Apparatus

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CPC
C23F1/08

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CCHEMISTRY METALLURGY C23Surface treatment C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 C23F1/00Etching metallic material by chemical means

Current Industry

C23F1/08Apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Chamber wall polymer protection system and method
- Patent number 11,993,854
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Hsun Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, film formation unit, substrate proc...
- Patent number 11,986,853
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,905,603
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Takashi Nakazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 11,869,770
- Issue date Jan 9, 2024
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automotive part identification marking system
- Patent number 11,826,775
- Issue date Nov 28, 2023
- CatMarks Manufacturing, LLC
- Milton Rodriguez
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Wetting processing apparatus and operation method thereof
- Patent number 11,810,797
- Issue date Nov 7, 2023
- PYXIS CF PTE. LTD.
- Amlan Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of supporting a graphene sheet disposed on a frame support
- Patent number 11,708,637
- Issue date Jul 25, 2023
- The Regents of the University of California
- Bong-Gyoon Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma block with integrated cooling
- Patent number 11,710,630
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Tanmay P. Gurjar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nanoparticle compositions
- Patent number 11,306,399
- Issue date Apr 19, 2022
- JANUARY THERAPEUTICS, INC.
- Raj Raheja
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of surface micro-texturing with a subtractive agent
- Patent number 11,142,830
- Issue date Oct 12, 2021
- The Boeing Company
- Raj Desai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of surface micro-texturing with a subtractive agent
- Patent number 11,136,673
- Issue date Oct 5, 2021
- The Boeing Company
- Raj Desai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for copper etch rate monitoring and control
- Patent number 11,099,131
- Issue date Aug 24, 2021
- University of North Texas
- Oliver Ming-Ren Chyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 11,094,542
- Issue date Aug 17, 2021
- Lam Research Corporation
- Nagraj Shankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition with atomic layer etch reset
- Patent number 10,998,187
- Issue date May 4, 2021
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for transfer of two-dimensional materials
- Patent number 10,995,409
- Issue date May 4, 2021
- ETX Corporation
- Ethan R. Torrey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Calibration system and calibrating method
- Patent number 10,957,471
- Issue date Mar 23, 2021
- Tyco Electronics (Shanghai) Co. Ltd.
- Fengchun Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Additive metal deposition process
- Patent number 10,941,495
- Issue date Mar 9, 2021
- Incodema3D, LLC
- Kevin Engel
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Transferring graphitic thin films with a liquid gallium probe
- Patent number 10,857,774
- Issue date Dec 8, 2020
- VAON, LLC
- John Gilbert
- B32 - LAYERED PRODUCTS
Information Patent Grant
System and method for additively manufacturing an object
- Patent number 10,751,798
- Issue date Aug 25, 2020
- General Electric Company
- Jimmie Beacham
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method for transferring graphene
- Patent number 10,661,542
- Issue date May 26, 2020
- CHARMGRAPHENE CO., LTD.
- Yong Ki Kim
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing apparatus, liquid processing method, and stora...
- Patent number 10,643,835
- Issue date May 5, 2020
- Tokyo Electron Limited
- Akira Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
- Patent number 10,566,194
- Issue date Feb 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition with atomic layer etch reset
- Patent number 10,559,461
- Issue date Feb 11, 2020
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for selective chemical etching
- Patent number 10,533,134
- Issue date Jan 14, 2020
- The Boeing Company
- David S. Nansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method for manufacturing semiconductor device
- Patent number 10,508,343
- Issue date Dec 17, 2019
- Fujitsu Limited
- Shirou Ozaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for structuring the surface of a pressed sheet or an endless...
- Patent number 10,507,475
- Issue date Dec 17, 2019
- Hueck Engraving GmbH & Co. KG
- Jordi Reichert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polishing apparatus for a work with mechanical polishing function a...
- Patent number 10,471,565
- Issue date Nov 12, 2019
- Fujikoshi Machinery Corp.
- Kazutaka Shibuya
- B24 - GRINDING POLISHING
Information Patent Grant
Etching apparatus and method, and flexible film etched by the etchi...
- Patent number 10,290,517
- Issue date May 14, 2019
- HANWHA AEROSPACE CO., LTD.
- Jaeyun Jeong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Segmented focus ring assembly
- Patent number 10,276,354
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for etching a workpiece, an apparatus configured to etch a...
- Patent number 10,246,782
- Issue date Apr 2, 2019
- Infineon Technologies AG
- Karl Pilch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240410057
- Publication date Dec 12, 2024
- SEMES CO., LTD.
- Sung Min CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING DEVICE
- Publication number 20240309515
- Publication date Sep 19, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Keqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD
- Publication number 20240271286
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsun Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240253079
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE
- Publication number 20240124984
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Yusuke HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240084458
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Takashi NAKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMOTIVE PART IDENTIFICATION MARKING SYSTEM
- Publication number 20240050980
- Publication date Feb 15, 2024
- CatMarks Manufacturing, LLC
- Milton Rodriguez
- B60 - VEHICLES IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240035168
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Hironobu HYAKUTAKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230366100
- Publication date Nov 16, 2023
- SEMES CO., LTD.
- Min Jung KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMOTIVE PART IDENTIFICATION MARKING SYSTEM
- Publication number 20230278068
- Publication date Sep 7, 2023
- CatMarks Manufacturing, LLC
- Milton Rodriguez
- B60 - VEHICLES IN GENERAL
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20230203669
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Shin Hwa KANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CONTROL SYSTEM AND OPERATING METHOD THEREFOR
- Publication number 20230160071
- Publication date May 25, 2023
- POSCO
- Kyong-Su Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD
- Publication number 20230151494
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsun Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATEAD WET CLEAN FOR BEVEL TREATMENTS
- Publication number 20230021398
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Brian K. Kirkpatrick
- B08 - CLEANING
Information Patent Application
DISTRIBUTION BODY FOR A PROCESS FLUID FOR CHEMICAL AND/OR ELECTROLY...
- Publication number 20230026551
- Publication date Jan 26, 2023
- Semsysco GmbH
- Andreas GLEISSNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF SUPPORTING A GRAPHENE SHEET DISPOSED ON A FRAME SUPPORT
- Publication number 20230012465
- Publication date Jan 12, 2023
- The Regents of the University of California
- Bong-Gyoon Han
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220356584
- Publication date Nov 10, 2022
- TOKYO ELECTRON LIMITED
- Maju TOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR CLEANING OF SUBSTRATE SURFACES
- Publication number 20220356585
- Publication date Nov 10, 2022
- LAM RESEARCH CORPORATION
- David MUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220213596
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING DEVICE AND WORKING METHOD FOR FILM COOLING HOLES ON BLAD...
- Publication number 20220195608
- Publication date Jun 23, 2022
- Qingdao University of Technology
- Fengyun ZHANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220195609
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Takashi NAKAZAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS ETCHING SYSTEM
- Publication number 20220117092
- Publication date Apr 14, 2022
- Jainil SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WETTING PROCESSING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20210111045
- Publication date Apr 15, 2021
- PYXIS CF PTE. LTD.
- Amlan SEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFERRING GRAPHITIC THIN FILMS WITH A LIQUID GALLIUM PROBE
- Publication number 20210078316
- Publication date Mar 18, 2021
- VAON, LLC
- John Gilbert
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...
- Publication number 20210078036
- Publication date Mar 18, 2021
- SCREEN Holdings Co., Ltd.
- Yuji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF SUPPORTING A GRAPHENE SHEET DISPOSED ON A FRAME SUPPORT
- Publication number 20210047740
- Publication date Feb 18, 2021
- The Regents of the University of California
- Bong-Gyoon Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR TRANSFER OF TWO-DIMENSIONAL MATERIALS
- Publication number 20210047739
- Publication date Feb 18, 2021
- ETX CORPORATION
- Ethan R. Torrey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210005501
- Publication date Jan 7, 2021
- WONIK IPS CO., LTD.
- Dong Bum KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SURFACE MICRO-TEXTURING WITH A SUBTRACTIVE AGENT
- Publication number 20200255956
- Publication date Aug 13, 2020
- The Boeing Company
- Raj Desai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF SURFACE MICRO-TEXTURING WITH A SUBTRACTIVE AGENT
- Publication number 20200255955
- Publication date Aug 13, 2020
- The Boeing Company
- Raj Desai
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Chamber wall polymer protection system and method

