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Zohra Chahra
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Meylan, FR
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last 30 patents
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Patent Grant
Planarization of a heteroepitaxial layer
Patent number
7,718,534
Issue date
May 18, 2010
S.O.I. Tec Silicon on Insulator Technologies
Muriel Martinez
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
PLANARIZATION OF A HETEROEPITAXIAL LAYER
Publication number
20070087570
Publication date
Apr 19, 2007
Muriel Martinez
B24 - GRINDING POLISHING