by etching

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H01L41/332

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L41/00Piezo-electric devices in general Electrostrictive devices in general Magnetostrictive devices in general Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof Details thereof

Current Industry

H01L41/332by etching

Industries

Patents Grantslast 30 patents

Information Patent Grant
Heterostructure and method of fabrication
- Patent number 11,637,542
- Issue date Apr 25, 2023
- Soitec
- Arnaud Castex
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching and encapsulation scheme for magnetic tunnel junction fabri...
- Patent number 11,631,802
- Issue date Apr 18, 2023
- Headway Technologies, Inc.
- Vignesh Sundar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric MEMS devices and methods of forming thereof
- Patent number 11,631,800
- Issue date Apr 18, 2023
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Jia Jie Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric micromachined ultrasound transducer device with piezo...
- Patent number 11,623,246
- Issue date Apr 11, 2023
- Invensense, Inc.
- Emad Mehdizadeh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for producing piezoelectric element, and piezoelectric element
- Patent number 11,623,247
- Issue date Apr 11, 2023
- Konica Minolta, Inc.
- Kazunari Tada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric actuator having a deformation sensor and fabrication...
- Patent number 11,600,765
- Issue date Mar 7, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level ultrasonic chip module and manufacturing method thereof
- Patent number 11,590,536
- Issue date Feb 28, 2023
- Peking University Shenzhen Graduate School
- Yu-Feng Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Heterostructure and method of fabrication
- Patent number 11,595,020
- Issue date Feb 28, 2023
- Soitec
- Arnaud Castex
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonic sensor, ultrasonic device, and method of manufacturing u...
- Patent number 11,590,534
- Issue date Feb 28, 2023
- Seiko Epson Corporation
- Chikara Kojima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of micro fluid actuator
- Patent number 11,581,483
- Issue date Feb 14, 2023
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasound transducer device with multi...
- Patent number 11,577,276
- Issue date Feb 14, 2023
- Invensense, Inc.
- Chienliu Chang
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Piezoelectric poling of a wafer with temporary and permanent electr...
- Patent number 11,563,166
- Issue date Jan 24, 2023
- Invensense, Inc.
- Chienliu Chang
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Fully-wet via patterning method in piezoelectric sensor
- Patent number 11,557,710
- Issue date Jan 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure of single crystal electronic devices with enha...
- Patent number 11,557,716
- Issue date Jan 17, 2023
- AKOUSTIS, INC.
- Shawn R. Gibb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric film, piezoelectric module, and method of manufacturi...
- Patent number 11,529,649
- Issue date Dec 20, 2022
- Seiko Epson Corporation
- Chikara Kojima
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Piezoelectric device and method of forming the same
- Patent number 11,527,701
- Issue date Dec 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device having a titanium-alloyed surface
- Patent number 11,522,518
- Issue date Dec 6, 2022
- Qorvo US, Inc.
- Casey Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric devices fabricated in packaging build-up layers
- Patent number 11,508,898
- Issue date Nov 22, 2022
- Intel Corporation
- Feras Eid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of plasma etching
- Patent number 11,489,106
- Issue date Nov 1, 2022
- SPTS Technologies Limited
- Huma Ashraf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization method
- Patent number 11,482,664
- Issue date Oct 25, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Lieng Loo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device having a titanium-alloyed surface
- Patent number 11,482,986
- Issue date Oct 25, 2022
- Qorvo US, Inc.
- Casey Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bulk-acoustic resonator module
- Patent number 11,476,832
- Issue date Oct 18, 2022
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Seung Wook Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable thickness diaphragm for a wideband robust piezoelectric mi...
- Patent number 11,462,677
- Issue date Oct 4, 2022
- The Regents of the University of California
- Bernhard Boser
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Method for packaging an electronic component in a package with an o...
- Patent number 11,463,063
- Issue date Oct 4, 2022
- ZHUHAI CRYSTAL RESONANCE TECHNOLOGIES CO., LTD.
- Dror Hurwitz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interdigital transducers on a piezoelectric thin-film for signal co...
- Patent number 11,451,209
- Issue date Sep 20, 2022
- The Board of Trustees of the University of Illinois
- Songbin Gong
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Method of manufacturing a stacked piezoelectric transducer, and pie...
- Patent number 11,433,669
- Issue date Sep 6, 2022
- STMicroelectronics S.r.l.
- Davide Assanelli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing a lithium tantalate crystal substrate
- Patent number 11,424,730
- Issue date Aug 23, 2022
- Fujian Jing'An Optoelectronics Co., Ltd.
- Mingxin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS piezoelectric device and corresponding manufacturing process
- Patent number 11,417,827
- Issue date Aug 16, 2022
- STMicroelectronics S.r.l.
- Maria Fortuna Bevilacqua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating a layer obtained by implantation then detachmen...
- Patent number 11,398,595
- Issue date Jul 26, 2022
- Soitec
- Bruno Ghyselen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser devices using a semipolar plane
- Patent number 11,387,630
- Issue date Jul 12, 2022
- KYOCERA SLD Laser, Inc.
- James W. Raring
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OSCILLATOR FREQUENCY MODULATION METHOD AND OSCILLATOR PIEZOELECTRIC...
- Publication number 20230132534
- Publication date May 4, 2023
- National Central University
- Jeng-Rong Ho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Manufacturing Vibration Element
- Publication number 20230127801
- Publication date Apr 27, 2023
- SEIKO EPSON CORPORATION
- Shigeru SHIRAISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method Of Manufacturing Vibration Element
- Publication number 20230102578
- Publication date Mar 30, 2023
- SEIKO EPSON CORPORATION
- Keiichi YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH CANTILEVERED SEPARATION
- Publication number 20230092374
- Publication date Mar 23, 2023
- Skyworks Solutions, Inc.
- You Qian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC DEVICE
- Publication number 20230080949
- Publication date Mar 16, 2023
- Murata Manufacturing Co., Ltd.
- Munehito CHATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20230079756
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYSTAL OSCILLATOR, AND METHOD FOR MAKING THE SAME
- Publication number 20230061409
- Publication date Mar 2, 2023
- National Yang Ming Chiao Tung University
- Ray-Hua HORNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE THICKNESS DIAPHRAGM FOR A WIDEBAND ROBUST PIEZOELECTRIC MI...
- Publication number 20230053609
- Publication date Feb 23, 2023
- The Regents of the University of California
- Bernhard Boser
- G10 - MUSICAL INSTRUMENTS ACOUSTICS
Information Patent Application
METHOD FOR MANUFACTURING VIBRATOR DEVICE
- Publication number 20230020694
- Publication date Jan 19, 2023
- SEIKO EPSON CORPORATION
- Hiyori Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROPUMP AND METHOD OF FABRICATING THE SAME
- Publication number 20230006127
- Publication date Jan 5, 2023
- AITA BIO INC.
- Jacob Menture
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FULLY-WET VIA PATTERNING METHOD IN PIEZOELECTRIC SENSOR
- Publication number 20220367784
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Site-Selective Piezoelectric-Layer Trimming
- Publication number 20220311409
- Publication date Sep 29, 2022
- RF360 EUROPE GMBH
- Philipp Geselbracht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD AND OPTICAL DEFLECTOR
- Publication number 20220308336
- Publication date Sep 29, 2022
- STANLEY ELECTRIC CO., LTD
- Hirofumi CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20220263487
- Publication date Aug 18, 2022
- NIHON DEMPA KOGYO CO., LTD.
- Tetsuya WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS PIEZOELECTRIC DEVICE AND CORRESPONDING MANUFACTURING PROCESS
- Publication number 20220246832
- Publication date Aug 4, 2022
- STMicroelectronics S.r.l
- Maria Fortuna Bevilacqua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Manufacturing Vibration Element
- Publication number 20220246835
- Publication date Aug 4, 2022
- SEIKO EPSON CORPORATION
- Hiyori SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Acoustic Transducer with Gap-Controlling Geometry and Method of Man...
- Publication number 20220248145
- Publication date Aug 4, 2022
- Vesper Technologies Inc.
- Karl Grosh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220209095
- Publication date Jun 30, 2022
- Murata Manufacturing Co., Ltd.
- Shinsuke IKEUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC ELEMENT
- Publication number 20220209098
- Publication date Jun 30, 2022
- Murata Manufacturing Co., Ltd.
- Yutaka KISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC ELEMENT AND METHOD FOR PRODUCING THE SAME
- Publication number 20220199891
- Publication date Jun 23, 2022
- Murata Manufacturing Co., Ltd.
- Masayuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY MODULE AND FABRICATION METHOD THEREOF, AND DISPLAY DEVICE
- Publication number 20220157901
- Publication date May 19, 2022
- BOE TECHNOLOGY GROUP CO., LTD.
- Yuju CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD FOR FORMING VERTICAL STRUCTURE, ELECTRONIC DEVICE IN...
- Publication number 20220158074
- Publication date May 19, 2022
- Samsung Electronics Co., Ltd.
- Choongho RHEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD FOR PIEZOELECTRIC CERAMIC CHIP, PIEZOELECTRIC...
- Publication number 20220158079
- Publication date May 19, 2022
- BOE TECHNOLOGY GROUP CO., LTD.
- Yuju CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC ACTUA...
- Publication number 20220093846
- Publication date Mar 24, 2022
- SEIKO EPSON CORPORATION
- Noboru FURUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC TRANSDUCER ELECTRONIC COMPONENT AND METHOD OF FORMING ELECT...
- Publication number 20220077381
- Publication date Mar 10, 2022
- Korea Electronics Technology Institute
- Myong Jae YOO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DUAL LAYER ULTRASONIC TRANSDUCER FABRICATION PROCESS
- Publication number 20220040735
- Publication date Feb 10, 2022
- TDK Corporation
- Chienliu CHANG
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
PIEZOELECTRIC DEVICE
- Publication number 20220045262
- Publication date Feb 10, 2022
- Murata Manufacturing Co., Ltd.
- Yutaka KISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING OF ORGANIC FILM BY WET ETCHING PROCESS
- Publication number 20210399206
- Publication date Dec 23, 2021
- QUALCOMM Incorporated
- Shaojui Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PIEZOELECTRIC ELEMENT FOR SPEAKER AND MANUFACTURING METHOD THEREFOR
- Publication number 20210376220
- Publication date Dec 2, 2021
- Samsung Electronics Co., Ltd.
- Jisun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY MULTI-POLED THIN FILM PIEZOELECTRIC DEVICES AND METHOD...
- Publication number 20210359192
- Publication date Nov 18, 2021
- eXo Imaging, Inc.
- Brian BIRCUMSHAW
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heterostructure and method of fabrication

