Beam polarising means

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CPC
H01J2237/041

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/041Beam polarising means

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle device, charged particle irradiation method, and a...
- Patent number 10,395,885
- Issue date Aug 27, 2019
- Hitachi, Ltd.
- Teruo Kohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin rotation device
- Patent number 9,466,454
- Issue date Oct 11, 2016
- SANYU DENSHI CO., LTD.
- Tuneo Yasue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phase-shifting element and particle beam device having a phase-shif...
- Patent number 8,436,302
- Issue date May 7, 2013
- Carl Zeiss Microscopy GmbH
- Rasmus Schröder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phase-shifting element and particle beam device having a phase-shif...
- Patent number 8,173,963
- Issue date May 8, 2012
- Carl Zeizz NTS GmbH
- Rasmus Schröder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phase-shifting element and particle beam device having a phase-shif...
- Patent number 7,902,506
- Issue date Mar 8, 2011
- Carl Zeiss NTS GmbH
- Rasmus Schröder
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20150380213
- Publication date Dec 31, 2015
- NuFlare Technology, Inc.
- Hideyuki TSURUMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN ROTATION DEVICE
- Publication number 20140197734
- Publication date Jul 17, 2014
- SANYU DENSHI CO., LTD
- Tuneo Yasue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHASE-SHIFTING ELEMENT AND PARTICLE BEAM DEVICE HAVING A PHASE-SHIF...
- Publication number 20130001445
- Publication date Jan 3, 2013
- Rasmus Schroder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Phase-shifting element and particle beam device having a phase-shif...
- Publication number 20110233402
- Publication date Sep 29, 2011
- Rasmus Schroder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Phase-shifting element and particle beam device having a phase-shif...
- Publication number 20080296509
- Publication date Dec 4, 2008
- Rasmus Schroder
- H01 - BASIC ELECTRIC ELEMENTS