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by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
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CPC
C01B33/03
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Parent Industries
C
CHEMISTRY METALLURGY
C01
Inorganic chemistry
C01B
NON-METALLIC ELEMENTS COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
C01B33/00
Silicon Compounds thereof
Current Industry
C01B33/03
by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
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