by cleaning or etching

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CPC
C23C16/0227

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/0227by cleaning or etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate type sensor and method of measuring the impact point and...
- Patent number 12,224,189
- Issue date Feb 11, 2025
- Semes Co., Ltd.
- Young Seop Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning a surface
- Patent number 12,217,954
- Issue date Feb 4, 2025
- ASM IP Holding B.V.
- Shaoren Deng
- B08 - CLEANING
Information Patent Grant
Reflection mode dynode
- Patent number 12,198,915
- Issue date Jan 14, 2025
- ADAPTAS SOLUTIONS PTY LTD
- Toby Shanley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating hexagonal boron nitride
- Patent number 12,180,584
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Changseok Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of selective deposition
- Patent number 12,157,943
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Wenjing Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Copper-filled carbon nanotubes and synthesis methods thereof
- Patent number 12,151,938
- Issue date Nov 26, 2024
- The Florida International University Board of Trustees
- Wenzhi Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Textured region to reduce specular reflectance including a low refr...
- Patent number 12,147,009
- Issue date Nov 19, 2024
- Corning Incorporated
- Shandon Dee Hart
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Deposition method
- Patent number 12,119,228
- Issue date Oct 15, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated cutting tool
- Patent number 12,109,627
- Issue date Oct 8, 2024
- Tungaloy Corporation
- Cangyu Fan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,104,243
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated carrier cleaning modules
- Patent number 12,104,242
- Issue date Oct 1, 2024
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microstructure control of conducting materials through surface coat...
- Patent number 12,084,763
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Marc Shull
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a silicon carbide coated body
- Patent number 12,077,441
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Peter J. Guercio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 12,074,052
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growth of atomic layer ribbons and nanoribbons of transi...
- Patent number 12,060,642
- Issue date Aug 13, 2024
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum (0) precursors for deposition of molybdenum films
- Patent number 12,060,370
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-free tungsten ALD for dielectric selectivity improvement
- Patent number 12,062,545
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Ilanit Fisher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrophysiology device with electrodes having increased surface area
- Patent number 12,042,219
- Issue date Jul 23, 2024
- St. Jude Medical, Cardiology Division, Inc.
- Derek Sutermeister
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming components without adding tabs during etching
- Patent number 12,044,965
- Issue date Jul 23, 2024
- Hutchinson Technology Incorporated
- Clark T. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,033,852
- Issue date Jul 9, 2024
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD preparation method for minimizing camera module dot defects and...
- Patent number 12,034,020
- Issue date Jul 9, 2024
- HANGZHOU MDK OPTO ELECTRONICS CO., LTD
- Wenzhi Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating system and substrate transporting method
- Patent number 12,014,940
- Issue date Jun 18, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device patterning methods
- Patent number 11,987,875
- Issue date May 21, 2024
- Applied Materials, Inc.
- Yong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quantum printing methods
- Patent number 11,981,994
- Issue date May 14, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Display articles with diffractive, antiglare surfaces and thin, dur...
- Patent number 11,977,206
- Issue date May 7, 2024
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display articles with antiglare surfaces and thin, durable antirefl...
- Patent number 11,971,519
- Issue date Apr 30, 2024
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chemical vapour deposition
- Patent number 11,970,765
- Issue date Apr 30, 2024
- Ionautics AB
- Henrik Pedersen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,961,746
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Sho Kumakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CARBON MASK DEPOSITION
- Publication number 20250054760
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Daniela ANJOS RIGSBY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE
- Publication number 20250054767
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Qihao ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A MOLYBDENUM SILICIDE LAYER ON A SURFACE OF A SU...
- Publication number 20250038006
- Publication date Jan 30, 2025
- Didem Ernur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quantum Printing Nanostructures Within Carbon Nanopores
- Publication number 20250034702
- Publication date Jan 30, 2025
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
TEXTURED REGION TO REDUCE SPECULAR REFLECTANCE INCLUDING A LOW REFR...
- Publication number 20250035820
- Publication date Jan 30, 2025
- Corning Incorporated
- Shandon Dee Hart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROPHYSIOLOGY DEVICE WITH ELECTRODES HAVING INCREASED SURFACE AREA
- Publication number 20250009420
- Publication date Jan 9, 2025
- St. Jude Medical, Cardiology Division, Inc.
- Derek Sutermeister
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS
- Publication number 20250006474
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Naomi YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES
- Publication number 20240425973
- Publication date Dec 26, 2024
- VEECO INSTRUMENTS INC.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20240429055
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Chiyu Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20240417266
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Peter J. GUERCIO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER
- Publication number 20240384402
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Ting Tsai
- B08 - CLEANING
Information Patent Application
SILICON PRECURSOR COMPOUND, SILICON-CONTAINING FILM FORMATION COMPO...
- Publication number 20240383927
- Publication date Nov 21, 2024
- UP CHEMICAL CO., LTD.
- Byung Kwan KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SURFACE TREATMENT FILM
- Publication number 20240384418
- Publication date Nov 21, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Koya Inomata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...
- Publication number 20240376595
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Marc Shull
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240379349
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240371636
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Min Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...
- Publication number 20240368753
- Publication date Nov 7, 2024
- FUJIFILM CORPORATION
- Akihiro Hakamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method, Apparatus, and System
- Publication number 20240363405
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Masato SAKAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES
- Publication number 20240355688
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLE HAVING WATER- AND OIL-REPELLENT SURFACE LAYER
- Publication number 20240343919
- Publication date Oct 17, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takashi UCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Molybdenum (0) Precursors For Deposition Of Molybdenum Films
- Publication number 20240343748
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEGMENTED FORMATION OF GATE INTERFACE
- Publication number 20240339318
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...
- Publication number 20240322186
- Publication date Sep 26, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE FILM APPLIED TO FLEXIBLE SUBSTRATE, PREPARATION METHOD TH...
- Publication number 20240287674
- Publication date Aug 29, 2024
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240290609
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE PATTERNING METHODS
- Publication number 20240271272
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Yong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH METHOD
- Publication number 20240271273
- Publication date Aug 15, 2024
- NUFLARE TECHNOLOGY, INC.
- Ichiro MIZUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
- Publication number 20240246812
- Publication date Jul 25, 2024
- University of Washington
- Bo Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

by cleaning or etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate type sensor and method of measuring the impact point and...

Method of cleaning a surface

Reflection mode dynode

Method of fabricating hexagonal boron nitride

Tin oxide mandrels in patterning

Methods of selective deposition

Copper-filled carbon nanotubes and synthesis methods thereof

Textured region to reduce specular reflectance including a low refr...

Deposition method

Coated cutting tool

PECVD apparatus

Methods and apparatus for processing a substrate

Deposition system with integrated carrier cleaning modules

Microstructure control of conducting materials through surface coat...

Process for manufacturing a silicon carbide coated body

Forming mesas on an electrostatic chuck

Method for growth of atomic layer ribbons and nanoribbons of transi...

Molybdenum (0) precursors for deposition of molybdenum films

Fluorine-free tungsten ALD for dielectric selectivity improvement

Electrophysiology device with electrodes having increased surface area

Method for forming components without adding tabs during etching

Method of processing substrate, method of manufacturing semiconduct...

CVD preparation method for minimizing camera module dot defects and...

Substrate treating system and substrate transporting method

Semiconductor device patterning methods

Quantum printing methods

Display articles with diffractive, antiglare surfaces and thin, dur...

Display articles with antiglare surfaces and thin, durable antirefl...

Method and apparatus for chemical vapour deposition

Substrate processing method and substrate processing apparatus

Patents Applicationslast 30 patents

CARBON MASK DEPOSITION

SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE

METHOD FOR FORMING A MOLYBDENUM SILICIDE LAYER ON A SURFACE OF A SU...

Quantum Printing Nanostructures Within Carbon Nanopores

TEXTURED REGION TO REDUCE SPECULAR REFLECTANCE INCLUDING A LOW REFR...

ELECTROPHYSIOLOGY DEVICE WITH ELECTRODES HAVING INCREASED SURFACE AREA

INTERCONNECT CAPPING WITH INTEGRATED PROCESS STEPS

DEPOSITION SYSTEM WITH INTEGRATED CARRIER CLEANING MODULES

DEPOSITION METHOD

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

FORMING MESAS ON AN ELECTROSTATIC CHUCK

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

SYSTEM AND METHOD FOR CLEANING A PRE-CLEAN PROCESS CHAMBER

SILICON PRECURSOR COMPOUND, SILICON-CONTAINING FILM FORMATION COMPO...

METHOD OF FORMING SURFACE TREATMENT FILM

MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...

Substrate Processing Method, Apparatus, and System

SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES

ARTICLE HAVING WATER- AND OIL-REPELLENT SURFACE LAYER

Molybdenum (0) Precursors For Deposition Of Molybdenum Films

SEGMENTED FORMATION OF GATE INTERFACE

ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...

COMPOSITE FILM APPLIED TO FLEXIBLE SUBSTRATE, PREPARATION METHOD TH...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR DEVICE PATTERNING METHODS

VAPOR PHASE GROWTH METHOD

ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...