Etching and encapsulation scheme for magnetic tunnel junction fabri...

Piezoelectric MEMS devices and methods of forming thereof

Piezoelectric micromachined ultrasound transducer device with piezo...

Method for producing piezoelectric element, and piezoelectric element

Piezoelectric actuator having a deformation sensor and fabrication...

Wafer level ultrasonic chip module and manufacturing method thereof

Heterostructure and method of fabrication

Ultrasonic sensor, ultrasonic device, and method of manufacturing u...

Manufacturing method of micro fluid actuator

Piezoelectric micromachined ultrasound transducer device with multi...

Piezoelectric poling of a wafer with temporary and permanent electr...

Fully-wet via patterning method in piezoelectric sensor

Method and structure of single crystal electronic devices with enha...

Piezoelectric film, piezoelectric module, and method of manufacturi...

Piezoelectric device and method of forming the same

Device having a titanium-alloyed surface

Piezoelectric devices fabricated in packaging build-up layers

Method of plasma etching

Planarization method

Device having a titanium-alloyed surface

Bulk-acoustic resonator module

Variable thickness diaphragm for a wideband robust piezoelectric mi...

Method for packaging an electronic component in a package with an o...

Interdigital transducers on a piezoelectric thin-film for signal co...

Method of manufacturing a stacked piezoelectric transducer, and pie...

Method for processing a lithium tantalate crystal substrate

MEMS piezoelectric device and corresponding manufacturing process

Method for treating a layer obtained by implantation then detachmen...

Laser devices using a semipolar plane

Patents Applicationslast 30 patents

OSCILLATOR FREQUENCY MODULATION METHOD AND OSCILLATOR PIEZOELECTRIC...

Method For Manufacturing Vibration Element

Method Of Manufacturing Vibration Element

PIEZOELECTRIC MEMS MICROPHONE WITH CANTILEVERED SEPARATION

PIEZOELECTRIC DEVICE

PIEZOELECTRIC DEVICE AND METHOD OF FORMING THE SAME

CRYSTAL OSCILLATOR, AND METHOD FOR MAKING THE SAME

VARIABLE THICKNESS DIAPHRAGM FOR A WIDEBAND ROBUST PIEZOELECTRIC MI...

METHOD FOR MANUFACTURING VIBRATOR DEVICE

MICROPUMP AND METHOD OF FABRICATING THE SAME

FULLY-WET VIA PATTERNING METHOD IN PIEZOELECTRIC SENSOR

Site-Selective Piezoelectric-Layer Trimming

MANUFACTURING METHOD AND OPTICAL DEFLECTOR

PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD OF THE SAME

MEMS PIEZOELECTRIC DEVICE AND CORRESPONDING MANUFACTURING PROCESS

Method For Manufacturing Vibration Element

Acoustic Transducer with Gap-Controlling Geometry and Method of Man...

PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

PIEZOELECTRIC ELEMENT

PIEZOELECTRIC ELEMENT AND METHOD FOR PRODUCING THE SAME

DISPLAY MODULE AND FABRICATION METHOD THEREOF, AND DISPLAY DEVICE

ETCHING METHOD FOR FORMING VERTICAL STRUCTURE, ELECTRONIC DEVICE IN...

MANUFACTURING METHOD FOR PIEZOELECTRIC CERAMIC CHIP, PIEZOELECTRIC...

METHOD OF MANUFACTURING PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC ACTUA...

CERAMIC TRANSDUCER ELECTRONIC COMPONENT AND METHOD OF FORMING ELECT...

DUAL LAYER ULTRASONIC TRANSDUCER FABRICATION PROCESS

PIEZOELECTRIC DEVICE

PATTERNING OF ORGANIC FILM BY WET ETCHING PROCESS

PIEZOELECTRIC ELEMENT FOR SPEAKER AND MANUFACTURING METHOD THEREFOR

HIGH DENSITY MULTI-POLED THIN FILM PIEZOELECTRIC DEVICES AND METHOD...