Bombardment of substrates by reactive ion beams

Industry

CPC
C23C14/0031

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0031Bombardment of substrates by reactive ion beams

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion implantation to modify glass locally for optical devices
- Patent number 11,873,554
- Issue date Jan 16, 2024
- Applied Materials, Inc.
- Nai-Wen Pi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 11,424,136
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reference electrode assemblies including thin, porous current colle...
- Patent number 11,245,105
- Issue date Feb 8, 2022
- GM Global Technology Operations LLC
- Gayatri V. Dadheech
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal evaporation process for manufacture of solid state battery...
- Patent number 11,078,565
- Issue date Aug 3, 2021
- Sakti3, Inc.
- Myoungdo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 10,930,526
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Ion assisted deposition for rare-earth oxide based thin film coatin...
- Patent number 10,796,888
- Issue date Oct 6, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sliding member and method for producing the same
- Patent number 10,669,624
- Issue date Jun 2, 2020
- Toyota Jidosha Kabushiki Kaisha
- Kazuyoshi Manabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Orthopaedic implants having self-lubricated articulating surfaces d...
- Patent number 10,543,094
- Issue date Jan 28, 2020
- BEAMALLOY RECONSTRUCTIVE MEDICAL PRODUCTS, LLC
- Arnold H. Deutchman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
- Patent number 10,207,244
- Issue date Feb 19, 2019
- SmartTip B.V.
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Amorphous lead oxide based energy detection devices and methods of...
- Patent number 10,163,970
- Issue date Dec 25, 2018
- THUNDER BAY REGIONAL HEALTH RESEARCH INSTITUTE
- Oleksii Semeniuk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable MgO—MgF2 composite film for infrared anti-reflection coatings
- Patent number 9,963,773
- Issue date May 8, 2018
- Corning Incorporated
- Horst Schreiber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition for rare-earth oxide based coatings
- Patent number 9,869,012
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rare-earth oxide based coatings based on ion assisted deposition
- Patent number 9,812,341
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition for rare-earth oxide based thin film coatin...
- Patent number 9,711,334
- Issue date Jul 18, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal evaporation process for manufacture of solid state battery...
- Patent number 9,631,269
- Issue date Apr 25, 2017
- Sakti3, Inc.
- Myoungdo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition for rare-earth oxide based coatings on lids...
- Patent number 9,583,369
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 9,401,262
- Issue date Jul 26, 2016
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal evaporation process for manufacture of solid state battery...
- Patent number 9,127,344
- Issue date Sep 8, 2015
- Sakti3, Inc.
- Myoungdo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion gun system, vapor deposition apparatus, and method for producin...
- Patent number 9,074,283
- Issue date Jul 7, 2015
- Hoya Corporation
- Yukihiro Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 9,029,812
- Issue date May 12, 2015
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for producing a semiconductor layer
- Patent number 8,956,906
- Issue date Feb 17, 2015
- Solarion AG
- Hendrik Zachmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Encapsulated integrated-circuit device with thin-film battery
- Patent number 8,761,842
- Issue date Jun 24, 2014
- Cymbet Corporation
- Harlan T. Jacobs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 8,692,217
- Issue date Apr 8, 2014
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for integrated-circuit battery devices
- Patent number 8,637,349
- Issue date Jan 28, 2014
- Cymbet Corporation
- Mark L. Jenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of using nitrogen based compounds to reduce contamination in...
- Patent number 8,617,668
- Issue date Dec 31, 2013
- FEI Company
- Milos Toth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 8,405,054
- Issue date Mar 26, 2013
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Battery-operated wireless-communication apparatus and method
- Patent number 8,219,140
- Issue date Jul 10, 2012
- Cymbet Corporation
- Harlan T. Jacobs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-source plasma focused ion beam system
- Patent number 8,076,650
- Issue date Dec 13, 2011
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for integrated-circuit battery devices
- Patent number 8,044,508
- Issue date Oct 25, 2011
- Cymbet Corporation
- Mark L. Jenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Battery-operated wireless-communication apparatus and method
- Patent number 7,877,120
- Issue date Jan 25, 2011
- Cymbet Corporation
- Harlan T. Jacobs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES
- Publication number 20240124969
- Publication date Apr 18, 2024
- Applied Materials, Inc.
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM
- Publication number 20230367226
- Publication date Nov 16, 2023
- Carl Zeiss SMT GMBH
- Vitaliy SHKLOVER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES
- Publication number 20220307127
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Nai-Wen PI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERFERENCE LAYER SYSTEM WITHOUT A CARRIER SUBSTRATE, METHOD FOR P...
- Publication number 20220107451
- Publication date Apr 7, 2022
- CARL ZEISS VISION INTERNATIONAL GMBH
- Bernhard von Blanckenhagen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20210118703
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFERENCE ELECTRODE ASSEMBLIES INCLUDING THIN, POROUS CURRENT COLLE...
- Publication number 20210091369
- Publication date Mar 25, 2021
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Gayatri V. DADHEECH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20180100228
- Publication date Apr 12, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATIN...
- Publication number 20180096825
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL EVAPORATION PROCESS FOR MANUFACTURE OF SOLID STATE BATTERY...
- Publication number 20170356078
- Publication date Dec 14, 2017
- Sakti3, Inc.
- Myoungdo CHUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATIN...
- Publication number 20170301522
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DURABLE MgO-MgF2 COMPOSITE FILM FOR INFRARED ANTI-REFLECTION COATINGS
- Publication number 20170175245
- Publication date Jun 22, 2017
- Corring Incorporated
- Horst Schreiber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED COATINGS
- Publication number 20170130319
- Publication date May 11, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
- Publication number 20170133207
- Publication date May 11, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM
- Publication number 20140312245
- Publication date Oct 23, 2014
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
- Publication number 20140199493
- Publication date Jul 17, 2014
- Shincron Co., LTD
- Ichiro Shiono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM
- Publication number 20130309421
- Publication date Nov 21, 2013
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Item Comprising a Mesoporous Layer Protected by a Coating Acting as...
- Publication number 20130209785
- Publication date Aug 15, 2013
- Essilor International (Compagnie Generale D Optique)
- Mamonjy Cadet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR PRODUCING A SEMICONDUCTOR LAYER
- Publication number 20130045563
- Publication date Feb 21, 2013
- Solarion AG Photovotaik
- Hendrik Zachmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED-CIRCUIT BATTERY DEVICES
- Publication number 20120274273
- Publication date Nov 1, 2012
- CYMBET CORPORATION
- Harlan Theodore Jacobs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Source Plasma Focused Ion Beam System
- Publication number 20120080407
- Publication date Apr 5, 2012
- FEI Company
- Noel Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL EVAPORATION PROCESS FOR MANUFACTURE OF SOLID STATE BATTERY...
- Publication number 20120058280
- Publication date Mar 8, 2012
- Sakti3, Inc.
- Myoungdo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATTERY-OPERATED WIRELESS-COMMUNICATION APPARATUS AND METHOD
- Publication number 20110300413
- Publication date Dec 8, 2011
- CYMBET CORPORATION
- Harlan Theodore Jacobs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR INTEGRATED-CIRCUIT BATTERY DEVICES
- Publication number 20110097609
- Publication date Apr 28, 2011
- CYMBET CORPORATION
- Mark Lynn Jenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND MANUFACTURING METHOD OF THIN FILM DEVICE
- Publication number 20110097511
- Publication date Apr 28, 2011
- SHINCRON CO., LTD.
- Ichiro Shiono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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USE OF NITROGEN-BASED REDUCING COMPOUNDS IN BEAM-INDUCED PROCESSING
- Publication number 20110070381
- Publication date Mar 24, 2011
- FEI Company
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Information Patent Application
FILM FORMING METHOD AND PRODUCTION PROCESS OF LIQUID CRYSTAL DISPLA...
- Publication number 20100181013
- Publication date Jul 22, 2010
- Canon Kabushiki Kaisha
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM
- Publication number 20090309018
- Publication date Dec 17, 2009
- FEI Company
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Information Patent Application
ION GUN SYSTEM, VAPOR DEPOSITION APPARATUS, AND METHOD FOR PRODUCIN...
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- Publication number 20090032725
- Publication date Feb 5, 2009
- TOKYO ELECTRON LIMITED
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bombardment of substrates by reactive ion beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion implantation to modify glass locally for optical devices

Rare-earth oxide based coatings based on ion assisted deposition

Reference electrode assemblies including thin, porous current colle...

Thermal evaporation process for manufacture of solid state battery...

Rare-earth oxide based coatings based on ion assisted deposition

Ion assisted deposition for rare-earth oxide based thin film coatin...

Sliding member and method for producing the same

Orthopaedic implants having self-lubricated articulating surfaces d...

Method of manufacturing a plurality of through-holes in a layer of...

Amorphous lead oxide based energy detection devices and methods of...

Durable MgO—MgF2 composite film for infrared anti-reflection coatings

Ion assisted deposition for rare-earth oxide based coatings

Rare-earth oxide based coatings based on ion assisted deposition

Ion assisted deposition for rare-earth oxide based thin film coatin...

Thermal evaporation process for manufacture of solid state battery...

Ion assisted deposition for rare-earth oxide based coatings on lids...

Multi-source plasma focused ion beam system

Thermal evaporation process for manufacture of solid state battery...

Ion gun system, vapor deposition apparatus, and method for producin...

Multi-source plasma focused ion beam system

Method and device for producing a semiconductor layer

Encapsulated integrated-circuit device with thin-film battery

Multi-source plasma focused ion beam system

Method and apparatus for integrated-circuit battery devices

Method of using nitrogen based compounds to reduce contamination in...

Multi-source plasma focused ion beam system

Battery-operated wireless-communication apparatus and method

Multi-source plasma focused ion beam system

Method and apparatus for integrated-circuit battery devices

Battery-operated wireless-communication apparatus and method

Patents Applicationslast 30 patents

ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES

LAYER-FORMING METHOD, OPTICAL ELEMENT AND OPTICAL SYSTEM

ION IMPLANTATION TO MODIFY GLASS LOCALLY FOR OPTICAL DEVICES

INTERFERENCE LAYER SYSTEM WITHOUT A CARRIER SUBSTRATE, METHOD FOR P...

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

REFERENCE ELECTRODE ASSEMBLIES INCLUDING THIN, POROUS CURRENT COLLE...

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATIN...

THERMAL EVAPORATION PROCESS FOR MANUFACTURE OF SOLID STATE BATTERY...

ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED THIN FILM COATIN...

DURABLE MgO-MgF2 COMPOSITE FILM FOR INFRARED ANTI-REFLECTION COATINGS

ION ASSISTED DEPOSITION FOR RARE-EARTH OXIDE BASED COATINGS

RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION

MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM

Item Comprising a Mesoporous Layer Protected by a Coating Acting as...

METHOD AND DEVICE FOR PRODUCING A SEMICONDUCTOR LAYER

INTEGRATED-CIRCUIT BATTERY DEVICES

Multi-Source Plasma Focused Ion Beam System

THERMAL EVAPORATION PROCESS FOR MANUFACTURE OF SOLID STATE BATTERY...

BATTERY-OPERATED WIRELESS-COMMUNICATION APPARATUS AND METHOD

METHOD AND APPARATUS FOR INTEGRATED-CIRCUIT BATTERY DEVICES

DEPOSITION APPARATUS AND MANUFACTURING METHOD OF THIN FILM DEVICE

USE OF NITROGEN-BASED REDUCING COMPOUNDS IN BEAM-INDUCED PROCESSING

FILM FORMING METHOD AND PRODUCTION PROCESS OF LIQUID CRYSTAL DISPLA...

MULTI-SOURCE PLASMA FOCUSED ION BEAM SYSTEM

ION GUN SYSTEM, VAPOR DEPOSITION APPARATUS, AND METHOD FOR PRODUCIN...

BATTERY-OPERATED WIRELESS-COMMUNICATION APPARATUS AND METHOD

APPARATUS AND METHODS FOR TREATING A WORKPIECE USING A GAS CLUSTER...