TREA

by decomposition of monosilane

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Industry

  • CPC
  • C01B33/029
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Parent Industries

CCHEMISTRY METALLURGY C01Inorganic chemistry C01BNON-METALLIC ELEMENTS COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C C01B33/00Silicon Compounds thereof

Current Industry

C01B33/029by decomposition of monosilane
Industries