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Atomic force probe
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CPC
G05B2219/37119
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G
PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/37119
Atomic force probe
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for forming nanometric features on surfaces
Patent number
5,512,808
Issue date
Apr 30, 1996
Massachusetts Institute of Technology
Harry R. Clark
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus for forming nanometric features on surfaces
Patent number
5,327,625
Issue date
Jul 12, 1994
Massachusetts Institute of Technology
Harry R. Clark
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents