Auger electrons

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CPC
G01N2223/086

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N2223/00Investigating materials by wave or particle radiation

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G01N2223/086Auger electrons

Industries

Patents Grantslast 30 patents

Information Patent Grant
In-situ differential spectroscopy
- Patent number 8,283,631
- Issue date Oct 9, 2012
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Electron spectroscopy analyzer and a method of correcting a shift o...
- Patent number 5,352,894
- Issue date Oct 4, 1994
- Sharp Kabushiki Kaisha
- Fumitoshi Yasuo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
In-Situ Differential Spectroscopy
- Publication number 20090278044
- Publication date Nov 12, 2009
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING