Avoiding or diminishing effects of eddy currents

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H01J2237/0209

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

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H01J2237/0209Avoiding or diminishing effects of eddy currents

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Patents Grantslast 30 patents

Information Patent Grant
Electron microscope and method of adjusting the same
- Patent number 8,859,964
- Issue date Oct 14, 2014
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled plasma sputter chamber with conductive material...
- Patent number 5,569,363
- Issue date Oct 29, 1996
- Sony Corporation
- Robert Bayer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic deflection system for a high-power electron beam
- Patent number 5,532,446
- Issue date Jul 2, 1996
- Leybold Durferrit
- Matthias Blum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic object lens for an electron beam exposure apparatus which...
- Patent number 4,929,838
- Issue date May 29, 1990
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam exposure system and method of compensating fo...
- Patent number 4,891,524
- Issue date Jan 2, 1990
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam exposure apparatus
- Patent number 4,585,943
- Issue date Apr 29, 1986
- Fujitsu Limited
- Hiroshi Yasuda
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Electron Microscope and Method of Adjusting the Same
- Publication number 20130327938
- Publication date Dec 12, 2013
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON ASSEMBLY
- Publication number 20110005926
- Publication date Jan 13, 2011
- APPLIED MATERIALS, INC.
- Neal W. Matuska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOUNTING STAGE AND PLASMA PROCESSING APPARATUS
- Publication number 20090199967
- Publication date Aug 13, 2009
- TOKYO ELECTRON LIMITED
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD
- Publication number 20080265174
- Publication date Oct 30, 2008
- NuFlare Technology, Inc.
- Makoto HIRAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
Magnetron assembly
- Publication number 20060049043
- Publication date Mar 9, 2006
- Neal W. Matuska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-particle-beam optical systems including beam tube exhibitin...
- Publication number 20010051317
- Publication date Dec 13, 2001
- NIKON CORPORATION
- Katsushi Nakano
- H01 - BASIC ELECTRIC ELEMENTS