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Patents Grants
last 30 patents
Information
Patent Grant
MEMS resonator
Patent number
12,184,262
Issue date
Dec 31, 2024
KYOCERA Technologies Oy
Antti Jaakkola
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical resonator and resonator system including the same
Patent number
11,973,485
Issue date
Apr 30, 2024
Samsung Electronics Co., Ltd.
Yongseop Yoon
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
MEMS resonator
Patent number
11,799,441
Issue date
Oct 24, 2023
KYOCERA Tikitin Oy
Antti Jaakkola
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Differential resonator and MEMS sensor
Patent number
11,784,624
Issue date
Oct 10, 2023
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhan Zhan
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Temperature stable MEMS resonator
Patent number
11,764,751
Issue date
Sep 19, 2023
SiTime Corporation
Paul M. Hagelin
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Distributed-mode beam and frame resonators for high frequency timin...
Patent number
11,533,042
Issue date
Dec 20, 2022
Georgia Tech Research Corporation
Anosh Daruwalla
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Temperature stable MEMS resonator
Patent number
11,469,734
Issue date
Oct 11, 2022
SiTime Corporation
Paul M. Hagelin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonant transducer
Patent number
11,211,916
Issue date
Dec 28, 2021
Yokogawa Electric Corporation
Takashi Yoshida
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Vibrating beam accelerometer
Patent number
11,119,115
Issue date
Sep 14, 2021
Honeywell International Inc.
John Strehlow
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Temperature stable mems resonator
Patent number
11,082,024
Issue date
Aug 3, 2021
SiTime Corporation
Paul M. Hagelin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micromechanical resonator and resonator system including the same
Patent number
10,541,670
Issue date
Jan 21, 2020
Samsung Electronics Co., Ltd.
Yongseop Yoon
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Piezoelectric package-integrated crystal devices
Patent number
10,432,167
Issue date
Oct 1, 2019
Intel Corporation
Adel A. Elsherbini
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Micro-electromechanical resonators and methods of providing a refer...
Patent number
10,211,805
Issue date
Feb 19, 2019
Agency for Science, Technology and Research
Jinghui Xu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS resonator
Patent number
10,177,733
Issue date
Jan 8, 2019
Hyundai Motor Company
Ilseon Yoo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Frequency divider apparatus
Patent number
9,716,485
Issue date
Jul 25, 2017
Board of Trustees of Michigan State University
Steven Shaw
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
MEMS/NEMS device comprising a network of electrostatically actuated...
Patent number
9,685,929
Issue date
Jun 20, 2017
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Julien Arcamone
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method of forming a resonator
Patent number
9,641,153
Issue date
May 2, 2017
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultra low power thermally-actuated oscillator and driving circuit t...
Patent number
9,621,105
Issue date
Apr 11, 2017
National Tsing Hua University
Sheng-Shian Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Temperature compensation for MEMS devices
Patent number
9,602,026
Issue date
Mar 21, 2017
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Temperature stable MEMS resonator
Patent number
9,548,720
Issue date
Jan 17, 2017
SiTime Corporation
Paul M. Hagelin
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Rotational MEMS resonator for oscillator applications
Patent number
9,509,278
Issue date
Nov 29, 2016
Silicon Laboratories Inc.
Aaron J. Caffee
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Vertical differential resonator
Patent number
9,490,769
Issue date
Nov 8, 2016
Micrel, Incorporated
Wan-Thai Hsu
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Planar structure of a mechanical resonator decoupled by bending osc...
Patent number
9,484,884
Issue date
Nov 1, 2016
Office National D'Etudes Et De Recherches Aerospatials
Olivier Le Traon
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Temperature compensated resonator with a pair of spaced apart inter...
Patent number
9,431,993
Issue date
Aug 30, 2016
Micrel, Incorporated
Wan-Thai Hsu
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Microelectromechanical resonator
Patent number
9,412,934
Issue date
Aug 9, 2016
Murata Manufacturing Co., Ltd.
Antti Iihola
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Nanomechanical resonator array and production method thereof
Patent number
9,413,333
Issue date
Aug 9, 2016
Koc Universitesi
Burhanettin Erdem Alaca
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Thin film device and method for manufacturing thin film device
Patent number
9,368,247
Issue date
Jun 14, 2016
Murata Manufacturing Co., Ltd.
Keiichi Umeda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vibrator with a beam-shaped portion above a recess in a substrate,...
Patent number
9,331,668
Issue date
May 3, 2016
Seiko Epson Corporation
Takahiko Yoshizawa
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Monolithic body MEMS devices
Patent number
9,300,227
Issue date
Mar 29, 2016
Silicon Laboratories Inc.
Emmanuel P. Quevy
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Suspended passive element for MEMS devices
Patent number
9,246,412
Issue date
Jan 26, 2016
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS RESONATOR
Publication number
20240007077
Publication date
Jan 4, 2024
KYOCERA Tikitin Oy
Antti JAAKKOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY
Publication number
20230133733
Publication date
May 4, 2023
KYOCERA Tikitin Oy
Ville SAARELA
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MEMS RESONATOR
Publication number
20220200564
Publication date
Jun 23, 2022
KYOCERA Tikitin Oy
Antti JAAKKOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL RESONATOR AND RESONATOR SYSTEM INCLUDING THE SAME
Publication number
20220140802
Publication date
May 5, 2022
Samsung Electronics Co., Ltd.
Yongseop Yoon
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
DIFFERENTIAL RESONATOR AND MEMS SENSOR
Publication number
20200412325
Publication date
Dec 31, 2020
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Zhan Zhan
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
VIBRATING BEAM ACCELEROMETER
Publication number
20200064367
Publication date
Feb 27, 2020
HONEYWELL INTERNATIONAL INC.
John Strehlow
G01 - MEASURING TESTING
Information
Patent Application
RESONANT TRANSDUCER
Publication number
20180145656
Publication date
May 24, 2018
YOKOGAWA ELECTRIC CORPORATION
Takashi YOSHIDA
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MEMS RESONATOR
Publication number
20170170802
Publication date
Jun 15, 2017
Hyundai Motor Company
Ilseon Yoo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS/NEMS DEVICE COMPRISING A NETWORK OF ELECTROSTATICALLY ACTUATED...
Publication number
20150123745
Publication date
May 7, 2015
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Julien ARCAMONE
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MONOLITHIC BODY MEMS DEVICES
Publication number
20140361843
Publication date
Dec 11, 2014
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUSPENDED PASSIVE ELEMENT FOR MEMS DEVICES
Publication number
20140361844
Publication date
Dec 11, 2014
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TEMPERATURE COMPENSATION FOR MEMS DEVICES
Publication number
20140361661
Publication date
Dec 11, 2014
Silicon Laboratories Inc.
Emmanuel P. Quevy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL RESONATOR
Publication number
20140339963
Publication date
Nov 20, 2014
MURATA ELECTRONICS OY
Antti IIHOLA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING A VIBRATOR, VIBRATOR, AND OSCILLATOR
Publication number
20140292427
Publication date
Oct 2, 2014
SEIKO EPSON CORPORATION
Takahiko YOSHIZAWA
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MICROELECTROMECHANICAL RESONATORS
Publication number
20140266484
Publication date
Sep 18, 2014
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROTATIONAL MEMS RESONATOR FOR OSCILLATOR APPLICATIONS
Publication number
20140266509
Publication date
Sep 18, 2014
Silicon Laboratories Inc.
Aaron J. Caffee
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MICROELECTRONIC MACHINE-BASED VARIABLE RESONATOR
Publication number
20140184347
Publication date
Jul 3, 2014
Motorola Mobility LLC
William P. Alberth
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, A...
Publication number
20140103778
Publication date
Apr 17, 2014
SEIKO EPSON CORPORATION
Shogo INABA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THIN FILM DEVICE AND METHOD FOR MANUFACTURING THIN FILM DEVICE
Publication number
20140078640
Publication date
Mar 20, 2014
MURATA MANUFACTURING CO., LTD.
Keiichi UMEDA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-MODE BANDPASS FILTER
Publication number
20140055214
Publication date
Feb 27, 2014
QUALCOMM Incorporated
Sanghoon Joo
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
ELECTROMECHANICAL OSCILLATORS, PARAMETRIC OSCILLATORS, AND TORSIONA...
Publication number
20130194048
Publication date
Aug 1, 2013
California Institute of Technology
Philip X.-L. Feng
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MEMS RESONATOR AND ELECTRICAL DEVICE USING THE SAME
Publication number
20130033334
Publication date
Feb 7, 2013
Yasuyuki NAITO
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MEMS VIBRATOR, OSCILLATOR, AND METHOD FOR MANUFACTURING MEMS VIBRATOR
Publication number
20120146736
Publication date
Jun 14, 2012
SEIKO EPSON CORPORATION
Ryuji KIHARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONATOR AND PRODUCTION METHOD THEREOF
Publication number
20120091547
Publication date
Apr 19, 2012
PANASONIC CORPORATION
Tomohide Kamiyama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONATOR, ELASTIC WAVE TRANSMISSION ELEMENT AND FABRICATION METHOD...
Publication number
20110133855
Publication date
Jun 9, 2011
Industrial Technology Research Institute
Tsun-Che Huang
H03 - BASIC ELECTRONIC CIRCUITRY