by bubbling of carrier gas through liquid source material

Industry

CPC
C23C16/4482

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4482by bubbling of carrier gas through liquid source material

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Concentration control using a bubbler
- Patent number 12,209,310
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,198,929
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing oxide crystal thin film
- Patent number 12,195,844
- Issue date Jan 14, 2025
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 12,054,825
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Carl White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for manufacturing a semiconductor layer and su...
- Patent number 11,996,287
- Issue date May 28, 2024
- Albert-Ludwigs-Universitat Freiburg
- Stefano Leone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moisture governed growth method of atomic layer ribbons and nanorib...
- Patent number 11,981,996
- Issue date May 14, 2024
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for depositing a coating on a yarn in a microwave field
- Patent number 11,858,859
- Issue date Jan 2, 2024
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,854,799
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for controlling concentration of precursors t...
- Patent number 11,753,715
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Kenric Choi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Device and method for obtaining information about layers deposited...
- Patent number 11,669,072
- Issue date Jun 6, 2023
- Aixtron SE
- Peter Sebald Lauffer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Concentration control apparatus, source consumption quantity estima...
- Patent number 11,631,596
- Issue date Apr 18, 2023
- Horiba Stec, Co., Ltd.
- Toru Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moisture governed growth method of atomic layer ribbons and nanorib...
- Patent number 11,519,068
- Issue date Dec 6, 2022
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for depositing a layer
- Patent number 11,427,499
- Issue date Aug 30, 2022
- Pilkington Group Limited
- Kevin Sanderson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,170,996
- Issue date Nov 9, 2021
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating substrate for culturing stem cell
- Patent number 11,130,941
- Issue date Sep 28, 2021
- Research & Business Foundation Sungkyunkwan University
- Donggeun Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, liquid precursor replenishment syst...
- Patent number 10,876,207
- Issue date Dec 29, 2020
- Kokusai Electric Corporation
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for determining a concentration of a constituent...
- Patent number 10,852,282
- Issue date Dec 1, 2020
- Hitachi Metals, Ltd.
- Patrick Albright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Material delivery system and method
- Patent number 10,752,995
- Issue date Aug 25, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ke-Chih Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas control system, deposition apparatus including gas control syst...
- Patent number 10,655,220
- Issue date May 19, 2020
- HORIBA STEC, Co., Ltd.
- Yuhei Sakaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to improve precursor utilization in pulsed atomic layer proc...
- Patent number 10,619,243
- Issue date Apr 14, 2020
- Triratna P. Muneshwar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,586,698
- Issue date Mar 10, 2020
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control system and process for gaseous precursor delivery
- Patent number 10,557,203
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- David K. Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Refillable ampoule with purge capability
- Patent number 10,551,004
- Issue date Feb 4, 2020
- Entegris, Inc.
- Richard D. Chism
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous distillation trichlorosilane vaporization supply apparatus
- Patent number 10,480,071
- Issue date Nov 19, 2019
- Techno Boundary Co.
- Shinji Maruya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Delivery container with flow distributor
- Patent number 10,480,070
- Issue date Nov 19, 2019
- VERSUM MATERIALS US, LLC
- Charles Michael Birtcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vessel and method for delivery of precursor materials
- Patent number 10,443,128
- Issue date Oct 15, 2019
- VERSUM MATERIALS US, LLC
- Charles Michael Birtcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for continuously supplying a precursor
- Patent number 10,287,678
- Issue date May 14, 2019
- ThyssenKrupp Steel Europe AG
- Walter Mühlhause
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing oxide crystal thin film
- Patent number 10,202,685
- Issue date Feb 12, 2019
- FLOSFIA INC.
- Masaya Oda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process of preparing low dielectric constant thin film layer used i...
- Patent number 10,153,154
- Issue date Dec 11, 2018
- Soochow University
- Xuhui Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing gas generating apparatus, processing gas generating meth...
- Patent number 10,141,209
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Masashi Itonaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...
- Publication number 20250011933
- Publication date Jan 9, 2025
- TORAY ENGINEERING CO., LTD.
- Naoto SUGANUMA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PRECURSOR CONTAINER APPARATUS
- Publication number 20240360555
- Publication date Oct 31, 2024
- Picosun Oy
- Marko PUDAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL SUPPLY DEVICE AND CHEMICAL SUPPLY SYSTEM INCLUDING THE SAME
- Publication number 20240279803
- Publication date Aug 22, 2024
- RC-Tech Co.,Ltd.
- Tae Hwa LIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SU...
- Publication number 20240274435
- Publication date Aug 15, 2024
- Albert-Ludwigs-Universitat Freiburg
- Stefano LEONE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM AND PROCESSING SYSTEM
- Publication number 20240209495
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Suhwan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR
- Publication number 20240207838
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-METALLIC HIGH-ENTROPY COMPOUND, AND PREPARATION METHOD AND USE...
- Publication number 20240199433
- Publication date Jun 20, 2024
- Guangzhou University
- Zhaoqing LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240071750
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR ELECTRONIC DEVICES INCLUDING SIDEWALL BARRIER LAYERS...
- Publication number 20230411484
- Publication date Dec 21, 2023
- Corning Incorporated
- Hoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF ELECTRODE FOR ELECTROCHEMICAL REACTION, ELE...
- Publication number 20230290963
- Publication date Sep 14, 2023
- Kangwon University-Industry Cooperation Foundation
- Insoo CHOI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROL USING A BUBBLER
- Publication number 20230257878
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GROWING MONOLAYER TRANSITION METAL DICHALCOGENIDES VIA SU...
- Publication number 20230243030
- Publication date Aug 3, 2023
- Agency for Science, Technology and Research
- Henry Medina Silva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A COATING ON A YARN IN A MICROWAVE FIELD
- Publication number 20230242453
- Publication date Aug 3, 2023
- SAFRAN CERAMICS
- Arnaud DELEHOUZE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METALORGANIC CHEMICAL VAPOR PHASE EPITAXY OR VAPOR PHASE DEPOSITION...
- Publication number 20230212787
- Publication date Jul 6, 2023
- AZUR SPACE SOLAR POWER GMBH
- Clemens WAECHTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...
- Publication number 20230141275
- Publication date May 11, 2023
- Honda Motor Co., Ltd.
- Avetik R. HARUTYUNYAN
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A COMPOSITE STRUCTURE COMPRISING A THIN LA...
- Publication number 20220415653
- Publication date Dec 29, 2022
- SOITEC
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM
- Publication number 20220049348
- Publication date Feb 17, 2022
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND PROCESSING SYSTEM
- Publication number 20220033962
- Publication date Feb 3, 2022
- Samsung Electronics Co., Ltd.
- Suhwan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR CONTROLLING CONCENTRATION OF PRECURSORS T...
- Publication number 20210381104
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Kenric Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID PRECURSOR BUBBLER
- Publication number 20210346851
- Publication date Nov 11, 2021
- William L. Kimmerle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...
- Publication number 20210324515
- Publication date Oct 21, 2021
- Honda Motor Co., Ltd.
- Avetik R. HARUTYUNYAN
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210249256
- Publication date Aug 12, 2021
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR OBTAINING INFORMATION ABOUT LAYERS DEPOSITED...
- Publication number 20210072731
- Publication date Mar 11, 2021
- AIXTRON SE
- Peter Sebald LAUFFER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SU...
- Publication number 20210066070
- Publication date Mar 4, 2021
- Albert-Ludwigs-Universitat Freiburg
- Stefano LEONE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMA...
- Publication number 20200294820
- Publication date Sep 17, 2020
- Horiba Stec, Co., Ltd.
- Toru SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200294788
- Publication date Sep 17, 2020
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM
- Publication number 20190112703
- Publication date Apr 18, 2019
- FLOSFIA INC.
- Masaya Oda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Elimination of H2S in Immersion Tin Plating Solution
- Publication number 20180347038
- Publication date Dec 6, 2018
- MacDermid Enthone Inc.
- Cherry S. Santos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATION VESSEL APPARATUS AND METHOD
- Publication number 20180334744
- Publication date Nov 22, 2018
- Ceres Technologies, Inc.
- Egbert WOELK
- C30 - CRYSTAL GROWTH
Information Patent Application
ALUMINUM PRECURSORS FOR THIN-FILM DEPOSITION, PREPARATION METHOD AN...
- Publication number 20170327944
- Publication date Nov 16, 2017
- JIANGNAN UNIVERSITY
- Yuqiang DING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by bubbling of carrier gas through liquid source material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Concentration control using a bubbler

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing oxide crystal thin film

Bottom fed sublimation bed for high saturation efficiency in semico...

Method and apparatus for manufacturing a semiconductor layer and su...

Moisture governed growth method of atomic layer ribbons and nanorib...

Method for depositing a coating on a yarn in a microwave field

Method of manufacturing semiconductor device, substrate processing...

Apparatus and methods for controlling concentration of precursors t...

Device and method for obtaining information about layers deposited...

Concentration control apparatus, source consumption quantity estima...

Moisture governed growth method of atomic layer ribbons and nanorib...

Process for depositing a layer

Method of manufacturing semiconductor device, substrate processing...

Method of fabricating substrate for culturing stem cell

Substrate processing apparatus, liquid precursor replenishment syst...

System and method for determining a concentration of a constituent...

Material delivery system and method

Gas control system, deposition apparatus including gas control syst...

Method to improve precursor utilization in pulsed atomic layer proc...

Method of manufacturing semiconductor device, substrate processing...

Temperature control system and process for gaseous precursor delivery

Refillable ampoule with purge capability

Continuous distillation trichlorosilane vaporization supply apparatus

Delivery container with flow distributor

Vessel and method for delivery of precursor materials

Method and device for continuously supplying a precursor

Method of manufacturing oxide crystal thin film

Process of preparing low dielectric constant thin film layer used i...

Processing gas generating apparatus, processing gas generating meth...

Patents Applicationslast 30 patents

LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...

PRECURSOR CONTAINER APPARATUS

CHEMICAL SUPPLY DEVICE AND CHEMICAL SUPPLY SYSTEM INCLUDING THE SAME

METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SU...

DEPOSITION SYSTEM AND PROCESSING SYSTEM

AMPOULE FOR A SEMICONDUCTOR MANUFACTURING PRECURSOR

NON-METALLIC HIGH-ENTROPY COMPOUND, AND PREPARATION METHOD AND USE...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR ELECTRONIC DEVICES INCLUDING SIDEWALL BARRIER LAYERS...

MANUFACTURING METHOD OF ELECTRODE FOR ELECTROCHEMICAL REACTION, ELE...

CONCENTRATION CONTROL USING A BUBBLER

METHOD OF GROWING MONOLAYER TRANSITION METAL DICHALCOGENIDES VIA SU...

METHOD FOR DEPOSITING A COATING ON A YARN IN A MICROWAVE FIELD

METALORGANIC CHEMICAL VAPOR PHASE EPITAXY OR VAPOR PHASE DEPOSITION...

MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...

METHOD FOR MANUFACTURING A COMPOSITE STRUCTURE COMPRISING A THIN LA...

METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM

DEPOSITION SYSTEM AND PROCESSING SYSTEM

APPARATUS AND METHODS FOR CONTROLLING CONCENTRATION OF PRECURSORS T...

LIQUID PRECURSOR BUBBLER

MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

DEVICE AND METHOD FOR OBTAINING INFORMATION ABOUT LAYERS DEPOSITED...

METHOD AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR LAYER AND SU...

CONCENTRATION CONTROL APPARATUS, SOURCE CONSUMPTION QUANTITY ESTIMA...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING OXIDE CRYSTAL THIN FILM

Elimination of H2S in Immersion Tin Plating Solution

EVAPORATION VESSEL APPARATUS AND METHOD

ALUMINUM PRECURSORS FOR THIN-FILM DEPOSITION, PREPARATION METHOD AN...