8945819

Information

• Patent Grant
• 8945819

• References
• Source

• Patent Number

  8,945,819

• Date Filed

  Not available

• Date Issued

  Tuesday, February 3, 2015
  9 years ago

• CPC

  • G03B27/58 - Baseboards, masking frames, or other holders for the sensitive material
  • G03F7/70341 - Immersion
  • G03F7/70716 - Stages