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H01L21/02664

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02664Aftertreatments

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing method of metal oxide and manufacturing method of sem...
- Patent number 12,176,210
- Issue date Dec 24, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for determining suitability of silicon substrates for epitaxy
- Patent number 12,152,314
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- Shan-Hui Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene-based nanosensor for identifying target analytes
- Patent number 12,059,251
- Issue date Aug 13, 2024
- The Trustees of Columbia University In the City of New York
- Qiao Lin
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method of fabricating vertically oriented planar structures for adv...
- Patent number 12,051,588
- Issue date Jul 30, 2024
- The Penn State Research Foundation
- Joshua Alexander Robinson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a lithium tantalate and/or lithium niobate waf...
- Patent number 12,012,669
- Issue date Jun 18, 2024
- Fujian Jing'An Optoelectronics Co., Ltd.
- Mingxin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elastic strain engineering of defect doped materials
- Patent number 11,996,446
- Issue date May 28, 2024
- Massachusetts Institute of Technology
- Ming Dao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including semiconductor liner and method for f...
- Patent number 11,929,279
- Issue date Mar 12, 2024
- SK Hynix Inc.
- Jin Woong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device and method for manufacturing the same
- Patent number 11,923,206
- Issue date Mar 5, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group III nitride laminate, semiconductor element, and method for p...
- Patent number 11,908,902
- Issue date Feb 20, 2024
- Sumitomo Chemical Company, Limited
- Hajime Fujikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,894,380
- Issue date Feb 6, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Grant
Methods for routing a guidewire from a first vessel and through a s...
- Patent number 11,826,504
- Issue date Nov 28, 2023
- LimFlow GmbH
- Timothy Lenihan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,830,880
- Issue date Nov 28, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Grant
Semiconductor device
- Patent number 11,791,400
- Issue date Oct 17, 2023
- Samsung Electronics Co., Ltd.
- Jaemun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 11,791,410
- Issue date Oct 17, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fang-Liang Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor on diamond substrate, precursor for use in preparing...
- Patent number 11,791,157
- Issue date Oct 17, 2023
- THE UNIVERSITY OF BRISTOL
- Martin Hermann Hans Kuball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heterostructure for an optoelectronic device
- Patent number 11,791,438
- Issue date Oct 17, 2023
- Sensor Electronic Technology, Inc.
- Mikhail Gaevski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,776,964
- Issue date Oct 3, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Grant
Selective deposition of silicon using deposition-treat-etch process
- Patent number 11,769,666
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing of semiconductor films with reduced evaporati...
- Patent number 11,735,419
- Issue date Aug 22, 2023
- The Regents of the University of California
- Christian J. Zollner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 11,728,406
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensionally stretchable single crystalline semiconductor me...
- Patent number 11,697,889
- Issue date Jul 11, 2023
- International Business Machines Corporation
- Alexander Reznicek
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 11,688,813
- Issue date Jun 27, 2023
- Samsung Electronics Co., Ltd.
- Seung Mo Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivated nanoparticles
- Patent number 11,656,231
- Issue date May 23, 2023
- Tectus Corporation
- Lianhua Qu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,658,028
- Issue date May 23, 2023
- Tokyo Electron Limited
- Rui Kanemura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method for producing SiC epitaxial wafer
- Patent number 11,600,538
- Issue date Mar 7, 2023
- Showa Denko K.K.
- Naoto Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon film forming method and substrate processing apparatus
- Patent number 11,600,490
- Issue date Mar 7, 2023
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen management in plasma deposited films
- Patent number 11,562,902
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display device and method for manufacturing the same
- Patent number 11,532,488
- Issue date Dec 20, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanowire bending for planar device process on (001) Si substrates
- Patent number 11,469,104
- Issue date Oct 11, 2022
- Seung-Chang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon on insulator structure and method of making the same
- Patent number 11,443,941
- Issue date Sep 13, 2022
- ZING SEMICONDUCTOR CORPORATION
- Xing Wei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR WAFER, AND NITRIDE S...
- Publication number 20240404826
- Publication date Dec 5, 2024
- Shin-Etsu Handotai Co., Ltd.
- Kazunori HAGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION AND TREATMENT OF NANO-GRAPHENE AT LOW TEMPERATURES
- Publication number 20240395544
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Kashish SHARMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240395936
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fang-Liang LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, MANUFA...
- Publication number 20240337013
- Publication date Oct 10, 2024
- FUJIFILM CORPORATION
- Atsushi Mizutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20240266169
- Publication date Aug 8, 2024
- Jusung Engineering Co., Ltd.
- Chul Joo HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A GROWTH SUBSTRATE AND GROWTH SUBSTRATE
- Publication number 20240234134
- Publication date Jul 11, 2024
- ams-OSRAM International GmbH
- Viola Miran Kueller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240234423
- Publication date Jul 11, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- G11 - INFORMATION STORAGE
Information Patent Application
METHODS FOR ROUTING A GUIDEWIRE FROM A FIRST VESSEL AND THROUGH A S...
- Publication number 20240216600
- Publication date Jul 4, 2024
- LIMFLOW GMBH
- Timothy Lenihan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LARGE-AREA III-V SEMICONDUCTOR LAYER TRANSFERRING METHOD
- Publication number 20240213085
- Publication date Jun 27, 2024
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Ho Sung KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING AN ELECTRONIC DEVICE
- Publication number 20240203731
- Publication date Jun 20, 2024
- Commissariat a I'Energie Atomique et aux Energies Alternatives
- Rémy Gassilloud
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240186151
- Publication date Jun 6, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240136358
- Publication date Apr 25, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- G11 - INFORMATION STORAGE
Information Patent Application
COMPOUND SEMICONDUCTOR LAYERED STRUCTURE AND PROCESS FOR PREPARING...
- Publication number 20240128080
- Publication date Apr 18, 2024
- Umicore
- Markus LEITGEB
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240120339
- Publication date Apr 11, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240120340
- Publication date Apr 11, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240120341
- Publication date Apr 11, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Application
GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...
- Publication number 20240105450
- Publication date Mar 28, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Yoganand Saripalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE
- Publication number 20240071756
- Publication date Feb 29, 2024
- SUMCO CORPORATION
- Koji MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING METAL OXIDE
- Publication number 20240026537
- Publication date Jan 25, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20230395602
- Publication date Dec 7, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20230395603
- Publication date Dec 7, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G11 - INFORMATION STORAGE
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20230369487
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fang-Liang LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20230352563
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- De-Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEDGE-DIRECTED EPITAXY OF CONTINUOUSLY SELF-ALIGNED SINGLE-CRYSTALL...
- Publication number 20230335587
- Publication date Oct 19, 2023
- KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Vincent Chun-Chih TUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT SUBSTRATE FOR BONDED WAFER
- Publication number 20230230875
- Publication date Jul 20, 2023
- SUMCO CORPORATION
- Shota SHIBUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
- Publication number 20230163192
- Publication date May 25, 2023
- GREE ELECTRIC APPLIANCES, INC. OF ZHUHAI
- Yiren LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS
- Publication number 20230146981
- Publication date May 11, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR LAYER, METHOD FOR MANUFACTURING SAME, AND TRANSISTOR...
- Publication number 20230146033
- Publication date May 11, 2023
- HANSOL CHEMICAL CO., LTD
- Hyun-Kyung LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20230085495
- Publication date Mar 16, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HELIUM-FREE SILICON FORMATION
- Publication number 20220336216
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Zeqiong Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Aftertreatments

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Manufacturing method of metal oxide and manufacturing method of sem...

Methods for determining suitability of silicon substrates for epitaxy

Graphene-based nanosensor for identifying target analytes

Method of fabricating vertically oriented planar structures for adv...

Method of processing a lithium tantalate and/or lithium niobate waf...

Elastic strain engineering of defect doped materials

Semiconductor device including semiconductor liner and method for f...

Display device and method for manufacturing the same

Group III nitride laminate, semiconductor element, and method for p...

Semiconductor device

Methods for routing a guidewire from a first vessel and through a s...

Semiconductor device

Semiconductor device

Semiconductor device and manufacturing method thereof

Semiconductor on diamond substrate, precursor for use in preparing...

Heterostructure for an optoelectronic device

Semiconductor device

Selective deposition of silicon using deposition-treat-etch process

Method for processing of semiconductor films with reduced evaporati...

Semiconductor device and method

Three-dimensionally stretchable single crystalline semiconductor me...

Method of fabricating semiconductor device

Passivated nanoparticles

Film forming method and film forming apparatus

SiC epitaxial wafer and method for producing SiC epitaxial wafer

Silicon film forming method and substrate processing apparatus

Hydrogen management in plasma deposited films

Display device and method for manufacturing the same

Nanowire bending for planar device process on (001) Si substrates

Silicon on insulator structure and method of making the same

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR WAFER, AND NITRIDE S...

DEPOSITION AND TREATMENT OF NANO-GRAPHENE AT LOW TEMPERATURES

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, MANUFA...

POWER SEMICONDUCTOR DEVICE MANUFACTURING METHOD

METHOD FOR PRODUCING A GROWTH SUBSTRATE AND GROWTH SUBSTRATE

SEMICONDUCTOR DEVICE

METHODS FOR ROUTING A GUIDEWIRE FROM A FIRST VESSEL AND THROUGH A S...

LARGE-AREA III-V SEMICONDUCTOR LAYER TRANSFERRING METHOD

METHOD OF MANUFACTURING AN ELECTRONIC DEVICE

DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE

COMPOUND SEMICONDUCTOR LAYERED STRUCTURE AND PROCESS FOR PREPARING...

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...

METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE

METHOD FOR FORMING METAL OXIDE

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Semiconductor Device and Method

LEDGE-DIRECTED EPITAXY OF CONTINUOUSLY SELF-ALIGNED SINGLE-CRYSTALL...

SUPPORT SUBSTRATE FOR BONDED WAFER

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR

HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS

SEMICONDUCTOR LAYER, METHOD FOR MANUFACTURING SAME, AND TRANSISTOR...

DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME

HELIUM-FREE SILICON FORMATION