Arrangements for centering ray or beam

Industry

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H01J3/10

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps

Current Industry

H01J3/10Arrangements for centering ray or beam

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron gun, electron beam applicator, emission axis verification...
- Patent number 12,080,507
- Issue date Sep 3, 2024
- Photo electron Soul Inc.
- Hokuto Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun
- Patent number 10,950,407
- Issue date Mar 16, 2021
- New Japan Radio Co., Ltd.
- Toru Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and a device manufacturing method by using...
- Patent number 8,368,016
- Issue date Feb 5, 2013
- Ebara Corporation
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extractor for an microcolumn, an alignment method for an extractor...
- Patent number 7,750,295
- Issue date Jul 6, 2010
- Cebt Co., Ltd.
- Ho Soeb Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and a device manufacturing method by using...
- Patent number 7,361,895
- Issue date Apr 22, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and a device manufacturing method by using...
- Patent number 7,005,641
- Issue date Feb 28, 2006
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
3694687
- Patent number 3,694,687
- Issue date Sep 26, 1972
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3245794
- Patent number 3,245,794
- Issue date Apr 12, 1966
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON GUN
- Publication number 20200395185
- Publication date Dec 17, 2020
- NEW JAPAN RADIO CO., LTD.
- Toru KIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...
- Publication number 20130032716
- Publication date Feb 7, 2013
- EBARA CORPORATION
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam apparatus and a device manufacturing method by using...
- Publication number 20060097200
- Publication date May 11, 2006
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Extractor for an microcolumn, an alignment method for an extractor...
- Publication number 20060071175
- Publication date Apr 6, 2006
- CEBT Co., Ltd.
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus and a device manufacturing method by using...
- Publication number 20040119023
- Publication date Jun 24, 2004
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Arrangements for centering ray or beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron gun, electron beam applicator, emission axis verification...

Electron gun

Electron beam apparatus and a device manufacturing method by using...

Extractor for an microcolumn, an alignment method for an extractor...

Electron beam apparatus and a device manufacturing method by using...

Electron beam apparatus and a device manufacturing method by using...

3694687

3245794

Patents Applicationslast 30 patents

ELECTRON GUN

ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...

Electron beam apparatus and a device manufacturing method by using...

Extractor for an microcolumn, an alignment method for an extractor...

Electron beam apparatus and a device manufacturing method by using...