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CPC
B08B7/0021
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B08
Cleaning
B08B
CLEANING IN GENERAL PREVENTION OF FOULING IN GENERAL
B08B7/00
Cleaning by methods not provided for in a single other subclass or a single group in this subclass
Current Industry
B08B7/0021
by liquid gases or supercritical fluids
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for treating substrate and method for treating a substrat...
Patent number
12,208,425
Issue date
Jan 28, 2025
Semes Co., Ltd.
Ki-Moon Kang
B08 - CLEANING
Information
Patent Grant
Sterilization validation system and method
Patent number
12,161,775
Issue date
Dec 10, 2024
VESTIS GROUP, INC.
Daniel R. Gensinger
B08 - CLEANING
Information
Patent Grant
Substrate treating apparatus and substrate treating method
Patent number
12,138,670
Issue date
Nov 12, 2024
Semes Co., Ltd.
Junyoung Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate drying device and method of drying substrate using the sa...
Patent number
12,119,240
Issue date
Oct 15, 2024
Samsung Electronics Co., Ltd.
Ansook Sul
B08 - CLEANING
Information
Patent Grant
Method and system for cleaning a process chamber
Patent number
12,087,555
Issue date
Sep 10, 2024
Applied Materials, Inc.
Kalyanjit Ghosh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sealing member and apparatus for treating substrate
Patent number
12,060,942
Issue date
Aug 13, 2024
Semes Co., Ltd.
Seung Hoon Oh
B08 - CLEANING
Information
Patent Grant
Apparatuses for processing a substrate and methods of processing a...
Patent number
12,059,714
Issue date
Aug 13, 2024
Semes Co., Ltd.
Sangmin Lee
B08 - CLEANING
Information
Patent Grant
Apparatus for treating substrate and method for treating substrate
Patent number
12,027,381
Issue date
Jul 2, 2024
Semes Co., Ltd.
Youngseop Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,986,867
Issue date
May 21, 2024
SCREEN Holdings Co., Ltd.
Akira Horikoshi
B08 - CLEANING
Information
Patent Grant
Method and apparatus for removal of microscopic contaminant particu...
Patent number
11,958,089
Issue date
Apr 16, 2024
Jefferson Science Associates, LLC
Rongli Geng
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and apparatus for manufacturing inte...
Patent number
11,887,868
Issue date
Jan 30, 2024
Samsung Electronics Co., Ltd.
Young-hoo Kim
B08 - CLEANING
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,862,491
Issue date
Jan 2, 2024
Semes Co., Ltd.
Dohyeon Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate and method for treating substrate
Patent number
11,842,903
Issue date
Dec 12, 2023
Semes Co., Ltd.
Miso Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatuses for processing a substrate and methods of processing a...
Patent number
11,833,555
Issue date
Dec 5, 2023
Semes Co., Ltd.
Sangmin Lee
B08 - CLEANING
Information
Patent Grant
Fluid supply unit and substrate treating apparatus having the same
Patent number
11,794,220
Issue date
Oct 24, 2023
Semes Co., Ltd.
Inhwang Park
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,715,649
Issue date
Aug 1, 2023
SCREEN Holdings Co., Ltd.
Noritake Sumi
B08 - CLEANING
Information
Patent Grant
Substrate processing device comprising door unit having inclined su...
Patent number
11,701,693
Issue date
Jul 18, 2023
KCTECH CO., LTD.
Hyung Chul Kim
B08 - CLEANING
Information
Patent Grant
Raman sensor for supercritical fluids metrology
Patent number
11,664,283
Issue date
May 30, 2023
Tokyo Electron Limited
Ivan Maleev
B08 - CLEANING
Information
Patent Grant
Method of cleaning a torch of a plasma-coating plant and a plasma-c...
Patent number
11,648,593
Issue date
May 16, 2023
OERLIKON METCO AG, Wohlen
Bernd Distler
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,621,174
Issue date
Apr 4, 2023
SCREEN Holdings Co., Ltd.
Noritake Sumi
B08 - CLEANING
Information
Patent Grant
Method for treating substrate
Patent number
11,621,159
Issue date
Apr 4, 2023
Semes Co., Ltd.
Do Heon Kim
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,594,427
Issue date
Feb 28, 2023
Tokyo Electron Limited
Toru Ihara
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,587,803
Issue date
Feb 21, 2023
SCREEN Holdings Co., Ltd.
Noritake Sumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and control method thereof
Patent number
11,557,492
Issue date
Jan 17, 2023
Tokyo Electron Limited
Satoshi Biwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for cleaning a process chamber
Patent number
11,532,462
Issue date
Dec 20, 2022
Applied Materials, Inc.
Kalyanjit Ghosh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer cleaning apparatus based on light irradiation and wafer clean...
Patent number
11,527,399
Issue date
Dec 13, 2022
Samsung Electronics Co., Ltd.
Byungkwon Cho
B08 - CLEANING
Information
Patent Grant
Method of cleaning substrate processing apparatus, and substrate pr...
Patent number
11,515,142
Issue date
Nov 29, 2022
Tokyo Electron Limited
Shogo Fukui
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,443,938
Issue date
Sep 13, 2022
Semes Co., Ltd.
Boong Kim
B08 - CLEANING
Information
Patent Grant
Drying process for high aspect ratio features
Patent number
11,424,137
Issue date
Aug 23, 2022
Applied Materials, Inc.
Roman Gouk
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,410,865
Issue date
Aug 9, 2022
SCREEN Holdings Co., Ltd.
Hiroyuki Kawahara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20250001467
Publication date
Jan 2, 2025
TES CO., LTD.
In-Il JUNG
B08 - CLEANING
Information
Patent Application
NOZZLE FOR CONVERTING A LIQUID CO2 INTO A DRY ICE
Publication number
20240416483
Publication date
Dec 19, 2024
enotech GmbH
Pascal PESCHKE
B08 - CLEANING
Information
Patent Application
SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
Publication number
20240412984
Publication date
Dec 12, 2024
Samsung Electronics Co., Ltd.
Ansook Sul
B08 - CLEANING
Information
Patent Application
DRYING APPARATUS AND METHOD BASED ON SUPERCRITICAL FLUID
Publication number
20240363370
Publication date
Oct 31, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
Publication number
20240253093
Publication date
Aug 1, 2024
SCREEN Holdings Co., Ltd.
Koji ANDO
B08 - CLEANING
Information
Patent Application
METHOD FOR REMOVAL OF MICROSCOPIC CONTAMINANT PARTICULATES FROM SUP...
Publication number
20240246123
Publication date
Jul 25, 2024
Jefferson Science Associates, LLC
RONGLI GENG
B08 - CLEANING
Information
Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
Publication number
20240222154
Publication date
Jul 4, 2024
SEMES CO., LTD.
Won Sik SON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240173754
Publication date
May 30, 2024
SCREEN Holdings Co., Ltd.
Kei SUZUKI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240170275
Publication date
May 23, 2024
SCREEN Holdings Co., Ltd.
Noritake SUMI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20240162054
Publication date
May 16, 2024
SCREEN Holdings Co., Ltd.
Noritake SUMI
B08 - CLEANING
Information
Patent Application
PROCESSING CHAMBER CLEANING METHOD, CLEANING ATTACHMENT AND SUBSTRA...
Publication number
20240157410
Publication date
May 16, 2024
SCREEN Holdings Co., Ltd.
Noritake SUMI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240162034
Publication date
May 16, 2024
SCREEN Holdings Co., Ltd.
Noritake SUMI
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240149312
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
B08 - CLEANING
Information
Patent Application
APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...
Publication number
20240042497
Publication date
Feb 8, 2024
Semes Co., Ltd.
Sangmin LEE
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD OF ORIFICE INSPECTION AND CARBON DIOXIDE CLEAN...
Publication number
20230366126
Publication date
Nov 16, 2023
Gerald Henrici
B08 - CLEANING
Information
Patent Application
METHOD AND INSTALLATION FOR CLEANING A FILTER MATERIAL
Publication number
20230294146
Publication date
Sep 21, 2023
UNIVERSITE DE BORDEAUX
Cyril AYMONIER
B08 - CLEANING
Information
Patent Application
METHOD FOR COOLING AND/OR SEPARATING ADHESIVELY BONDED COMPONENTS A...
Publication number
20230241651
Publication date
Aug 3, 2023
MYCON GmbH
Michael WIBBEKE
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20230211390
Publication date
Jul 6, 2023
SEMES CO., LTD.
Ki-Moon Kang
B08 - CLEANING
Information
Patent Application
Supercritical Fluid Cleaning for Components in Optical or Electron...
Publication number
20230191461
Publication date
Jun 22, 2023
KLA Corporation
Jiulong Sun
B08 - CLEANING
Information
Patent Application
SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
Publication number
20230187231
Publication date
Jun 15, 2023
Samsung Electronics Co., Ltd.
Ansook Sul
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RAMAN SENSOR FOR SUPERCRITICAL FLUIDS METROLOGY
Publication number
20230055423
Publication date
Feb 23, 2023
TOKYO ELECTRON LIMITED
Ivan MALEEV
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING DEVICE COMPRISING DOOR UNIT HAVING INCLINED SU...
Publication number
20230001462
Publication date
Jan 5, 2023
KCTECH CO., LTD.
Hyung Chul KIM
B08 - CLEANING
Information
Patent Application
APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...
Publication number
20220362817
Publication date
Nov 17, 2022
SEMES CO., LTD.
Sangmin LEE
B08 - CLEANING
Information
Patent Application
METHOD FOR SEPARATING ADHESIVES
Publication number
20220306917
Publication date
Sep 29, 2022
Evonik Operations GmbH
Nicolai Kolb
B08 - CLEANING
Information
Patent Application
Sterilization Validation System and Method
Publication number
20220296759
Publication date
Sep 22, 2022
Aramark Uniform & Career Apparel Group, Inc.
Daniel R. Gensinger
D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information
Patent Application
SEALING MEMBER AND APPARATUS FOR TREATING SUBSTRATE
Publication number
20220178446
Publication date
Jun 9, 2022
SEMES CO., LTD.
SEUNG HOON OH
B08 - CLEANING
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20220172966
Publication date
Jun 2, 2022
SEMES CO., LTD.
JUN YOUNG CHOI
B08 - CLEANING
Information
Patent Application
DEVICE FOR GENERATING A CO2 SNOW JET
Publication number
20220168762
Publication date
Jun 2, 2022
ACP SYSTEMS AG
Felix JÄGER
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20220020609
Publication date
Jan 20, 2022
SEMES CO., LTD.
Miso PARK
B08 - CLEANING
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20220008964
Publication date
Jan 13, 2022
SEMES CO., LTD.
JUNYOUNG CHOI
B08 - CLEANING