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last 30 patents
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Patent Grant
Methods for vapor deposition of group 4 transition metal-containing...
Patent number
11,008,351
Issue date
May 18, 2021
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Composition and method for low temperature chemical vapor depositio...
Patent number
9,783,558
Issue date
Oct 10, 2017
Entegris, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature chemical vapor depositio...
Patent number
9,102,693
Issue date
Aug 11, 2015
Entegris, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Method of forming a tantalum-containing layer on a substrate
Patent number
9,085,823
Issue date
Jul 21, 2015
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Nicolas Blasco
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Synthesis method for carbosilanes
Patent number
9,073,952
Issue date
Jul 7, 2015
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Zhiwen Wan
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Synthesis methods for carbosilanes
Patent number
8,859,797
Issue date
Oct 14, 2014
Air Liquide Electronics U.S. LP
Zhiwen Wan
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Method for forming a titanium-containing layer on a substrate using...
Patent number
8,853,075
Issue date
Oct 7, 2014
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
Satoko Gatineau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composition and method for low temperature chemical vapor depositio...
Patent number
8,802,882
Issue date
Aug 12, 2014
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Monosilane or disilane derivatives and method for low temperature d...
Patent number
8,541,318
Issue date
Sep 24, 2013
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Monosilane or disilane derivatives and method for low temperature d...
Patent number
8,242,032
Issue date
Aug 14, 2012
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
8,236,097
Issue date
Aug 7, 2012
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon precursors and method for low temperature CVD of silicon-co...
Patent number
8,227,358
Issue date
Jul 24, 2012
Air Liquide Electronics U.S. LP
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
8,153,833
Issue date
Apr 10, 2012
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon precursors and method for low temperature CVD of silicon-co...
Patent number
8,101,788
Issue date
Jan 24, 2012
Air Liquide Electronics U.S. LP
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
7,910,765
Issue date
Mar 22, 2011
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
7,887,883
Issue date
Feb 15, 2011
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Monosilane or disilane derivatives and method for low temperature d...
Patent number
7,863,203
Issue date
Jan 4, 2011
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
7,786,320
Issue date
Aug 31, 2010
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Composition and method for low temperature chemical vapor depositio...
Patent number
7,781,605
Issue date
Aug 24, 2010
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
7,713,346
Issue date
May 11, 2010
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Composition and method for low temperature chemical vapor depositio...
Patent number
7,601,860
Issue date
Oct 13, 2009
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Monosilane or disilane derivatives and method for low temperature d...
Patent number
7,579,496
Issue date
Aug 25, 2009
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
7,531,679
Issue date
May 12, 2009
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Composition and method for low temperature deposition of silicon-co...
Patent number
7,446,217
Issue date
Nov 4, 2008
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for trace water analysis in cyclic siloxanes useful as precu...
Patent number
7,439,318
Issue date
Oct 21, 2008
Advanced Technology Materials, Inc.
Alexander S. Borovik
G01 - MEASURING TESTING
Information
Patent Grant
Method for trace water analysis in cyclic siloxanes useful as precu...
Patent number
7,189,571
Issue date
Mar 13, 2007
Advanced Technology Materials, Inc.
Alexander S. Borovik
G01 - MEASURING TESTING
Information
Patent Grant
Method for removal of impurities in cyclic siloxanes useful as prec...
Patent number
7,108,771
Issue date
Sep 19, 2006
Advanced Technology Materials, Inc.
Chongying Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon source reagent compositions, and method of making and using...
Patent number
7,084,080
Issue date
Aug 1, 2006
Advanced Technology Materials, Inc.
Alexander S. Borovik
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Br2SbCH3 a solid source ion implant and CVD precursor
Patent number
6,767,830
Issue date
Jul 27, 2004
Advanced Technology Materials, Inc.
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pyrazolate copper complexes, and MOCVD of copper using same
Patent number
6,639,080
Issue date
Oct 28, 2003
Advanced Technology Materials, Inc.
