TREA

ZUOMING ZHU

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  • Sunnyvale, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Temperature profile measurement and synchronized control on substra...
    • Patent number 12,196,617
    • Issue date Jan 14, 2025
    • Applied Materials, Inc.
    • Zuoming Zhu
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Multi zone spot heating in EPI
    • Patent number 12,163,229
    • Issue date Dec 10, 2024
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Substrate processing monitoring
    • Patent number 12,165,934
    • Issue date Dec 10, 2024
    • Applied Materials, Inc.
    • Zuoming Zhu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and system for foreline deposition diagnostics and control
    • Patent number 11,860,973
    • Issue date Jan 2, 2024
    • Applied Materials, Inc.
    • Ala Moradian
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Thermal processing susceptor
    • Patent number 11,848,226
    • Issue date Dec 19, 2023
    • Applied Materials, Inc.
    • Anhthu Ngo
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Multi zone spot heating in EPI
    • Patent number 11,821,088
    • Issue date Nov 21, 2023
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Methods, systems, and apparatus for conducting a calibration operat...
    • Patent number 11,733,081
    • Issue date Aug 22, 2023
    • Applied Materials, Inc.
    • Bindusagar Marath Sankarathodi
    • G01 - MEASURING TESTING
  • Information Patent Grant

    In-situ temperature mapping for epi chamber
    • Patent number 11,261,538
    • Issue date Mar 1, 2022
    • Applied Materials, Inc.
    • Ala Moradian
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer spot heating with beam width modulation
    • Patent number 11,177,144
    • Issue date Nov 16, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Multi zone spot heating in epi
    • Patent number 11,021,795
    • Issue date Jun 1, 2021
    • Applied Materials, Inc.
    • Shu-Kwan Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Thermal processing susceptor
    • Patent number 10,930,543
    • Issue date Feb 23, 2021
    • Applied Materials, Inc.
    • Anhthu Ngo
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    EPI thickness tuning by pulse or profile spot heating
    • Patent number 10,770,319
    • Issue date Sep 8, 2020
    • Applied Materials, Inc.
    • Shu-Kwan Danny Lau
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Thermal processing susceptor
    • Patent number 10,062,598
    • Issue date Aug 28, 2018
    • Applied Materials, Inc.
    • Anhthu Ngo
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Absorbing lamphead face
    • Patent number 9,842,753
    • Issue date Dec 12, 2017
    • Applied Materials, Inc.
    • Paul Brillhart
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Quartz upper and lower domes
    • Patent number 9,768,043
    • Issue date Sep 19, 2017
    • Applied Materials, Inc.
    • Anzhong Chang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Epitaxial chamber with cross flow
    • Patent number 9,127,360
    • Issue date Sep 8, 2015
    • Applied Materials, Inc.
    • Balasubramanian Ramachandran
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents