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Arrangements for deflecting ray or beam
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H01J3/26
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J3/00
Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
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H01J3/26
Arrangements for deflecting ray or beam
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam apparatus
Patent number
10,971,347
Issue date
Apr 6, 2021
HITACHI HIGH-TECH CORPORATION
Mitsuhiro Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray generation device having multiple metal target members
Patent number
10,115,557
Issue date
Oct 30, 2018
Hamamatsu Photonics K.K.
Atsushi Ishii
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Ion implantation with charge and direction control
Patent number
9,865,429
Issue date
Jan 9, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hong Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deceleration apparatus for ribbon and spot beams
Patent number
9,824,850
Issue date
Nov 21, 2017
Advanced Ion Beam Technology, Inc.
Nicholas White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for changing the direction of movement of a beam...
Patent number
9,779,905
Issue date
Oct 3, 2017
Muradin Abubekirovich Kumakhov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Positioning apparatus for an electron beam
Patent number
9,748,067
Issue date
Aug 29, 2017
Siemens Aktiengesellschaft
Jan Berk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron emission surface for X-ray generation
Patent number
9,443,691
Issue date
Sep 13, 2016
General Electric Company
Vance Scott Robinson
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Spherical aberration corrector, method of spherical aberration corr...
Patent number
9,256,068
Issue date
Feb 9, 2016
Jeol Ltd.
Hidetaka Sawada
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam scanning using deformed high gradient insulator
Patent number
9,153,404
Issue date
Oct 6, 2015
Lawrence Livermore National Security, LLC
Yu-Jiuan Chen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Method and apparatus for scanning a surface of an object using a pa...
Patent number
9,136,090
Issue date
Sep 15, 2015
Carl Zeiss Microscopy GmbH
Ralph Pulwey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cathode operating temperature adjusting method, and writing apparatus
Patent number
9,082,586
Issue date
Jul 14, 2015
NuFlare Technology, Inc.
Nobuo Miyamoto
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged-particle beam exposure apparatus and method of manufacturin...
Patent number
8,981,321
Issue date
Mar 17, 2015
Canon Kabushiki Kaisha
Hirohito Ito
B82 - NANO-TECHNOLOGY
Information
Patent Grant
High-frequency acceleration type ion acceleration and transportatio...
Patent number
8,952,340
Issue date
Feb 10, 2015
Sen Corporation
Mitsuaki Kabasawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deceleration apparatus for ribbon and spot beams
Patent number
8,941,077
Issue date
Jan 27, 2015
Advanced Ion Beam Technology, Inc.
Nicholas White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source, nanofabrication apparatus comprising such source, and a...
Patent number
8,927,942
Issue date
Jan 6, 2015
Centre National de la Recherche Scientifique-CNRS
Jacques Gierak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation with charge and direction control
Patent number
8,922,122
Issue date
Dec 30, 2014
Taiwan Semiconductor Manufaturing Company, Ltd.
Chih-Hong Hwang
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Ion beam system and method of operating an ion beam system
Patent number
8,921,805
Issue date
Dec 30, 2014
Carl Zeiss Microscopy GmbH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-miniaturized electron optical microcolumn
Patent number
8,835,848
Issue date
Sep 16, 2014
Industry-University Cooperation Foundation Sunmoon University
Tae Sik Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,785,878
Issue date
Jul 22, 2014
Canon Kabushiki Kaisha
Keiichi Arita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compact gantry for particle therapy
Patent number
8,766,218
Issue date
Jul 1, 2014
Ion Beam Applications, S.A.
Yves Jongen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Compac gantry for particle therapy
Patent number
8,748,852
Issue date
Jun 10, 2014
Ion Beam Applications, S.A.
Yves Jongen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,729,491
Issue date
May 20, 2014
Hitachi High-Technologies Corporation
Hideto Dohi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern modification schemes for improved FIB patterning
Patent number
8,624,206
Issue date
Jan 7, 2014
FEI Company
Tom Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged-particle beam exposure apparatus and method of manufacturin...
Patent number
8,618,516
Issue date
Dec 31, 2013
Canon Kabushiki Kaisha
Hirohito Ito
B82 - NANO-TECHNOLOGY
Information
Patent Grant
DA conversion device and electron beam exposure system using the same
Patent number
8,618,970
Issue date
Dec 31, 2013
Advantest Corp.
Takamasa Sato
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Particle beam irradiation apparatus and particle beam therapy system
Patent number
8,604,444
Issue date
Dec 10, 2013
Mitsubishi Electric Corporation
Tadashi Katayose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam therapy system and adjustment method for particle bea...
Patent number
8,586,941
Issue date
Nov 19, 2013
Mitsubishi Electric Corporation
Hisashi Harada
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Electron beam profile measurement system and method with optional F...
Patent number
8,530,851
Issue date
Sep 10, 2013
ATTI International Services Company, Inc.
Artush A. Abgaryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam therapy system and adjustment method for particle bea...
Patent number
8,389,949
Issue date
Mar 5, 2013
Mitsusbishi Electric Corporation
Hisashi Harada
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Enhanced integrity projection lens assembly
Patent number
8,362,441
Issue date
Jan 29, 2013
Mapper Lithography IP B.V.
Johan Joost Koning
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20210020422
Publication date
Jan 21, 2021
Hitachi High-Technologies Corporation
Mitsuhiro NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRINTED CIRCUIT BOARD MULTIPOLE UNITS USED FOR ION TRANSPORTATION
Publication number
20140326874
Publication date
Nov 6, 2014
CARL ZEISS MICROSCOPY GMBH
Albrecht Glasmachers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CATHODE OPERATING TEMPERATURE ADJUSTING METHOD, AND WRITING APPARATUS
Publication number
20140239200
Publication date
Aug 28, 2014
NuFlare Technology, Inc.
Nobuo MIYAMOTO
B82 - NANO-TECHNOLOGY
Information
Patent Application
ULTRA-MINIATURIZED ELECTRON OPTICAL MICROCOLUMN
Publication number
20140224997
Publication date
Aug 14, 2014
Industry-University Cooperation Foundation Sunmoon University
Tae Sik OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Beam System and Method of Operating an Ion Beam System
Publication number
20140197328
Publication date
Jul 17, 2014
CARL ZEISS MICROSCOPY GMBH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Source, Nanofabrication Apparatus Comprising Such Source, and a...
Publication number
20140175301
Publication date
Jun 26, 2014
UNIVERSITE LYON 1 CLAUDE BERNARD
Jacques Gierak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compact gantry for particle therapy
Publication number
20140145090
Publication date
May 29, 2014
ION BEAM APPLICATIONS
Yves Jongen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
METHOD OF CHANGING THE DIRECTION OF MOVEMENT OF THE BEAM OF ACCELER...
Publication number
20140098919
Publication date
Apr 10, 2014
Muradin Abubekirovich Kumakhov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURIN...
Publication number
20140070112
Publication date
Mar 13, 2014
Canon Kabushiki Kaisha
Hirohito Ito
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20140021366
Publication date
Jan 23, 2014
Hitachi High-Technologies Corporation
Hideto Dohi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Permanent Magnet Beam Transport System for Proton Radiation Therapy
Publication number
20140014849
Publication date
Jan 16, 2014
ProCure Treatment Centers, Inc.
Vladimir A. Anferov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Scanning a Surface of an Object Using a Pa...
Publication number
20130320226
Publication date
Dec 5, 2013
CARL ZEISS MICROSCOPY GMBH
Ralph Pulwey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DA CONVERSION DEVICE AND ELECTRON BEAM EXPOSURE SYSTEM USING THE SAME
Publication number
20130270449
Publication date
Oct 17, 2013
Hitachi Information & Communication Engineering, Ltd.
Takamasa Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED INTEGRITY PROJECTION LENS ASSEMBLY
Publication number
20130256554
Publication date
Oct 3, 2013
Johan Joost Koning
B82 - NANO-TECHNOLOGY
Information
Patent Application
Compact gantry for particle therapy
Publication number
20130187060
Publication date
Jul 25, 2013
ION BEAM APPLICATIONS
Yves Jongen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
ION IMPLANTATION WITH CHARGE AND DIRECTION CONTROL
Publication number
20130140987
Publication date
Jun 6, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hong Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM SCANNING USING DEFORMED HIGH GRADIENT INSULATOR
Publication number
20130140468
Publication date
Jun 6, 2013
LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
Yu-Jiuan Chen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20130143161
Publication date
Jun 6, 2013
Canon Kabushiki Kaisha
Keiichi ARITA
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron Beam Profile Measurement System and Method with Optional F...
Publication number
20130134323
Publication date
May 30, 2013
ATTI INTERNATIONAL SERVICES COMPANY, INC
Artush A. Abgaryan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEQUENTIAL RADIAL MIRROR ANALYSER
Publication number
20130126730
Publication date
May 23, 2013
National University of Singapore
Anjam KHURSHEED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM THERAPY SYSTEM AND ADJUSTMENT METHOD FOR PARTICLE BEA...
Publication number
20130105703
Publication date
May 2, 2013
Mitsubishi Electric Corporation
Hisashi HARADA
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Pattern Modification Schemes for Improved FIB Patterning
Publication number
20130092826
Publication date
Apr 18, 2013
FEI Company
Tom Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM IRRADIATION APPARATUS AND PARTICLE BEAM THERAPY SYSTEM
Publication number
20130075622
Publication date
Mar 28, 2013
Mitsubishi Electric Corporation
Tadashi Katayose
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Compact gantry for particle therapy
Publication number
20130001432
Publication date
Jan 3, 2013
ION BEAM APPLICATIONS
Yves Jongen
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
Ion Beam System and Method of Operating Ion Beam System
Publication number
20120256098
Publication date
Oct 11, 2012
CARL ZEISS NTS GMBH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE BEAM EXPOSURE APPARATUS AND METHOD OF MANUFACTURIN...
Publication number
20120126136
Publication date
May 24, 2012
Canon Kabushiki Kaisha
Hirohito Ito
B82 - NANO-TECHNOLOGY
Information
Patent Application
DECELERATION APPARATUS FOR RIBBON AND SPOT BEAMS
Publication number
20120097861
Publication date
Apr 26, 2012
ADVANCED ION BEAM TECHNOLOGY, INC.
Nicholas White
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused ion beam apparatus
Publication number
20110215256
Publication date
Sep 8, 2011
Takashi Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for transmission of energy and/or for transportation of a...
Publication number
20110192973
Publication date
Aug 11, 2011
Albrecht Glasmachers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM THERAPY SYSTEM AND ADJUSTMENT METHOD FOR PARTICLE BEA...
Publication number
20110121195
Publication date
May 26, 2011
Hisashi Harada
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE