Zuoying L. Zhang

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Ithaca, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
RIE process for fabricating submicron, silicon electromechanical st...
- Patent number 5,316,979
- Issue date May 31, 1994
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
RIE process for fabricating submicron, silicon electromechanical st...
- Patent number 5,198,390
- Issue date Mar 30, 1993
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective chemical vapor deposition of tungsten for microdynamic st...
- Patent number 5,149,673
- Issue date Sep 22, 1992
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Microdynamic release structure
- Patent number 5,072,288
- Issue date Dec 10, 1991
- Cornell Research Foundation, Inc.
- Noel C. MacDonald
- B82 - NANO-TECHNOLOGY