adhesion, stress, lift-off of deposited films

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CPC
H01J2237/3328

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/3328adhesion, stress, lift-off of deposited films

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Patents Grantslast 30 patents

Information Patent Grant
Member for plasma processing device and plasma processing device pr...
- Patent number 12,065,727
- Issue date Aug 20, 2024
- Kyocera Corporation
- Kazuhiro Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Common substrate and shadow ring lift apparatus
- Patent number 11,881,375
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Abhishek Chowdhury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal spraying method of component for plasma processing apparatu...
- Patent number 11,328,905
- Issue date May 10, 2022
- Tokyo Electron Limited
- Yoshiyuki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Roll to roll fabrication apparatus for preventing thermal impact
- Patent number 11,008,656
- Issue date May 18, 2021
- LG Display Co., Ltd.
- Seunghyun Youk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate mounting table
- Patent number 10,968,514
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Kohichi Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,625
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,580,624
- Issue date Mar 3, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,529,544
- Issue date Jan 7, 2020
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,483,093
- Issue date Nov 19, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,438,778
- Issue date Oct 8, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,438,777
- Issue date Oct 8, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,340,126
- Issue date Jul 2, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,290,474
- Issue date May 14, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,290,473
- Issue date May 14, 2019
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,163,608
- Issue date Dec 25, 2018
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,115,570
- Issue date Oct 30, 2018
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 10,083,821
- Issue date Sep 25, 2018
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Reactive sputtering apparatus
- Patent number 9,905,401
- Issue date Feb 27, 2018
- Canon Anelva Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 9,478,401
- Issue date Oct 25, 2016
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma source and methods for depositing thin film coatings using p...
- Patent number 8,652,586
- Issue date Feb 18, 2014
- AGC FLAT GLASS NORTH AMERICA, INC.
- Peter Maschwitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a gap filling refractory metal layer having redu...
- Patent number 6,271,129
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Steve Ghanayem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma CVD device
- Patent number 5,861,063
- Issue date Jan 19, 1999
- Kentaro Shou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method
- Patent number 5,492,737
- Issue date Feb 20, 1996
- Electrotech Equipments Limited
- Christopher Dobson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrical contact apparatus for use with plasma or glow discharge...
- Patent number 4,917,044
- Issue date Apr 17, 1990
- Intel Corporation
- Leopoldo D. Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed dual radio frequency CVD process
- Patent number 4,837,185
- Issue date Jun 6, 1989
- Intel Corporation
- Leopoldo D. Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-ASSISTED FILM REMOVAL FOR WAFER FABRICATION
- Publication number 20240242939
- Publication date Jul 18, 2024
- Micron Technology, Inc.
- Chao Lin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE MODIFICATION FOR METAL-CONTAINING PHOTORESIST DEPOSITION
- Publication number 20230230811
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMMON SUBSTRATE AND SHADOW RING LIFT APPARATUS
- Publication number 20220336182
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Abhishek CHOWDHURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR PLASMA PROCESSING DEVICE AND PLASMA PROCESSING DEVICE PR...
- Publication number 20220042161
- Publication date Feb 10, 2022
- KYOCERA CORPORATION
- Kazuhiro ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING
- Publication number 20200365404
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL FREQUENCY SILANE-BASED SILICON DIOXIDE DEPOSITION TO MINIMIZE...
- Publication number 20200098562
- Publication date Mar 26, 2020
- LAM RESEARCH CORPORATION
- Joseph Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL SPRAYING METHOD OF COMPONENT FOR PLASMA PROCESSING APPARATU...
- Publication number 20190019654
- Publication date Jan 17, 2019
- TOKYO ELECTRON LIMITED
- Yoshiyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT
- Publication number 20180148843
- Publication date May 31, 2018
- LG Display Co., Ltd.
- Seunghyun YOUK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR METALLIZING DIELECTRIC SUBSTRATE SURFACE, AND DIELECTRIC...
- Publication number 20160362791
- Publication date Dec 15, 2016
- Osaka University
- Kazuya Yamamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS
- Publication number 20150235822
- Publication date Aug 20, 2015
- Canon ANELVA Corporation
- Yoshihiro MUTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTIVE SPUTTERING APPARATUS
- Publication number 20150206714
- Publication date Jul 23, 2015
- Canon ANELVA Corporation
- NOBUO YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM FILM DEPOSITION DEVICE AND VACUUM FILM DEPOSITION METHOD
- Publication number 20150060263
- Publication date Mar 5, 2015
- TORAY INDUSTRIES, INC.
- Mamoru Kawashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...
- Publication number 20150002021
- Publication date Jan 1, 2015
- AGC Flat Glass North America, Inc.
- Peter MASCHWITZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...
- Publication number 20140220361
- Publication date Aug 7, 2014
- AGC Flat Glass North America, Inc.
- Peter MASCHWITZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...
- Publication number 20140216343
- Publication date Aug 7, 2014
- AGC Flat Glass North America, Inc.
- Peter MASCHWITZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE SPUTTERING APPARATUS
- Publication number 20120152736
- Publication date Jun 21, 2012
- Canon ANELVA Corporation
- Nobuo Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...
- Publication number 20100028238
- Publication date Feb 4, 2010
- AGC Flat Glass North America, Inc.
- Peter MASCHWITZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20060035035
- Publication date Feb 16, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Mitsunori Sakama
- C30 - CRYSTAL GROWTH

adhesion, stress, lift-off of deposited films

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Member for plasma processing device and plasma processing device pr...

Common substrate and shadow ring lift apparatus

Thermal spraying method of component for plasma processing apparatu...

Roll to roll fabrication apparatus for preventing thermal impact

Substrate mounting table

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Reactive sputtering apparatus

Plasma source and methods for depositing thin film coatings using p...

Plasma source and methods for depositing thin film coatings using p...

Method for forming a gap filling refractory metal layer having redu...

Plasma CVD device

Deposition apparatus and method

Electrical contact apparatus for use with plasma or glow discharge...

Pulsed dual radio frequency CVD process

Patents Applicationslast 30 patents

PLASMA-ASSISTED FILM REMOVAL FOR WAFER FABRICATION

SURFACE MODIFICATION FOR METAL-CONTAINING PHOTORESIST DEPOSITION

COMMON SUBSTRATE AND SHADOW RING LIFT APPARATUS

MEMBER FOR PLASMA PROCESSING DEVICE AND PLASMA PROCESSING DEVICE PR...

BEVEL PEELING AND DEFECTIVITY SOLUTION FOR SUBSTRATE PROCESSING

DUAL FREQUENCY SILANE-BASED SILICON DIOXIDE DEPOSITION TO MINIMIZE...

THERMAL SPRAYING METHOD OF COMPONENT FOR PLASMA PROCESSING APPARATU...

ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT

METHOD FOR METALLIZING DIELECTRIC SUBSTRATE SURFACE, AND DIELECTRIC...

PROCESSING APPARATUS

REACTIVE SPUTTERING APPARATUS

VACUUM FILM DEPOSITION DEVICE AND VACUUM FILM DEPOSITION METHOD

PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...

PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...

PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...

REACTIVE SPUTTERING APPARATUS

PLASMA SOURCE AND METHODS FOR DEPOSITING THIN FILM COATINGS USING P...

Film forming method and film forming apparatus