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Zoran Dragojlovic
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San Jose, CA, US
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last 30 patents
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Patent Grant
Doped silicon deposition process in resistively heated single wafer...
Patent number
6,559,039
Issue date
May 6, 2003
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Silicon deposition process in resistively heated single wafer chamber
Publication number
20030207547
Publication date
Nov 6, 2003
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DOPED SILICON DEPOSITION PROCESS IN RESISTIVELY HEATED SINGLE WAFER...
Publication number
20020173127
Publication date
Nov 21, 2002
APPLIED MATERIALS, INC.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...