by gas discharge of a gas laser

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H01S3/097

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HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/097by gas discharge of a gas laser

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Light emitting sealed body and light source device
- Patent number 12,191,623
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Akio Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
- Patent number 12,166,329
- Issue date Dec 10, 2024
- National University Corporation Nagaoka University of Technology
- Weihua Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical path system for detecting vacuum degree of vacuum switch an...
- Patent number 12,112,907
- Issue date Oct 8, 2024
- Xi'an Jiaotong University
- Xiaohua Wang
- G01 - MEASURING TESTING
Information Patent Grant
Gas monitoring system
- Patent number 11,988,966
- Issue date May 21, 2024
- Cymer, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Folded slab laser
- Patent number 11,942,753
- Issue date Mar 26, 2024
- Kern Technologies, LLC.
- Paul E Jackson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency laser
- Patent number 11,909,163
- Issue date Feb 20, 2024
- Jilin Yongli Laser Technology Co., Ltd.
- Yang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical pulse compression circuit
- Patent number 11,901,903
- Issue date Feb 13, 2024
- PLEX Corporation
- Malcolm W. McGeoch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting sealed body and light source device
- Patent number 11,862,922
- Issue date Jan 2, 2024
- ENERGETIQ TECHNOLOGY, INC.
- Akio Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fast intensity stabilization of multiple controller beams with cont...
- Patent number 11,855,407
- Issue date Dec 26, 2023
- IONQ, INC.
- Jonathan Albert Mizrahi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio-frequency excited gas laser
- Patent number 11,848,530
- Issue date Dec 19, 2023
- Coherent, Inc.
- Leon A. Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical element for a deep ultraviolet light source
- Patent number 11,784,452
- Issue date Oct 10, 2023
- Cymer, LLC
- Saptaparna Das
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser radiation system and method for manufacturing electronic device
- Patent number 11,768,362
- Issue date Sep 26, 2023
- Gigaphoton Inc.
- Akiyoshi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system, learning device, and inference device
- Patent number 11,734,810
- Issue date Aug 22, 2023
- Mitsubishi Electric Corporation
- Takuya Kawashima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for predicting performance of a measurement m...
- Patent number 11,626,704
- Issue date Apr 11, 2023
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact coaxial laser
- Patent number 11,545,807
- Issue date Jan 3, 2023
- IDEA MACHINE DEVELOPMENT DESIGN AND PRODUCTION LTD.
- Shlomo Turgeman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and laser processing system
- Patent number 11,469,568
- Issue date Oct 11, 2022
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting unit and light source device
- Patent number 11,367,989
- Issue date Jun 21, 2022
- Hamamatsu Photonics K.K.
- Akio Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for tuning discharge performance in a laser chamber
- Patent number 11,349,273
- Issue date May 31, 2022
- Cymer, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dental laser system and treatment method
- Patent number 11,291,523
- Issue date Apr 5, 2022
- Convergent Dental, Inc.
- Nathan P. Monty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control device and control method for controlling laser oscillator
- Patent number 11,289,874
- Issue date Mar 29, 2022
- FANUC CORPORATION
- Satoshi Kagiwada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus and method for manufacturing electronic device
- Patent number 11,271,361
- Issue date Mar 8, 2022
- Gigaphoton Inc.
- Keisuke Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for generating a high power energy beam based...
- Patent number 11,271,355
- Issue date Mar 8, 2022
- The Boeing Company
- Mark Joseph Clemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser source device, extreme ultraviolet lithography device and method
- Patent number 11,158,989
- Issue date Oct 26, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Henry Yee-Shian Tong
- G01 - MEASURING TESTING
Information Patent Grant
Multi-pass coaxial molecular gas laser
- Patent number 11,095,088
- Issue date Aug 17, 2021
- ZOYKA LLC
- Alexander V. Krasnov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser crystallization device
- Patent number 11,087,980
- Issue date Aug 10, 2021
- Samsung Display Co., Ltd.
- Byung Soo So
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor cooling structure and laser apparatus
- Patent number 11,050,210
- Issue date Jun 29, 2021
- Gigaphoton Inc.
- Hisakazu Katsuumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Online calibration for repetition rate dependent performance variables
- Patent number 11,050,213
- Issue date Jun 29, 2021
- Cymer, LLC
- Joshua Jon Thornes
- G01 - MEASURING TESTING
Information Patent Grant
Radio frequency slab laser
- Patent number 11,011,883
- Issue date May 18, 2021
- Kern Technologies, LLC.
- Gerald L. Kern
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser device and extreme ultraviolet light generation device using...
- Patent number 11,006,511
- Issue date May 11, 2021
- Gigaphoton Inc.
- Motoki Niwano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for real time averaging of beam parameter vari...
- Patent number 10,992,098
- Issue date Apr 27, 2021
- Epilog Corporation
- Jeffery A Broderick
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240405501
- Publication date Dec 5, 2024
- Gigaphoton Inc.
- Youichi YAMANOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240396284
- Publication date Nov 28, 2024
- Gigaphoton Inc.
- Takeshi UEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Absorbing Optical Switch for High Fluence Laser Pulse
- Publication number 20240396281
- Publication date Nov 28, 2024
- Innoven Energy LLC
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
- Publication number 20240283210
- Publication date Aug 22, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...
- Publication number 20240222927
- Publication date Jul 4, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND EL...
- Publication number 20240154381
- Publication date May 9, 2024
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING SEALED BODY AND LIGHT SOURCE DEVICE
- Publication number 20240097394
- Publication date Mar 21, 2024
- HAMAMATSU PHOTONICS K. K.
- Akio SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST INTENSITY STABILIZATION OF MULTIPLE CONTROLLER BEAMS WITH CONT...
- Publication number 20240079845
- Publication date Mar 7, 2024
- IonQ, Inc.
- Jonathan Albert MIZRAHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED POWER CIRCUITS USING HYBRID NON-LINEAR MAGNETIC MATERIALS AN...
- Publication number 20240039234
- Publication date Feb 1, 2024
- CYMER, LLC
- Yuda Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230268710
- Publication date Aug 24, 2023
- Gigaphoton Inc.
- Youichi YAMANOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM, LEARNING DEVICE, AND INFERENCE DEVICE
- Publication number 20230196538
- Publication date Jun 22, 2023
- Mitsubishi Electric Corporation
- Takuya KAWASHIMA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL PATH SYSTEM FOR DETECTING VACUUM DEGREE OF VACUUM SWITCH AN...
- Publication number 20230178316
- Publication date Jun 8, 2023
- XI'AN JIAOTONG UNIVERSITY
- Xiaohua WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRICAL PULSE COMPRESSION CIRCUIT
- Publication number 20230170886
- Publication date Jun 1, 2023
- PLEX Corporation
- Malcolm W. McGeoch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radio Frequency Slab Laser
- Publication number 20230170663
- Publication date Jun 1, 2023
- KERN TECHNOLOGIES, LLC
- Keith L WEIHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20230155343
- Publication date May 18, 2023
- Gigaphoton Inc.
- Junichi FUJIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...
- Publication number 20230017337
- Publication date Jan 19, 2023
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH
- Publication number 20220231474
- Publication date Jul 21, 2022
- CYMER, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING UNIT AND LIGHT SOURCE DEVICE
- Publication number 20220200226
- Publication date Jun 23, 2022
- HAMAMATSU PHOTONICS K. K.
- Akio SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH VOLTAGE PULSE GENERATION DEVICE, GAS LASER APPARATUS, AND ELEC...
- Publication number 20210367393
- Publication date Nov 25, 2021
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE PULSE GENERATOR, GAS LASER APPARATUS, AND METHOD FOR M...
- Publication number 20210367394
- Publication date Nov 25, 2021
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO-FREQUENCY EXCITED GAS LASER
- Publication number 20210242650
- Publication date Aug 5, 2021
- COHERENT, INC.
- Leon A. NEWMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MONITORING SYSTEM
- Publication number 20210226407
- Publication date Jul 22, 2021
- CYMER, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE
- Publication number 20210194202
- Publication date Jun 24, 2021
- CYMER, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE
- Publication number 20210167568
- Publication date Jun 3, 2021
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT COAXIAL LASER
- Publication number 20210119399
- Publication date Apr 22, 2021
- IDEA MACHINE DEVELOPMENT DESIGN & PRODUCTION LTD.
- Shlomo TURGEMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN A LASER CHAMBER
- Publication number 20210066880
- Publication date Mar 4, 2021
- CYMER, LLC
- Edward Siqi Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FAST INTENSITY STABILIZATION OF MULTIPLE CONTROLLER BEAMS WITH CONT...
- Publication number 20210057872
- Publication date Feb 25, 2021
- IonQ, Inc.
- Jonathan Albert MIZRAHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Folded Slab Laser
- Publication number 20210006031
- Publication date Jan 7, 2021
- KERN TECHNOLOGIES, LLC
- Paul E. Jackson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...
- Publication number 20200388980
- Publication date Dec 10, 2020
- Mitsubishi Electric Corporation
- Tomohiro KYOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER GAS MANAGEMENT SYSTEM, METHOD FOR MANUFACTURING ELECTRONIC DE...
- Publication number 20200366049
- Publication date Nov 19, 2020
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS

by gas discharge of a gas laser

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Light emitting sealed body and light source device

High voltage pulse generation device, gas laser apparatus, and elec...

Optical path system for detecting vacuum degree of vacuum switch an...

Gas monitoring system

Folded slab laser

Radio frequency laser

Electrical pulse compression circuit

Light emitting sealed body and light source device

Fast intensity stabilization of multiple controller beams with cont...

Radio-frequency excited gas laser

Optical element for a deep ultraviolet light source

Laser radiation system and method for manufacturing electronic device

Laser system, learning device, and inference device

Methods and apparatus for predicting performance of a measurement m...

Compact coaxial laser

Laser apparatus and laser processing system

Light emitting unit and light source device

Apparatus for tuning discharge performance in a laser chamber

Dental laser system and treatment method

Control device and control method for controlling laser oscillator

Excimer laser apparatus and method for manufacturing electronic device

Apparatus and method for generating a high power energy beam based...

Laser source device, extreme ultraviolet lithography device and method

Multi-pass coaxial molecular gas laser

Laser crystallization device

Capacitor cooling structure and laser apparatus

Online calibration for repetition rate dependent performance variables

Radio frequency slab laser

Laser device and extreme ultraviolet light generation device using...

Method and apparatus for real time averaging of beam parameter vari...

Patents Applicationslast 30 patents

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

Absorbing Optical Switch for High Fluence Laser Pulse

PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET

ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...

GAS LASER APPARATUS, GAS LASER APPARATUS MAINTENANCE METHOD, AND EL...

LIGHT EMITTING SEALED BODY AND LIGHT SOURCE DEVICE

FAST INTENSITY STABILIZATION OF MULTIPLE CONTROLLER BEAMS WITH CONT...

PULSED POWER CIRCUITS USING HYBRID NON-LINEAR MAGNETIC MATERIALS AN...

GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER SYSTEM, LEARNING DEVICE, AND INFERENCE DEVICE

OPTICAL PATH SYSTEM FOR DETECTING VACUUM DEGREE OF VACUUM SWITCH AN...

ELECTRICAL PULSE COMPRESSION CIRCUIT

Radio Frequency Slab Laser

LASER APPARATUS, WAVELENGTH CONTROL METHOD, AND ELECTRONIC DEVICE M...

DUAL PULSED POWER SYSTEM WITH INDEPENDENT VOLTAGE AND TIMING CONTRO...

APPARATUS FOR AND METHOD OF MODULATING A LIGHT SOURCE WAVELENGTH

LIGHT EMITTING UNIT AND LIGHT SOURCE DEVICE

HIGH VOLTAGE PULSE GENERATION DEVICE, GAS LASER APPARATUS, AND ELEC...

HIGH-VOLTAGE PULSE GENERATOR, GAS LASER APPARATUS, AND METHOD FOR M...

RADIO-FREQUENCY EXCITED GAS LASER

GAS MONITORING SYSTEM

METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE

GAS LASER DEVICE

COMPACT COAXIAL LASER

APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN A LASER CHAMBER

FAST INTENSITY STABILIZATION OF MULTIPLE CONTROLLER BEAMS WITH CONT...

Folded Slab Laser

LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...

LASER GAS MANAGEMENT SYSTEM, METHOD FOR MANUFACTURING ELECTRONIC DE...