Chongying Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
GALLIUM PRECURSORS FOR DEPOSITION OF GALLIUM-CONTAINING OXIDE FILMS
Publication number
20240287675
Publication date
Aug 29, 2024
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Bo PENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROUP 4 TRANSITION METAL-CONTAINING FILM FORMING COMPOSITIONS FOR V...
Publication number
20190218233
Publication date
Jul 18, 2019
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Ziyun WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
Publication number
20150315215
Publication date
Nov 5, 2015
Entegris, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
Publication number
20140329011
Publication date
Nov 6, 2014
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SILICON CONTAINING COMPOUNDS FOR ALD DEPOSITION OF METAL SILICATE F...
Publication number
20140322924
Publication date
Oct 30, 2014
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20120178267
Publication date
Jul 12, 2012
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...
Publication number
20120156894
Publication date
Jun 21, 2012
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
METHOD FOR FORMING A TITANIUM-CONTAINING LAYER ON A SUBSTRATE USING...
Publication number
20110275215
Publication date
Nov 10, 2011
Satoko Gatineau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20110183528
Publication date
Jul 28, 2011
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
SILICON PRECURSORS AND METHOD FOR LOW TEMPERATURE CVD OF SILICON-CO...
Publication number
20110171381
Publication date
Jul 14, 2011
Air Liquide Electronics U.S. LP
Ziyun WANG
C07 - ORGANIC CHEMISTRY
Information
Patent Application
MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...
Publication number
20110165762
Publication date
Jul 7, 2011
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20110136343
Publication date
Jun 9, 2011
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
Publication number
20100314590
Publication date
Dec 16, 2010
Advanced Technology Materials, Inc.
Ziyun WANG
C07 - ORGANIC CHEMISTRY
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20100285663
Publication date
Nov 11, 2010
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20100221914
Publication date
Sep 2, 2010
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE CHEMICAL VAPOR DEPOSITIO...
Publication number
20100068894
Publication date
Mar 18, 2010
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20090281344
Publication date
Nov 12, 2009
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
Publication number
20090084288
Publication date
Apr 2, 2009
Advanced Technology Materials, Inc.
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
NON-FLAMMABLE SOLVENTS FOR SEMICONDUCTOR APPLICATIONS
Publication number
20090020140
Publication date
Jan 22, 2009
AIR LIQUIDE ELECTRONICS U.S. LP
Zhiwen WAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MONOSILANE OR DISILANE DERIVATIVES AND METHOD FOR LOW TEMPERATURE D...
Publication number
20080160174
Publication date
Jul 3, 2008
Advanced Technology Materials, Inc.
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SILICON PRECURSORS AND METHOD FOR LOW TEMPERATURE CVD OF SILICON-CO...
Publication number
20080081106
Publication date
Apr 3, 2008
AIR LIQUIDE ELECTRONICS U.S. LP
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
METHOD FOR TRACE WATER ANALYSIS IN CYCLIC SILOXANES USEFUL AS PRECU...
Publication number
20070155931
Publication date
Jul 5, 2007
Alexander S. Borovik
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Method for removal of impurities in cyclic siloxanes useful as prec...
Publication number
20060235182
Publication date
Oct 19, 2006
Chongying Xu
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Silicon source reagent compositions, and method of making and using...
Publication number
20060148271
Publication date
Jul 6, 2006
Alexander S. Borovik
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Silicon source reagent compositions, and method of making and using...
Publication number
20060099831
Publication date
May 11, 2006
Alexander S. Borovik
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Monosilane or disilane derivatives and method for low temperature d...
Publication number
20050080285
Publication date
Apr 14, 2005
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Composition and method for low temperature chemical vapor depositio...
Publication number
20050080286
Publication date
Apr 14, 2005
Ziyun Wang
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Composition and method for low temperature deposition of silicon-co...
Publication number
20040138489
Publication date
Jul 15, 2004
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
Composition and method for low temperature deposition of silicon-co...
Publication number
20040096582
Publication date
May 20, 2004
Ziyun Wang
C30 - CRYSTAL GROWTH
Information
Patent Application
Br2SbCH3 a solid source ion implant and CVD precursor
Publication number
20040029367
Publication date
Feb 12, 2004
Ziyun Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...