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Zongyu Li
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Shield or ring surrounding semiconductor workpiece in plasma chamber
Patent number
6,689,249
Issue date
Feb 10, 2004
Applied Materials, Inc.
Kuang-Han Ke
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
High-density plasma etching of carbon-based low-k materials in a in...
Patent number
6,284,149
Issue date
Sep 4, 2001
Applied Materials, Inc.
Zongyu Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shield or ring surrounding semiconductor workpiece in plasma chamber
Patent number
6,284,093
Issue date
Sep 4, 2001
Applied Materials, Inc.
Kuang-Han Ke
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Etching an oxidized organo-silane film
Patent number
6,168,726
Issue date
Jan 2, 2001
Applied Materials, Inc.
Zongyu Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically-enhanced plasma chamber with non-uniform magnetic field
Patent number
6,113,731
Issue date
Sep 5, 2000
Applied Materials, Inc.
Hongching Shan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Shield or ring surrounding semiconductor workpiece in plasma chamber
Publication number
20020066531
Publication date
Jun 6, 2002
APPLIED MATERIALS, INC.
Kuang-Han Ke
H01 - BASIC ELECTRIC ELEMENTS