Baseboards, masking frames, or other holders for the sensitive material

Industry

CPC
G03B27/58

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Parent Industries

GPHYSICS G03Photography G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES ACCESSORIES THEREFOR G03B27/00Photographic printing apparatus

Current Industry

G03B27/58Baseboards, masking frames, or other holders for the sensitive material

Industries

Patents Grantslast 30 patents

Information Patent Grant
Encoder device, method for measuring moving amount, optical apparat...
- Patent number 10,697,805
- Issue date Jun 30, 2020
- Nikon Corporation
- Zhigiang Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual stage lithographic apparatus and device manufacturing method
- Patent number RE47943
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Marinus Aart Van Den Brink
Information Patent Grant
Movable support and lithographic apparatus
- Patent number 10,228,626
- Issue date Mar 12, 2019
- ASML Netherlands B.V.
- Antonius Franciscus Johannes De Groot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Encoder device, method for measuring moving amount, optical apparat...
- Patent number 9,939,293
- Issue date Apr 10, 2018
- Nikon Corporation
- Zhigiang Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Movable pressing and light-shielding mechanism for digital stereo i...
- Patent number 9,864,281
- Issue date Jan 9, 2018
- Shanghai Yiying Digital Technology Co., Ltd.
- Jinchang Gu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,846,371
- Issue date Dec 19, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method for measuring a position
- Patent number 9,746,312
- Issue date Aug 29, 2017
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system, a lithographic apparatus and a method for posit...
- Patent number 9,671,702
- Issue date Jun 6, 2017
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support, lithographic apparatus and device manufacturing method
- Patent number 9,470,969
- Issue date Oct 18, 2016
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and a lithographic apparatus
- Patent number 9,389,518
- Issue date Jul 12, 2016
- ASML Netherlands B.V.
- Antonius Franciscus Johannes De Groot
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming patterned layer, method of forming patterned phot...
- Patent number 9,341,950
- Issue date May 17, 2016
- Au Optronics Corporation
- Hsiang-Chih Hsiao
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus with an object support having actuating stru...
- Patent number 9,335,621
- Issue date May 10, 2016
- ASML Holding N.V.
- Enrico Zordan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reaction assembly for a stage assembly
- Patent number 9,298,077
- Issue date Mar 29, 2016
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,268,237
- Issue date Feb 23, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,235,139
- Issue date Jan 12, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system, a lithographic apparatus and a method for posit...
- Patent number 9,229,339
- Issue date Jan 5, 2016
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device, lithography apparatus using same, and dev...
- Patent number 9,195,129
- Issue date Nov 24, 2015
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-harmonic cyclic error compensation in interferometric encoder s...
- Patent number 9,146,093
- Issue date Sep 29, 2015
- Zygo Corporation
- Frank C. Demarest
- G01 - MEASURING TESTING
Information Patent Grant
Processing apparatus and device manufacturing method
- Patent number 9,123,760
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, method of forming patterned layer, method of fo...
- Patent number 9,122,162
- Issue date Sep 1, 2015
- Au Optronics Corporation
- Hsiang-Chih Hsiao
- G02 - OPTICS
Information Patent Grant
Driving apparatus, exposure apparatus, and method of manufacturing...
- Patent number 9,124,151
- Issue date Sep 1, 2015
- Canon Kabushiki Kaisha
- Akira Morohashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus and device manufacturing method with bearing...
- Patent number 9,041,913
- Issue date May 26, 2015
- ASML Netherlands B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic fabrication of general periodic structures by exposing...
- Patent number 9,036,133
- Issue date May 19, 2015
- Eulitha AG
- Harun H. Solak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target positioning device, method for driving a target positioning...
- Patent number 9,030,649
- Issue date May 12, 2015
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,019,467
- Issue date Apr 28, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning a wafer stage and apparatus for performing the same
- Patent number 9,007,567
- Issue date Apr 14, 2015
- Samsung Electronics Co., Ltd.
- Tae-Jin Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 9,001,306
- Issue date Apr 7, 2015
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support structure, clamp preparation unit, and lithograph...
- Patent number 8,991,330
- Issue date Mar 31, 2015
- Mapper Lithography IP B.V.
- Hendrik Jan De Jong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Immersion lithographic apparatus and a device manufacturing method
- Patent number 8,993,220
- Issue date Mar 31, 2015
- ASML Netherlands B.V.
- Nina Vladimirovna Dziomkina
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
8945819
- Patent number 8,945,819
- Issue date Feb 3, 2015
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MOVABLE SUPPORT AND LITHOGRAPHIC APPARATUS
- Publication number 20180356738
- Publication date Dec 13, 2018
- ASML NETHERLANDS B.V.
- Antonius Franciscus Johannes DE GROOT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARAT...
- Publication number 20180202842
- Publication date Jul 19, 2018
- Nikon Corporation
- Zhigiang Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20170329234
- Publication date Nov 16, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THREE AXIS LINEAR ACTUATOR
- Publication number 20140132087
- Publication date May 15, 2014
- Nikon Corporation
- Scott Coakley
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20140104586
- Publication date Apr 17, 2014
- Koji KANEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20140092374
- Publication date Apr 3, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NON-HARMONIC CYCLIC ERROR COMPENSATION IN INTERFEROMETRIC ENCODER S...
- Publication number 20130278914
- Publication date Oct 24, 2013
- Zygo Corporation
- Frank C. Demarest
- G01 - MEASURING TESTING
Information Patent Application
DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20130271743
- Publication date Oct 17, 2013
- Canon Kabushiki Kaisha
- Akira MOROHASHI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS USING SAME, AND DEV...
- Publication number 20130258309
- Publication date Oct 3, 2013
- Canon Kabushiki Kaisha
- Masatoshi Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, METHOD OF FORMING PATTERNED LAYER, METHOD OF FO...
- Publication number 20130235316
- Publication date Sep 12, 2013
- AU OPTRONICS CORPORATION
- Hsiang-Chih Hsiao
- G02 - OPTICS
Information Patent Application
PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130230371
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Shinichi Hirano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support, Lithographic Apparatus and Device Manufacturing Method
- Publication number 20130164688
- Publication date Jun 27, 2013
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage System and a Lithographic Apparatus
- Publication number 20130162968
- Publication date Jun 27, 2013
- ASML NETHERLANDS B.V.
- Antonius Franciscus Johannes DE GROOT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141703
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141701
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
C-CORE ACTUATOR FOR MOVING A STAGE
- Publication number 20130135603
- Publication date May 30, 2013
- Nikon Corporation
- Michael Binnard
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARAT...
- Publication number 20130128255
- Publication date May 23, 2013
- Nikon Corporation
- Zhigiang LIU
- G01 - MEASURING TESTING
Information Patent Application
TARGET POSITIONING DEVICE, METHOD FOR DRIVING A TARGET POSITIONING...
- Publication number 20130094008
- Publication date Apr 18, 2013
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Application
REACTION ASSEMBLY FOR A STAGE ASSEMBLY
- Publication number 20130088703
- Publication date Apr 11, 2013
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Method
- Publication number 20120147346
- Publication date Jun 14, 2012
- ASML NETHERLANDS B.V.
- Jan Bernard Plechelmus VAN SCHOOT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR POSIT...
- Publication number 20120127451
- Publication date May 24, 2012
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method Of Aligning A Wafer Stage And Apparatus For Performing The Same
- Publication number 20120092638
- Publication date Apr 19, 2012
- Samsung Electronics Co., Ltd.
- Tae-Jin Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY SYSTEM ARRANGED ON A FOUNDATION, AND METHOD FOR ARRANGI...
- Publication number 20120069317
- Publication date Mar 22, 2012
- Jerry Peijster
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Reducing Noise in an Original Signal, and Signal Processi...
- Publication number 20120013883
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marc Wilhelmus Maria VAN DER WIJST
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic fabrication of general periodic structures
- Publication number 20110310374
- Publication date Dec 22, 2011
- Harun H. Solak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PRODUCTION OF AN ALIGNMENT MARK
- Publication number 20110273685
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Chung-Hsun LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20110273686
- Publication date Nov 10, 2011
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110236011
- Publication date Sep 29, 2011
- Koji KANEYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, METHOD OF FORMING PATTERNED LAYER, METHOD OF FO...
- Publication number 20110223393
- Publication date Sep 15, 2011
- AU OPTRONICS CORPORATION
- Hsiang-Chih Hsiao
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD FOR MEASURING A POSITION
- Publication number 20110216300
- Publication date Sep 8, 2011
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G01 - MEASURING TESTING

Baseboards, masking frames, or other holders for the sensitive material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Encoder device, method for measuring moving amount, optical apparat...

Dual stage lithographic apparatus and device manufacturing method

Movable support and lithographic apparatus

Encoder device, method for measuring moving amount, optical apparat...

Movable pressing and light-shielding mechanism for digital stereo i...

Exposure method, substrate stage, exposure apparatus, and device ma...

Lithographic apparatus and method for measuring a position

Positioning system, a lithographic apparatus and a method for posit...

Support, lithographic apparatus and device manufacturing method

Stage system and a lithographic apparatus

Method of forming patterned layer, method of forming patterned phot...

Lithographic apparatus with an object support having actuating stru...

Reaction assembly for a stage assembly

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Positioning system, a lithographic apparatus and a method for posit...

Substrate holding device, lithography apparatus using same, and dev...

Non-harmonic cyclic error compensation in interferometric encoder s...

Processing apparatus and device manufacturing method

Exposure apparatus, method of forming patterned layer, method of fo...

Driving apparatus, exposure apparatus, and method of manufacturing...

Lithographic apparatus and device manufacturing method with bearing...

Lithographic fabrication of general periodic structures by exposing...

Target positioning device, method for driving a target positioning...

Exposure method, substrate stage, exposure apparatus, and device ma...

Method of aligning a wafer stage and apparatus for performing the same

Exposure apparatus, exposure method, and method of manufacturing de...

Substrate support structure, clamp preparation unit, and lithograph...

Immersion lithographic apparatus and a device manufacturing method

8945819

Patents Applicationslast 30 patents

MOVABLE SUPPORT AND LITHOGRAPHIC APPARATUS

ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARAT...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

THREE AXIS LINEAR ACTUATOR

SUBSTRATE PROCESSING METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

NON-HARMONIC CYCLIC ERROR COMPENSATION IN INTERFEROMETRIC ENCODER S...

DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING...

SUBSTRATE HOLDING DEVICE, LITHOGRAPHY APPARATUS USING SAME, AND DEV...

EXPOSURE APPARATUS, METHOD OF FORMING PATTERNED LAYER, METHOD OF FO...

PROCESSING APPARATUS AND DEVICE MANUFACTURING METHOD

Support, Lithographic Apparatus and Device Manufacturing Method

Stage System and a Lithographic Apparatus

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

C-CORE ACTUATOR FOR MOVING A STAGE

ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARAT...

TARGET POSITIONING DEVICE, METHOD FOR DRIVING A TARGET POSITIONING...

REACTION ASSEMBLY FOR A STAGE ASSEMBLY

Lithographic Apparatus and Method

POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD FOR POSIT...

Method Of Aligning A Wafer Stage And Apparatus For Performing The Same

LITHOGRAPHY SYSTEM ARRANGED ON A FOUNDATION, AND METHOD FOR ARRANGI...

Method of Reducing Noise in an Original Signal, and Signal Processi...

Lithographic fabrication of general periodic structures

PRODUCTION OF AN ALIGNMENT MARK

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

EXPOSURE APPARATUS, METHOD OF FORMING PATTERNED LAYER, METHOD OF FO...

LITHOGRAPHIC APPARATUS AND METHOD FOR MEASURING A POSITION