by in situ generation of reactive gas by chemical or electrochemical reaction

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CPC
C23C16/4488

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4488by in situ generation of reactive gas by chemical or electrochemical reaction

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for manufacturing hexagonal silicon crystal
- Patent number 12,054,849
- Issue date Aug 6, 2024
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming RuSi film and substrate processing system
- Patent number 11,981,992
- Issue date May 14, 2024
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growing beta-Ga2O3-based single crystal film, and crysta...
- Patent number 11,982,016
- Issue date May 14, 2024
- Tamura Corporation
- Ken Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,913,112
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...
- Patent number 11,884,689
- Issue date Jan 30, 2024
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for applying a carbon layer to a substrate comprising introd...
- Patent number 11,746,415
- Issue date Sep 5, 2023
- CARBONCOMPETENCE GMBH
- Doris Steinmuller-Nethl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for thin film deposition through controlled formation of va...
- Patent number 11,634,811
- Issue date Apr 25, 2023
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming coating layer of which composition can be controlled
- Patent number 11,618,948
- Issue date Apr 4, 2023
- Soon Young Kwon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor-liquid reaction device, reaction tube, film forming apparatus
- Patent number 11,499,247
- Issue date Nov 15, 2022
- National University Corporation Tokyo University of Agriculture and Technology
- Akinori Koukitu
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Chemical dispensing apparatus and methods for dispensing a chemical...
- Patent number 11,387,120
- Issue date Jul 12, 2022
- ASM IP Holding B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorine-free tungsten deposition process employing in-situ oxidati...
- Patent number 11,377,733
- Issue date Jul 5, 2022
- SanDisk Technologies LLC
- Fei Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing chalcogenide thin films
- Patent number 11,377,735
- Issue date Jul 5, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Remy Gassilloud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing GaN crystal
- Patent number 11,371,140
- Issue date Jun 28, 2022
- Mitsubishi Chemical Corporation
- Kenji Iso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,268,190
- Issue date Mar 8, 2022
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer structure incorporating a mat of carbon nanotubes as dif...
- Patent number 11,271,220
- Issue date Mar 8, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Arnaud Morin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for thin film deposition through controlled formation of va...
- Patent number 11,248,291
- Issue date Feb 15, 2022
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming iron nitride hard magnetic materials using chemical vapor d...
- Patent number 11,214,862
- Issue date Jan 4, 2022
- Regents of The University of Minnesota
- Jian-Ping Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for preparing polycrystalline group III metal nit...
- Patent number 11,047,041
- Issue date Jun 29, 2021
- SLT TECHNOLOGIES, INC.
- Douglas W. Pocius
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing GaN crystal
- Patent number 10,961,619
- Issue date Mar 30, 2021
- Mitsubishi Chemical Corporation
- Kenji Iso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and deposition method
- Patent number 10,679,858
- Issue date Jun 9, 2020
- Samsung Display Co., Ltd.
- Dong Kyun Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical dispensing apparatus and methods for dispensing a chemical...
- Patent number 10,658,205
- Issue date May 19, 2020
- ASM IP Holdings B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for preparing polycrystalline group III metal nit...
- Patent number 10,619,239
- Issue date Apr 14, 2020
- SLT TECHNOLOGIES, INC.
- Douglas W. Pocius
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming thin film
- Patent number 10,612,142
- Issue date Apr 7, 2020
- KIRIN BEER KABUSHIKI KAISHA
- Hiroyuki Ooshima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming iron nitride hard magnetic materials using chemical vapor d...
- Patent number 10,358,716
- Issue date Jul 23, 2019
- Regents of The University of Minnesota
- Jian-Ping Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chain component and chain
- Patent number 10,260,596
- Issue date Apr 16, 2019
- Tsubakimoto Chain Co.
- Kazuyuki Ebinuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat-resistant composite material production method and production...
- Patent number 10,221,104
- Issue date Mar 5, 2019
- IHI Corporation
- Takeshi Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filament temperature derivation in hotwire semiconductor process
- Patent number 10,209,136
- Issue date Feb 19, 2019
- Applied Materials, Inc.
- Paul Steffas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Localized atmospheric laser chemical vapor deposition
- Patent number 10,208,377
- Issue date Feb 19, 2019
- Lawrence Livermore National Security, LLC
- Manyalibo Joseph Matthews
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic material including α″-Fe16(NxZ1-x)2 or a mixture of α″-Fe1...
- Patent number 10,072,356
- Issue date Sep 11, 2018
- Regents of The University of Minnesota
- Jian-Ping Wang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for producing group III nitride crystal, group III nitride c...
- Patent number 10,026,612
- Issue date Jul 17, 2018
- Osaka University
- Yusuke Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20240191346
- Publication date Jun 13, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...
- Publication number 20240182499
- Publication date Jun 6, 2024
- VERSUM MATERIALS US, LLC
- ROBERT GORDON RIDGEWAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatuses for Fabricating Polymeric Conformal Coating...
- Publication number 20240042481
- Publication date Feb 8, 2024
- UCL Business LTD
- Paul Beard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING A COMPONENT
- Publication number 20220389572
- Publication date Dec 8, 2022
- WIELAND-WERKE AG
- Jan SZABO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING COATING LAYER OF WHICH COMPOSITION CAN BE CONTROLLED
- Publication number 20220349055
- Publication date Nov 3, 2022
- Soon Young KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL SILICON CRYSTAL
- Publication number 20220251727
- Publication date Aug 11, 2022
- Hyung Soo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION PROCESS USING ADDITIONAL CHLORIDE-BASED PRECURSORS
- Publication number 20220205085
- Publication date Jun 30, 2022
- Aledia
- Olga Kryliouk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing N-doped carbon nanomesh
- Publication number 20220195593
- Publication date Jun 23, 2022
- Jozef Stefan Institute
- Miran MOZETIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20220154331
- Publication date May 19, 2022
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...
- Publication number 20220119940
- Publication date Apr 21, 2022
- Gelest, Inc.
- Barry C. ARKLES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORINE-FREE TUNGSTEN DEPOSITION PROCESS EMPLOYING IN-SITU OXIDATI...
- Publication number 20220042171
- Publication date Feb 10, 2022
- SANDISK TECHNOLOGIES LLC
- Fei ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR GROWING BETA-GA2O3-BASED SINGLE CRYSTAL FILM, AND CRYSTA...
- Publication number 20210404086
- Publication date Dec 30, 2021
- TAMURA CORPORATION
- Ken GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT FILAMENT CVD DEVICE
- Publication number 20210348269
- Publication date Nov 11, 2021
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Tetsuya TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOT FILAMENT CVD DEVICE
- Publication number 20210324520
- Publication date Oct 21, 2021
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Tetsuya TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PRODUCING STRUCTURED CARBON MATERIALS IN A...
- Publication number 20210310117
- Publication date Oct 7, 2021
- Cemvita Factory, Inc.
- Tahereh Karimi
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD FOR PRODUCING GaN CRYSTAL
- Publication number 20210172061
- Publication date Jun 10, 2021
- MITSUBISHI CHEMICAL CORPORATION
- Kenji ISO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...
- Publication number 20210140036
- Publication date May 13, 2021
- Gelest Technologies, Inc.
- Barry C. ARKLES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRACKING DEVICE AND DEPOSITION APPARATUS INCLUDING THE SAME
- Publication number 20210054505
- Publication date Feb 25, 2021
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Sun Jin YUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING RuSi FILM AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210017642
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...
- Publication number 20200354386
- Publication date Nov 12, 2020
- VERSUM MATERIALS US, LLC
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PREPARING POLYCRYSTALLINE GROUP III METAL NIT...
- Publication number 20200283892
- Publication date Sep 10, 2020
- SLT TECHNOLOGIES, INC.
- Douglas W. POCIUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL DISPENSING APPARATUS AND METHODS FOR DISPENSING A CHEMICAL...
- Publication number 20200279758
- Publication date Sep 3, 2020
- ASM IP HOLDING B.V.
- Varun Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vapor-Liquid Reaction Device, Reaction Tube, Film Forming Apparatus
- Publication number 20200071848
- Publication date Mar 5, 2020
- NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY
- Akinori Koukitu
- C01 - INORGANIC CHEMISTRY
Information Patent Application
HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...
- Publication number 20200032389
- Publication date Jan 30, 2020
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20190326122
- Publication date Oct 24, 2019
- SAMSUNG DISPLAY CO., LTD.
- Dong Kyun KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING IRON NITRIDE HARD MAGNETIC MATERIALS USING CHEMICAL VAPOR D...
- Publication number 20190316253
- Publication date Oct 17, 2019
- Regents of the University of Minnesota
- Jian-Ping Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE IN-SITU CLEANING METHOD FOR EPI-CHAMBERS
- Publication number 20190301011
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Geetika BAJAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR PREPARING POLYCRYSTALLINE GROUP III METAL NIT...
- Publication number 20190161858
- Publication date May 30, 2019
- SLT TECHNOLOGIES, INC.
- Douglas W. POCIUS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING GaN CRYSTAL
- Publication number 20190010605
- Publication date Jan 10, 2019
- MITSUBISHI CHEMICAL CORPORATION
- Kenji ISO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND SYSTEM FOR PREPARING POLYCRYSTALLINE GROUP III METAL NIT...
- Publication number 20180371609
- Publication date Dec 27, 2018
- SLT TECHNOLOGIES, INC.
- Douglas W. POCIUS
- C30 - CRYSTAL GROWTH

