Beam alignment means or procedures

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H01J2237/1501

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1501Beam alignment means or procedures

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stationary intraoral tomosynthesis imaging systems, methods, and co...
- Patent number 12,016,716
- Issue date Jun 25, 2024
- Surround Medical Systems, Inc.
- Jianping Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,705,304
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-charged particle-beam irradiation apparatus and multiple-c...
- Patent number 11,574,797
- Issue date Feb 7, 2023
- NuFlare Technology, Inc.
- Mitsuhiro Okazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 11,515,121
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation apparatus and electron beam alignment method
- Patent number 11,515,118
- Issue date Nov 29, 2022
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration sample, electron beam adjustment method and electron be...
- Patent number 11,435,178
- Issue date Sep 6, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Incident axis alignment method for electron gun equipped with photo...
- Patent number 11,417,494
- Issue date Aug 16, 2022
- Photo electron Soul Inc.
- Reiki Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 11,302,514
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,282,675
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,217,423
- Issue date Jan 4, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustment method and electron beam device
- Patent number 11,217,421
- Issue date Jan 4, 2022
- Ebara Corporation
- Takehide Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for automatic zone axis alignment
- Patent number 11,211,222
- Issue date Dec 28, 2021
- FEI Company
- John J. Flanagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Set of aperture substrates for multiple beams and multi charged par...
- Patent number 11,139,146
- Issue date Oct 5, 2021
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,062,877
- Issue date Jul 13, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stationary intraoral tomosynthesis imaging systems, methods, and co...
- Patent number 11,051,771
- Issue date Jul 6, 2021
- Jianping Lu
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method and system for zone axis alignment
- Patent number 11,024,480
- Issue date Jun 1, 2021
- FEI Company
- Zhenxin Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,910,194
- Issue date Feb 2, 2021
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam axial alignment device, charged particle beam...
- Patent number 10,903,038
- Issue date Jan 26, 2021
- Shimadzu Corporation
- Takehiro Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 10,892,138
- Issue date Jan 12, 2021
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam position monitors for medical radiation machines
- Patent number 10,879,028
- Issue date Dec 29, 2020
- Varian Medical Systems, Inc.
- Mark E. Trail
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electron beam image acquisition apparatus, and electron beam image...
- Patent number 10,665,422
- Issue date May 26, 2020
- NUFLARE TECHNOLOGY, INC.
- Hidekazu Takekoshi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for adjusting a particle beam microscope
- Patent number 10,629,404
- Issue date Apr 21, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system adjustment method of image acquisition apparatus
- Patent number 10,629,406
- Issue date Apr 21, 2020
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of controlling same
- Patent number 10,607,803
- Issue date Mar 31, 2020
- Jeol Ltd.
- Masaki Mukai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned atomic layer etching and deposition using miniature-colum...
- Patent number 10,607,845
- Issue date Mar 31, 2020
- Kevin M. Monahan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of adjusting the primary side of an X-ray diffractometer
- Patent number 10,598,615
- Issue date Mar 24, 2020
- Andreas Kleine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam device and optical-axis adjusting method thereof
- Patent number 10,573,489
- Issue date Feb 25, 2020
- Hitachi High-Technologies Corporation
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ACTIVE GAS GENERATION APPARATUS
- Publication number 20240429028
- Publication date Dec 26, 2024
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Kensuke WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...
- Publication number 20240290571
- Publication date Aug 29, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
- Publication number 20240282547
- Publication date Aug 22, 2024
- NuFlare Technology, Inc.
- Koichi ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
- Publication number 20240234083
- Publication date Jul 11, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...
- Publication number 20240136148
- Publication date Apr 25, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE...
- Publication number 20240128045
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Erwin SLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ION-BEAM ALIGNMENT FOR DUAL-BEAM INSTRUMENT
- Publication number 20230377830
- Publication date Nov 23, 2023
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Beam Pattern Definition Device
- Publication number 20230360880
- Publication date Nov 9, 2023
- IMS Nanofabrication GmbH
- Stefan Eder-Kapl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT DETERMINATION METHOD AND COMPUTER PROGRAM
- Publication number 20230207259
- Publication date Jun 29, 2023
- ASML NETHERLANDS B.V.
- Erwin SLOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20220319808
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
- Publication number 20220246395
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE-CHARGED PARTICLE-BEAM IRRADIATION APPARATUS AND MULTIPLE-C...
- Publication number 20220102113
- Publication date Mar 31, 2022
- NuFlare Technology, Inc.
- Mitsuhiro OKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT
- Publication number 20220076917
- Publication date Mar 10, 2022
- FEI Company
- John J. FLANAGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INCIDENT AXIS ALIGNMENT METHOD FOR ELECTRON GUN EQUIPPED WITH PHOTO...
- Publication number 20210375578
- Publication date Dec 2, 2021
- PHOTO ELECTRON SOUL INC.
- Reiki Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AXIAL ALIGNMENT ASSEMBLY, AND CHARGED PARTICLE MICROSCOPE COMPRISIN...
- Publication number 20210366684
- Publication date Nov 25, 2021
- FEI Company
- Pleun Dona
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT
- Publication number 20210202205
- Publication date Jul 1, 2021
- FEI Company
- John J. FLANAGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20210151291
- Publication date May 20, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
CALIBRATION SAMPLE, ELECTRON BEAM ADJUSTMENT METHOD AND ELECTRON BE...
- Publication number 20210131801
- Publication date May 6, 2021
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR ZONE AXIS ALIGNMENT
- Publication number 20200294759
- Publication date Sep 17, 2020
- FEI Company
- Zhenxin Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM ALIGNMENT METHOD
- Publication number 20200273658
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Kenji WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SET OF APERTURE SUBSTRATES FOR MULTIPLE BEAMS AND MULTI CHARGED PAR...
- Publication number 20200273668
- Publication date Aug 27, 2020
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS
- Publication number 20200203121
- Publication date Jun 25, 2020
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF
- Publication number 20200152419
- Publication date May 14, 2020
- Hitachi High-Technologies Corporation
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
- Publication number 20200051779
- Publication date Feb 13, 2020
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20190279844
- Publication date Sep 12, 2019
- ASML Netherlands B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20190279842
- Publication date Sep 12, 2019
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ADJUSTING A PARTICLE BEAM MICROSCOPE
- Publication number 20190148104
- Publication date May 16, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF
- Publication number 20180374673
- Publication date Dec 27, 2018
- Shuhei YABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180358203
- Publication date Dec 13, 2018
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20180350555
- Publication date Dec 6, 2018
- HERMES MICROVISION, INC.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Beam alignment means or procedures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automated ion-beam alignment for dual-beam instrument

Apparatus for multiple charged-particle beams

Stationary intraoral tomosynthesis imaging systems, methods, and co...

Multi-beam inspection apparatus with improved detection performance...

Apparatus of plural charged-particle beams

Multiple-charged particle-beam irradiation apparatus and multiple-c...

Electron beam device

Electron beam irradiation apparatus and electron beam alignment method

Calibration sample, electron beam adjustment method and electron be...

Incident axis alignment method for electron gun equipped with photo...

Apparatus for multiple charged-particle beams

Multi-beam inspection apparatus with improved detection performance...

Apparatus of plural charged-particle beams

Adjustment method and electron beam device

Method and system for automatic zone axis alignment

Set of aperture substrates for multiple beams and multi charged par...

Apparatus of plural charged-particle beams

Stationary intraoral tomosynthesis imaging systems, methods, and co...

Method and system for zone axis alignment

Charged particle beam device and optical-axis adjusting method thereof

Charged particle beam axial alignment device, charged particle beam...

Multi-beam inspection apparatus with improved detection performance...

Beam position monitors for medical radiation machines

Electron beam image acquisition apparatus, and electron beam image...

Method for adjusting a particle beam microscope

Optical system adjustment method of image acquisition apparatus

Electron microscope and method of controlling same

Patterned atomic layer etching and deposition using miniature-colum...

Method of adjusting the primary side of an X-ray diffractometer

Charged particle beam device and optical-axis adjusting method thereof

Patents Applicationslast 30 patents

ACTIVE GAS GENERATION APPARATUS

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...

BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...

BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, A...

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD OF ALIGNING A SAMPLE...

AUTOMATED ION-BEAM ALIGNMENT FOR DUAL-BEAM INSTRUMENT

Multi-Beam Pattern Definition Device

ALIGNMENT DETERMINATION METHOD AND COMPUTER PROGRAM

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS

MULTIPLE-CHARGED PARTICLE-BEAM IRRADIATION APPARATUS AND MULTIPLE-C...

METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT

INCIDENT AXIS ALIGNMENT METHOD FOR ELECTRON GUN EQUIPPED WITH PHOTO...

AXIAL ALIGNMENT ASSEMBLY, AND CHARGED PARTICLE MICROSCOPE COMPRISIN...

METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

CALIBRATION SAMPLE, ELECTRON BEAM ADJUSTMENT METHOD AND ELECTRON BE...

METHOD AND SYSTEM FOR ZONE AXIS ALIGNMENT

ELECTRON BEAM IRRADIATION APPARATUS AND ELECTRON BEAM ALIGNMENT METHOD

SET OF APERTURE SUBSTRATES FOR MULTIPLE BEAMS AND MULTI CHARGED PAR...

OPTICAL SYSTEM ADJUSTMENT METHOD OF IMAGE ACQUISITION APPARATUS

CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF

APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

METHOD FOR ADJUSTING A PARTICLE BEAM MICROSCOPE

CHARGED PARTICLE BEAM DEVICE AND OPTICAL-AXIS ADJUSTING METHOD THEREOF

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS