHOD OF SIMULTANEOUS OPTIMIZ...

Semiconductor Constructions And Methods Of Forming Patterns

IMAGING DEVICES, METHODS OF FORMING SAME, AND METHODS OF FORMING SE...

Methods Of Processing Substrates

Methods of Forming Patterned Masks

LITHOGRAPHY WAVE-FRONT CONTROL SYSTEM AND METHOD

ILLUMINATION DESIGN FOR LENS HEATING MITIGATION

METHODS OF FORMING A PATTERNED, SILICON-ENRICHED DEVELOPABLE ANTIRE...

IMAGING DEVICES, METHODS OF FORMING SAME, AND METHODS OF FORMING SE...

Methods Of Forming Patterned Masks

Reticles, And Methods Of Mitigating Asymmetric Lens Heating In Phot...

LENS HEATING COMPENSATION IN PHOTOLITHOGRAPHY

Semiconductor Constructions And Methods Of Forming Patterns

Methods Of Forming A Photoresist-Comprising Pattern On A Substrate