by in situ generation of reactive gas by chemical or electrochemical reaction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for manufacturing hexagonal silicon crystal

Method for forming RuSi film and substrate processing system

Method for growing beta-Ga2O3-based single crystal film, and crysta...

Processes for depositing silicon-containing films using halidosilan...

Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...

Method for applying a carbon layer to a substrate comprising introd...

Process for thin film deposition through controlled formation of va...

Method of forming coating layer of which composition can be controlled

Vapor-liquid reaction device, reaction tube, film forming apparatus

Chemical dispensing apparatus and methods for dispensing a chemical...

Fluorine-free tungsten deposition process employing in-situ oxidati...

Apparatus for depositing chalcogenide thin films

Method for producing GaN crystal

Processes for depositing silicon-containing films using halidosilan...

Multilayer structure incorporating a mat of carbon nanotubes as dif...

Process for thin film deposition through controlled formation of va...

Forming iron nitride hard magnetic materials using chemical vapor d...

Method and system for preparing polycrystalline group III metal nit...

Method for producing GaN crystal

Deposition apparatus and deposition method

Chemical dispensing apparatus and methods for dispensing a chemical...

Method and system for preparing polycrystalline group III metal nit...

Apparatus for forming thin film

Forming iron nitride hard magnetic materials using chemical vapor d...

Chain component and chain

Heat-resistant composite material production method and production...

Filament temperature derivation in hotwire semiconductor process

Localized atmospheric laser chemical vapor deposition

Magnetic material including α″-Fe16(NxZ1-x)2 or a mixture of α″-Fe1...

Method for producing group III nitride crystal, group III nitride c...

Patents Applicationslast 30 patents

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...

Methods and Apparatuses for Fabricating Polymeric Conformal Coating...

METHOD FOR COATING A COMPONENT

METHOD OF FORMING COATING LAYER OF WHICH COMPOSITION CAN BE CONTROLLED

APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL SILICON CRYSTAL

DEPOSITION PROCESS USING ADDITIONAL CHLORIDE-BASED PRECURSORS

Method for producing N-doped carbon nanomesh

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...

FLUORINE-FREE TUNGSTEN DEPOSITION PROCESS EMPLOYING IN-SITU OXIDATI...

METHOD FOR GROWING BETA-GA2O3-BASED SINGLE CRYSTAL FILM, AND CRYSTA...

HOT FILAMENT CVD DEVICE

HOT FILAMENT CVD DEVICE

METHODS AND SYSTEMS FOR PRODUCING STRUCTURED CARBON MATERIALS IN A...

METHOD FOR PRODUCING GaN CRYSTAL

PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...

CRACKING DEVICE AND DEPOSITION APPARATUS INCLUDING THE SAME

METHOD FOR FORMING RuSi FILM AND SUBSTRATE PROCESSING SYSTEM

ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...

METHOD AND SYSTEM FOR PREPARING POLYCRYSTALLINE GROUP III METAL NIT...

CHEMICAL DISPENSING APPARATUS AND METHODS FOR DISPENSING A CHEMICAL...

Vapor-Liquid Reaction Device, Reaction Tube, Film Forming Apparatus

HALIDOSILANE COMPOUNDS AND COMPOSITIONS AND PROCESSES FOR DEPOSITIN...

DEPOSITION APPARATUS AND DEPOSITION METHOD

FORMING IRON NITRIDE HARD MAGNETIC MATERIALS USING CHEMICAL VAPOR D...

LOW TEMPERATURE IN-SITU CLEANING METHOD FOR EPI-CHAMBERS

METHOD AND SYSTEM FOR PREPARING POLYCRYSTALLINE GROUP III METAL NIT...

METHOD FOR PRODUCING GaN CRYSTAL

METHOD AND SYSTEM FOR PREPARING POLYCRYSTALLINE GROUP III METAL NIT...