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Zongliang Cao
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Ann Arbor, MI, US
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Patents Grants
last 30 patents
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Patent Grant
Microsystem device and methods for fabricating the same
Patent number
9,778,039
Issue date
Oct 3, 2017
The Regents of the University of Michigan
Khalil Najafi
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
MICROSYSTEM DEVICE AND METHODS FOR FABRICATING THE SAME
Publication number
20130105921
Publication date
May 2, 2013
The Regents of the University of Michigan
Khalil Najafi
G01 - MEASURING TESTING