Substrate processing apparatus, film formation unit, substrate proc...

Substrate processing method and substrate processing apparatus

Selective deposition of etch-stop layer for enhanced patterning

Automotive part identification marking system

Wetting processing apparatus and operation method thereof

Methods of supporting a graphene sheet disposed on a frame support

Plasma block with integrated cooling

Nanoparticle compositions

Method of surface micro-texturing with a subtractive agent

Method of surface micro-texturing with a subtractive agent

Systems and methods for copper etch rate monitoring and control

Selective deposition of etch-stop layer for enhanced patterning

Selective deposition with atomic layer etch reset

Method and apparatus for transfer of two-dimensional materials

Calibration system and calibrating method

Additive metal deposition process

Transferring graphitic thin films with a liquid gallium probe

System and method for additively manufacturing an object

Method for transferring graphene

Substrate processing apparatus, liquid processing method, and stora...

Selective deposition of etch-stop layer for enhanced patterning

Selective deposition with atomic layer etch reset

Methods and apparatuses for selective chemical etching

Etching method for manufacturing semiconductor device

Device for structuring the surface of a pressed sheet or an endless...

Polishing apparatus for a work with mechanical polishing function a...

Etching apparatus and method, and flexible film etched by the etchi...

Segmented focus ring assembly

Methods for etching a workpiece, an apparatus configured to etch a...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ETCHING DEVICE

CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE

SUBSTRATE PROCESSING METHOD

AUTOMOTIVE PART IDENTIFICATION MARKING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

AUTOMOTIVE PART IDENTIFICATION MARKING SYSTEM

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

PROCESS CONTROL SYSTEM AND OPERATING METHOD THEREFOR

CHAMBER WALL POLYMER PROTECTION SYSTEM AND METHOD

INTEGRATEAD WET CLEAN FOR BEVEL TREATMENTS

DISTRIBUTION BODY FOR A PROCESS FLUID FOR CHEMICAL AND/OR ELECTROLY...

METHODS OF SUPPORTING A GRAPHENE SHEET DISPOSED ON A FRAME SUPPORT

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

VAPOR CLEANING OF SUBSTRATE SURFACES

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

PROCESSING DEVICE AND WORKING METHOD FOR FILM COOLING HOLES ON BLAD...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

CONTINUOUS ETCHING SYSTEM

WETTING PROCESSING APPARATUS AND OPERATION METHOD THEREOF

TRANSFERRING GRAPHITIC THIN FILMS WITH A LIQUID GALLIUM PROBE

SUBSTRATE PROCESSING APPARATUS, FILM FORMATION UNIT, SUBSTRATE PROC...

METHODS OF SUPPORTING A GRAPHENE SHEET DISPOSED ON A FRAME SUPPORT

METHOD AND APPARATUS FOR TRANSFER OF TWO-DIMENSIONAL MATERIALS

SUBSTRATE PROCESSING APPARATUS

METHOD OF SURFACE MICRO-TEXTURING WITH A SUBTRACTIVE AGENT

METHOD OF SURFACE MICRO-TEXTURING WITH A SUBTRACTIVE AGENT