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8945819
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Patent Grant
8945819
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Source
Patent Number
8,945,819
Date Filed
Not available
Date Issued
Tuesday, February 3, 2015
10 years ago
CPC
G03B27/58 - Baseboards, masking frames, or other holders for the sensitive material
G03F7/70341 - Immersion
G03F7/70716 - Stages
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