Bulk-mode MEMS resonators

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H03H2009/241

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HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS

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H03H2009/241Bulk-mode MEMS resonators

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a piezoelectric resonator
- Patent number 12,160,215
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Friedjof Heuck
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Nonlinear acoustic medium
- Patent number 11,581,871
- Issue date Feb 14, 2023
- FemtoDx, Inc.
- Pritiraj Mohanty
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 11,329,624
- Issue date May 10, 2022
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric vibrator and piezoelectric vibration device
- Patent number 11,196,403
- Issue date Dec 7, 2021
- Murata Manufacturing Co., Ltd.
- Ryota Kawai
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Pitch/roll annulus gyroscope with slanted quadrature tuning electro...
- Patent number 10,921,123
- Issue date Feb 16, 2021
- Georgia Tech Research Corporation
- Haoran Wen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Microelectromechanical system resonator devices and oscillator cont...
- Patent number 10,879,869
- Issue date Dec 29, 2020
- Socovar, Société En Commandite
- Mohannad Elsayad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inductively-coupled MEMS resonators
- Patent number 10,840,883
- Issue date Nov 17, 2020
- Texas Instruments Incorporated
- Bichoy Bahr
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator with a high quality factor
- Patent number 10,778,184
- Issue date Sep 15, 2020
- MURATA MANUFACTURING CO., LTD.
- Ville Kaajakari
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Bulk mode microelectromechanical resonator devices and methods
- Patent number 10,742,191
- Issue date Aug 11, 2020
- MEMS-Vision International Inc.
- Mohannad Elsayed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator manufacturing method
- Patent number 10,727,807
- Issue date Jul 28, 2020
- MURATA MANUFACTURING CO., LTD.
- Keiichi Umeda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal-piezoresistive oscillator-based aerosol sensor and aerosol...
- Patent number 10,705,053
- Issue date Jul 7, 2020
- National Tsing Hua University
- Sheng-Shian Li
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonating device
- Patent number 10,530,332
- Issue date Jan 7, 2020
- MURATA MANUFACTURING CO., LTD.
- Daisuke Nakamura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator with suppressed spurious modes
- Patent number 10,476,476
- Issue date Nov 12, 2019
- MURATA MANUFACTURING CO., LTD.
- Ville Kaajakari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration device and manufacturing method of the same
- Patent number 10,291,202
- Issue date May 14, 2019
- MURATA MANUFACTURING CO., LTD.
- Hiroshi Yamada
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature compensated beam resonator
- Patent number 10,056,877
- Issue date Aug 21, 2018
- Teknologian tutkimuskeskus VTT Oy
- Antti Jaakkola
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Enhanced MEMS vibrating device
- Patent number 9,998,088
- Issue date Jun 12, 2018
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature compensated compound resonator
- Patent number 9,991,869
- Issue date Jun 5, 2018
- Teknologian tutkimuskeskus VTT Oy
- Antti Jaakkola
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Nano- and microelectromechanical resonators
- Patent number 9,935,608
- Issue date Apr 3, 2018
- Northeastern University
- Matteo Rinaldi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonant body high electron mobility transistor
- Patent number 9,917,244
- Issue date Mar 13, 2018
- The Regents of the University of Michigan
- Mina Rais-Zadeh
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Encapsulated bulk acoustic wave (BAW) resonator device
- Patent number 9,793,877
- Issue date Oct 17, 2017
- Avago Technologies General IP (Singapore) Pte. Ltd.
- Steve Martin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacturing a mechanical resonating structure
- Patent number 9,762,202
- Issue date Sep 12, 2017
- Analog Devices, Inc.
- Florian Thalmayr
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Integrated semiconductor devices with single crystalline beam, meth...
- Patent number 9,758,365
- Issue date Sep 12, 2017
- GLOBALFOUNDRIES INC.
- David L. Harame
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano- and microelectromechanical resonators
- Patent number 9,712,136
- Issue date Jul 18, 2017
- Northeastern University
- Matteo Rinaldi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Nano- and micro-electromechanical resonators
- Patent number 9,705,469
- Issue date Jul 11, 2017
- Northeastern University
- Matteo Rinaldi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMs-based resonant FinFET
- Patent number 9,663,346
- Issue date May 30, 2017
- GLOBALFOUNDRIES Inc.
- Bichoy Bahr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical devices comprising n-type doping agents
- Patent number 9,559,660
- Issue date Jan 31, 2017
- Teknologian tutkimuskeskus VTT Oy
- Tuomas Pensala
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electroacoustic transducer
- Patent number 9,497,551
- Issue date Nov 15, 2016
- EPCOS AG
- Werner Ruile
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Variable capacitor and switch structures in single crystal piezoele...
- Patent number 9,466,430
- Issue date Oct 11, 2016
- Qorvo US, Inc.
- Kushal Bhattacharjee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano- and micro-electromechanical resonators
- Patent number 9,425,765
- Issue date Aug 23, 2016
- Northeastern University
- Matteo Rinaldi
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for temperature control of devices and mechan...
- Patent number 9,401,693
- Issue date Jul 26, 2016
- Analog Devices, Inc.
- Klaus Juergen Schoepf
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
MEMS RESONATOR
- Publication number 20250055440
- Publication date Feb 13, 2025
- KYOCERA Technologies Oy
- Eric SAGE
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD FOR MANUFACTURING A PIEZOELECTRIC RESONATOR
- Publication number 20220231652
- Publication date Jul 21, 2022
- ROBERT BOSCH GmbH
- Friedjof Heuck
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
INDUCTIVELY-COUPLED MEMS RESONATORS
- Publication number 20200212881
- Publication date Jul 2, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Bichoy BAHR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL SYSTEM RESONATOR DEVICES AND OSCILLATOR CONT...
- Publication number 20190140612
- Publication date May 9, 2019
- MOHANNAD ELSAYAD
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PITCH/ROLL ANNULUS GYROSCOPE WITH SLANTED QUADRATURE TUNING ELECTRO...
- Publication number 20190137271
- Publication date May 9, 2019
- Georgia Tech Research Corporation
- Haoran Wen
- G01 - MEASURING TESTING
Information Patent Application
Nano- and Microelectromechanical Resonators
- Publication number 20180097499
- Publication date Apr 5, 2018
- Northeastern University
- Matteo Rinaldi
- G01 - MEASURING TESTING
Information Patent Application
Encapsulated Bulk Acoustic Wave (BAW) Resonator Device
- Publication number 20160365843
- Publication date Dec 15, 2016
- Avago Technologies General IP (Singapore) PTE. LTD.
- Steve Martin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING A RESONATING STRUCTURE
- Publication number 20140306580
- Publication date Oct 16, 2014
- SAND 9, INC.
- Florian Thalmayr
- G01 - MEASURING TESTING
Information Patent Application
VARIABLE CAPACITOR AND SWITCH STRUCTURES IN SINGLE CRYSTAL PIEZOELE...
- Publication number 20140125201
- Publication date May 8, 2014
- RF Micro Devices, Inc.
- Kushal Bhattacharjee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TUNABLE AND SWITCHABLE RESONATOR AND FILTER STRUCTURES IN SINGLE CR...
- Publication number 20140125431
- Publication date May 8, 2014
- RF Micro Devices, Inc.
- Kushal Bhattacharjee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE DILATION MODE RESONATORS
- Publication number 20140111064
- Publication date Apr 24, 2014
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Chengjie Zuo
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Novel micromechanical devices
- Publication number 20140077898
- Publication date Mar 20, 2014
- TEKNOLOGIAN TUTKIMUSKESKUS VTT
- Tuomas Pensala
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR TEMPERATURE CONTROL OF DEVICES AND MECHAN...
- Publication number 20140062262
- Publication date Mar 6, 2014
- SAND 9, INC.
- Klaus Juergen Schoepf
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR ELECTRODES AND RELATED METHODS AND APPARATUS
- Publication number 20130334929
- Publication date Dec 19, 2013
- SAND 9, INC.
- Jan H. Kuypers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MECHANICAL RESONATING STRUCTURES
- Publication number 20130200752
- Publication date Aug 8, 2013
- Sand9, Inc.
- Jan H. Kuypers
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
INTER-DIGITAL BULK ACOUSTIC RESONATOR
- Publication number 20130147568
- Publication date Jun 13, 2013
- Industrial Technology Research Institute
- Tsun-Che Huang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARA...
- Publication number 20130140651
- Publication date Jun 6, 2013
- SAND 9, INC.
- David M. Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR
- Publication number 20130140948
- Publication date Jun 6, 2013
- NIHON DEMPA KOGYO CO., LTD.
- KEISUKE HIRANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARA...
- Publication number 20130140958
- Publication date Jun 6, 2013
- SAND 9, INC.
- David M. Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARA...
- Publication number 20130140944
- Publication date Jun 6, 2013
- SAND 9, INC.
- David M. Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
- Publication number 20130130502
- Publication date May 23, 2013
- SAND 9, INC.
- Andrew Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED SEMICONDUCTOR DEVICES WITH SINGLE CRYSTALLINE BEAM, METH...
- Publication number 20130122627
- Publication date May 16, 2013
- International Business Machines Corporation
- David L. HARAME
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Contour-Mode Piezoelectric Micromechanical Resonators
- Publication number 20130120083
- Publication date May 16, 2013
- The Regents of the University of California
- Gianluca Piazza
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Temperature Compensation in a Semiconductor Micromechanical Resonat...
- Publication number 20130099629
- Publication date Apr 25, 2013
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CROSS-SECTIONAL DILATION MODE RESONATORS
- Publication number 20130083044
- Publication date Apr 4, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Chengjie Zuo
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER...
- Publication number 20130082799
- Publication date Apr 4, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Chengjie Zuo
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
VIBRATOR, ELECTRONIC COMPONENT, AND METHOD OF MANUFACTURING VIBRATOR
- Publication number 20130057115
- Publication date Mar 7, 2013
- NIHON DEMPA KOGYO CO., LTD.
- TAKEFUMI SAITO
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
UNRELEASED MEMS RESONATOR AND METHOD OF FORMING SAME
- Publication number 20130033338
- Publication date Feb 7, 2013
- Massachusetts Institute of Technology
- Wentao Wang
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Electromechanical Systems Oscillator with Piezoelectric Contour Mod...
- Publication number 20120286886
- Publication date Nov 15, 2012
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Jonghae Kim
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Bulk acoustic wave resonator and method of manufacturing thereof
- Publication number 20120280758
- Publication date Nov 8, 2012
- TEKNOLOGIAN TUTKIMUSKESKUS VTT
- Antti Jaakkola
- H03 - BASIC ELECTRONIC CIRCUITRY

Bulk-mode MEMS resonators

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing a piezoelectric resonator

Nonlinear acoustic medium

Resonator and resonance device

Piezoelectric vibrator and piezoelectric vibration device

Pitch/roll annulus gyroscope with slanted quadrature tuning electro...

Microelectromechanical system resonator devices and oscillator cont...

Inductively-coupled MEMS resonators

MEMS resonator with a high quality factor

Bulk mode microelectromechanical resonator devices and methods

Resonator manufacturing method

Thermal-piezoresistive oscillator-based aerosol sensor and aerosol...

Resonator and resonating device

MEMS resonator with suppressed spurious modes

Vibration device and manufacturing method of the same

Temperature compensated beam resonator

Enhanced MEMS vibrating device

Temperature compensated compound resonator

Nano- and microelectromechanical resonators

Resonant body high electron mobility transistor

Encapsulated bulk acoustic wave (BAW) resonator device

Method of manufacturing a mechanical resonating structure

Integrated semiconductor devices with single crystalline beam, meth...

Nano- and microelectromechanical resonators

Nano- and micro-electromechanical resonators

MEMs-based resonant FinFET

Micromechanical devices comprising n-type doping agents

Electroacoustic transducer

Variable capacitor and switch structures in single crystal piezoele...

Nano- and micro-electromechanical resonators

Methods and apparatus for temperature control of devices and mechan...

Patents Applicationslast 30 patents

MEMS RESONATOR

METHOD FOR MANUFACTURING A PIEZOELECTRIC RESONATOR

INDUCTIVELY-COUPLED MEMS RESONATORS

MICROELECTROMECHANICAL SYSTEM RESONATOR DEVICES AND OSCILLATOR CONT...

PITCH/ROLL ANNULUS GYROSCOPE WITH SLANTED QUADRATURE TUNING ELECTRO...

Nano- and Microelectromechanical Resonators

Encapsulated Bulk Acoustic Wave (BAW) Resonator Device

METHOD AND APPARATUS FOR MANUFACTURING A RESONATING STRUCTURE

VARIABLE CAPACITOR AND SWITCH STRUCTURES IN SINGLE CRYSTAL PIEZOELE...

TUNABLE AND SWITCHABLE RESONATOR AND FILTER STRUCTURES IN SINGLE CR...

COMPOSITE DILATION MODE RESONATORS

Novel micromechanical devices

METHODS AND APPARATUS FOR TEMPERATURE CONTROL OF DEVICES AND MECHAN...

RESONATOR ELECTRODES AND RELATED METHODS AND APPARATUS

METHODS AND APPARATUS FOR MECHANICAL RESONATING STRUCTURES

INTER-DIGITAL BULK ACOUSTIC RESONATOR

MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARA...

RESONATOR

MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARA...

MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS AND RELATED APPARA...

MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS

INTEGRATED SEMICONDUCTOR DEVICES WITH SINGLE CRYSTALLINE BEAM, METH...

Contour-Mode Piezoelectric Micromechanical Resonators

Temperature Compensation in a Semiconductor Micromechanical Resonat...

CROSS-SECTIONAL DILATION MODE RESONATORS

CROSS-SECTIONAL DILATION MODE RESONATORS AND RESONATOR-BASED LADDER...

VIBRATOR, ELECTRONIC COMPONENT, AND METHOD OF MANUFACTURING VIBRATOR

UNRELEASED MEMS RESONATOR AND METHOD OF FORMING SAME

Electromechanical Systems Oscillator with Piezoelectric Contour Mod...

Bulk acoustic wave resonator and method of manufacturing thereof