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Zonghui SU
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Bevel etch profile control
Patent number
10,629,427
Issue date
Apr 21, 2020
Applied Materials, Inc.
Zonghui Su
B08 - CLEANING
Information
Patent Grant
Critical methodology in vacuum chambers to determine gap and leveli...
Patent number
10,599,043
Issue date
Mar 24, 2020
Applied Materials, Inc.
Hiroyuki Ogiso
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Bevel etch profile control
Patent number
10,276,364
Issue date
Apr 30, 2019
Applied Materials, Inc.
Zonghui Su
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES
Publication number
20210296144
Publication date
Sep 23, 2021
Applied Materials, Inc.
Xing LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEVEL ETCH PROFILE CONTROL
Publication number
20190214249
Publication date
Jul 11, 2019
Applied Materials, Inc.
Zonghui SU
B08 - CLEANING
Information
Patent Application
BEVEL ETCH PROFILE CONTROL
Publication number
20180323062
Publication date
Nov 8, 2018
Applied Materials, Inc.
Zonghui SU
B08 - CLEANING
Information
Patent Application
CRITICAL METHODOLOGY IN VACUUM CHAMBERS TO DETERMINE GAP AND LEVELI...
Publication number
20180046088
Publication date
Feb 15, 2018
Applied Materials, Inc.
Hiroyuki OGISO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES
Publication number
20170306494
Publication date
Oct 26, 2017
Applied Materials, Inc.
Xing LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...