Beam diagnostics including control of the parameter or property diagnosed

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H01J2237/24514

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/24514Beam diagnostics including control of the parameter or property diagnosed

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 12,165,937
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mass airflow sensor and hydrocarbon trap combination
- Patent number 12,140,111
- Issue date Nov 12, 2024
- K & N Engineering, Inc.
- Kevin McClelland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,125,667
- Issue date Oct 22, 2024
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for deposition of metal nitrides
- Patent number 11,739,418
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 11,538,723
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical diagnostics of semiconductor process using hyperspectral im...
- Patent number 11,538,722
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Yan Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for neutral beam processing based on gas clust...
- Patent number 11,199,769
- Issue date Dec 14, 2021
- Sean R. Kirkpatrick
- B24 - GRINDING POLISHING
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,094,512
- Issue date Aug 17, 2021
- HITACHI HIGH-TECH CORPORATION
- Kazuya Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary module for an accelerator system
- Patent number 11,057,982
- Issue date Jul 6, 2021
- GSI Helmholtzzentrum Fuer Schwerionenforschung GmbH
- Chen Xiao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 11,037,759
- Issue date Jun 15, 2021
- NuFlare Technology, Inc.
- Ryoichi Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for determining, using, and indicating ion be...
- Patent number 11,004,656
- Issue date May 11, 2021
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Separate plasma source coil and method of controlling the same
- Patent number 10,825,655
- Issue date Nov 3, 2020
- Adaptive Plasma Technology Corp.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for stability monitoring and improvements to plasma sources...
- Patent number 10,818,482
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,699,884
- Issue date Jun 30, 2020
- HITACHI HIGH-TECH CORPORATION
- Kazuya Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for characterizing an electron beam
- Patent number 10,586,683
- Issue date Mar 10, 2020
- Arcam AB
- Tomas Lock
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,497,539
- Issue date Dec 3, 2019
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam profiling speed enhancement for scanned beam implanters
- Patent number 10,483,086
- Issue date Nov 19, 2019
- Axcelis Technologies, Inc.
- Andy M. Ray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,453,652
- Issue date Oct 22, 2019
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method using charged particle beam
- Patent number 10,309,913
- Issue date Jun 4, 2019
- TOSHIBA MEMORY CORPORATION
- Osamu Nagano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 10,217,607
- Issue date Feb 26, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,134,558
- Issue date Nov 20, 2018
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method, and multi charged parti...
- Patent number 10,020,165
- Issue date Jul 10, 2018
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method for blanking device for blanking multi charged pa...
- Patent number 9,880,215
- Issue date Jan 30, 2018
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for characterizing an electron beam
- Patent number 9,721,755
- Issue date Aug 1, 2017
- Arcam AB
- Tomas Lock
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method to improve productivity of hybrid scan ion beam i...
- Patent number 9,711,329
- Issue date Jul 18, 2017
- Axelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern dimension measurement method using electron microscope, pat...
- Patent number 9,671,223
- Issue date Jun 6, 2017
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining a beamlet position and method for determinin...
- Patent number 9,653,259
- Issue date May 16, 2017
- Mapper Lithography IP B.V.
- Paul IJmert Scheffers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for determining a beamlet position and method for determinin...
- Patent number 9,613,782
- Issue date Apr 4, 2017
- Mapper Lithography IP B.V.
- Paul IJmert Scheffers
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,412,561
- Issue date Aug 9, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takeshi Kurose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and method of ion beam tuning
- Patent number 9,390,889
- Issue date Jul 12, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...
- Publication number 20240429022
- Publication date Dec 26, 2024
- NuFlare Technology, Inc.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELEC...
- Publication number 20240274396
- Publication date Aug 15, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION
- Publication number 20230110960
- Publication date Apr 13, 2023
- K&N Engineering, Inc.
- Kevin McClelland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Charged Particle Beam Device and Aberration Correction Method
- Publication number 20220415605
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Shingo HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL FOR TESTING AN ELECTRON-OPTICAL ASSEMBLY
- Publication number 20220392729
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Arjen Benjamin STORM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220328281
- Publication date Oct 13, 2022
- Hitachi High-Tech Corporation
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS
- Publication number 20220319805
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES
- Publication number 20200299830
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200279719
- Publication date Sep 3, 2020
- HITACHI HIGH-TECH CORPORATION
- Kazuya YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR STABILITY MONITORING AND IMPROVEMENTS TO PLASMA SOURCES...
- Publication number 20200105510
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20190088452
- Publication date Mar 21, 2019
- Hitachi High-Technologies Corporation
- Kazuya YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20190043693
- Publication date Feb 7, 2019
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION METHOD USING CHARGED PARTICLE BEAM
- Publication number 20180335396
- Publication date Nov 22, 2018
- Toshiba Memory Corporation
- Osamu NAGANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20180068829
- Publication date Mar 8, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM
- Publication number 20170294288
- Publication date Oct 12, 2017
- ARCAM AB
- Tomas Lock
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTI...
- Publication number 20170103869
- Publication date Apr 13, 2017
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope
- Publication number 20170018394
- Publication date Jan 19, 2017
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM
- Publication number 20160211116
- Publication date Jul 21, 2016
- ARCAM AB
- Tomas Lock
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
Methods and Apparatus for Determining, Using, and Indicating Ion Be...
- Publication number 20160111249
- Publication date Apr 21, 2016
- GATAN, INC.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Application
ION IMPLANTER AND METHOD OF ION BEAM TUNING
- Publication number 20160079032
- Publication date Mar 17, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20150311077
- Publication date Oct 29, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takeshi Kurose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING BEAM PARAMETERS OF A CHARGE CARRIER BEAM, ME...
- Publication number 20150083928
- Publication date Mar 26, 2015
- RWTH Aachen Koerperschaft des oeffentlichen Rechts
- Uwe Reisgen
- G01 - MEASURING TESTING
Information Patent Application
Retarding Field Analyzer Integral with Particle Beam Column
- Publication number 20140117233
- Publication date May 1, 2014
- FEI Company
- David William Tuggle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MONITORING ELECTRON BEAM CONDITION OF SCAN...
- Publication number 20140117218
- Publication date May 1, 2014
- Semiconductor Manufacturing International Corporation
- BoXiu CAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, DRAWING APPARATUS, AND METHOD OF M...
- Publication number 20140065547
- Publication date Mar 6, 2014
- Canon Kabushiki Kaisha
- Keiichi Arita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Method of Adjusting the Same
- Publication number 20130327938
- Publication date Dec 12, 2013
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCITED GAS INJECTION FOR ION IMPLANT CONTROL
- Publication number 20130313443
- Publication date Nov 28, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Bon-Woong Koo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130230806
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern Dimension Measurement Method Using Electron Microscope, Pat...
- Publication number 20130166240
- Publication date Jun 27, 2013
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING

Beam diagnostics including control of the parameter or property diagnosed

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Optical diagnostics of semiconductor process using hyperspectral im...

Mass airflow sensor and hydrocarbon trap combination

Charged particle beam device

Method and apparatus for deposition of metal nitrides

Optical diagnostics of semiconductor process using hyperspectral im...

Optical diagnostics of semiconductor process using hyperspectral im...

Method and apparatus for neutral beam processing based on gas clust...

Plasma processing apparatus and plasma processing method

Rotary module for an accelerator system

Multi charged particle beam writing apparatus and multi charged par...

Methods and apparatus for determining, using, and indicating ion be...

Separate plasma source coil and method of controlling the same

Methods for stability monitoring and improvements to plasma sources...

Plasma processing apparatus and plasma processing method

Method and device for characterizing an electron beam

Multi charged particle beam writing apparatus and multi charged par...

Beam profiling speed enhancement for scanned beam implanters

Multi charged particle beam writing apparatus and multi charged par...

Pattern inspection method using charged particle beam

Ion implantation apparatus and ion implantation method

Scanning electron microscope

Multi charged particle beam writing method, and multi charged parti...

Inspection method for blanking device for blanking multi charged pa...

Method and device for characterizing an electron beam

System and method to improve productivity of hybrid scan ion beam i...

Pattern dimension measurement method using electron microscope, pat...

Method for determining a beamlet position and method for determinin...

Method for determining a beamlet position and method for determinin...

Ion implantation method and ion implantation apparatus

Ion implanter and method of ion beam tuning

Patents Applicationslast 30 patents

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTIPLE CHARG...

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELEC...

Method and Apparatus for Deposition of Mental Nitrides

MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION

Charged Particle Beam Device and Aberration Correction Method

TOOL FOR TESTING AN ELECTRON-OPTICAL ASSEMBLY

CHARGED PARTICLE BEAM DEVICE

SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS

METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHODS FOR STABILITY MONITORING AND IMPROVEMENTS TO PLASMA SOURCES...

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

PATTERN INSPECTION METHOD USING CHARGED PARTICLE BEAM

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM

MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTI...

Scanning Electron Microscope

METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM

Methods and Apparatus for Determining, Using, and Indicating Ion Be...

ION IMPLANTER AND METHOD OF ION BEAM TUNING

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

METHOD FOR DETERMINING BEAM PARAMETERS OF A CHARGE CARRIER BEAM, ME...

Retarding Field Analyzer Integral with Particle Beam Column

METHOD AND APPARATUS FOR MONITORING ELECTRON BEAM CONDITION OF SCAN...

CHARGED PARTICLE BEAM APPARATUS, DRAWING APPARATUS, AND METHOD OF M...

Electron Microscope and Method of Adjusting the Same

EXCITED GAS INJECTION FOR ION IMPLANT CONTROL

LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

Pattern Dimension Measurement Method Using Electron Microscope, Pat...