by liquid gases or supercritical fluids

Industry

CPC
B08B7/0021

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B08Cleaning B08BCLEANING IN GENERAL PREVENTION OF FOULING IN GENERAL B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Current Industry

B08B7/0021by liquid gases or supercritical fluids

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,986,867
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Akira Horikoshi
- B08 - CLEANING
Information Patent Grant
Method and apparatus for removal of microscopic contaminant particu...
- Patent number 11,958,089
- Issue date Apr 16, 2024
- Jefferson Science Associates, LLC
- Rongli Geng
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and apparatus for manufacturing inte...
- Patent number 11,887,868
- Issue date Jan 30, 2024
- Samsung Electronics Co., Ltd.
- Young-hoo Kim
- B08 - CLEANING
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,862,491
- Issue date Jan 2, 2024
- Semes Co., Ltd.
- Dohyeon Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate and method for treating substrate
- Patent number 11,842,903
- Issue date Dec 12, 2023
- Semes Co., Ltd.
- Miso Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for processing a substrate and methods of processing a...
- Patent number 11,833,555
- Issue date Dec 5, 2023
- Semes Co., Ltd.
- Sangmin Lee
- B08 - CLEANING
Information Patent Grant
Fluid supply unit and substrate treating apparatus having the same
- Patent number 11,794,220
- Issue date Oct 24, 2023
- Semes Co., Ltd.
- Inhwang Park
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,715,649
- Issue date Aug 1, 2023
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- B08 - CLEANING
Information Patent Grant
Substrate processing device comprising door unit having inclined su...
- Patent number 11,701,693
- Issue date Jul 18, 2023
- KCTECH CO., LTD.
- Hyung Chul Kim
- B08 - CLEANING
Information Patent Grant
Raman sensor for supercritical fluids metrology
- Patent number 11,664,283
- Issue date May 30, 2023
- Tokyo Electron Limited
- Ivan Maleev
- B08 - CLEANING
Information Patent Grant
Method of cleaning a torch of a plasma-coating plant and a plasma-c...
- Patent number 11,648,593
- Issue date May 16, 2023
- OERLIKON METCO AG, Wohlen
- Bernd Distler
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,621,174
- Issue date Apr 4, 2023
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- B08 - CLEANING
Information Patent Grant
Method for treating substrate
- Patent number 11,621,159
- Issue date Apr 4, 2023
- Semes Co., Ltd.
- Do Heon Kim
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,594,427
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Toru Ihara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,587,803
- Issue date Feb 21, 2023
- SCREEN Holdings Co., Ltd.
- Noritake Sumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and control method thereof
- Patent number 11,557,492
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Satoshi Biwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for cleaning a process chamber
- Patent number 11,532,462
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Kalyanjit Ghosh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wafer cleaning apparatus based on light irradiation and wafer clean...
- Patent number 11,527,399
- Issue date Dec 13, 2022
- Samsung Electronics Co., Ltd.
- Byungkwon Cho
- B08 - CLEANING
Information Patent Grant
Method of cleaning substrate processing apparatus, and substrate pr...
- Patent number 11,515,142
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,443,938
- Issue date Sep 13, 2022
- Semes Co., Ltd.
- Boong Kim
- B08 - CLEANING
Information Patent Grant
Drying process for high aspect ratio features
- Patent number 11,424,137
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Roman Gouk
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,410,865
- Issue date Aug 9, 2022
- SCREEN Holdings Co., Ltd.
- Hiroyuki Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing system incl...
- Patent number 11,361,960
- Issue date Jun 14, 2022
- Semes Co., Ltd.
- Won-Ho Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning semiconductor wafers
- Patent number 11,342,204
- Issue date May 24, 2022
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Chang-Hyeon Nam
- B08 - CLEANING
Information Patent Grant
Soot blower and method of cleaning tubular heat exchanger by using...
- Patent number 11,262,146
- Issue date Mar 1, 2022
- GEESCO CO., LTD.
- Sung-Ho Hong
- B08 - CLEANING
Information Patent Grant
Method of processing semiconductor device
- Patent number 11,239,071
- Issue date Feb 1, 2022
- NANYA TECHNOLOGY CORPORATION
- Jen-I Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,189,481
- Issue date Nov 30, 2021
- Tokyo Electron Limited
- Tomohiro Kaneko
- B08 - CLEANING
Information Patent Grant
Method and apparatus for removing a fouling substance from a pressu...
- Patent number 11,173,525
- Issue date Nov 16, 2021
- Renmatix, Inc.
- Daniel Clay Floyd
- B08 - CLEANING
Information Patent Grant
Contamination removal apparatus and method
- Patent number 11,135,626
- Issue date Oct 5, 2021
- Bruker Nano, Inc.
- Gordon Scott Swanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Turbine blade internal hot corrosion oxide cleaning
- Patent number 11,136,674
- Issue date Oct 5, 2021
- Raytheon Technologies Corporation
- Zhongfen Ding
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240173754
- Publication date May 30, 2024
- SCREEN Holdings Co., Ltd.
- Kei SUZUKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240170275
- Publication date May 23, 2024
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240162054
- Publication date May 16, 2024
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- B08 - CLEANING
Information Patent Application
PROCESSING CHAMBER CLEANING METHOD, CLEANING ATTACHMENT AND SUBSTRA...
- Publication number 20240157410
- Publication date May 16, 2024
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240162034
- Publication date May 16, 2024
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240149312
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- B08 - CLEANING
Information Patent Application
APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...
- Publication number 20240042497
- Publication date Feb 8, 2024
- Semes Co., Ltd.
- Sangmin LEE
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD OF ORIFICE INSPECTION AND CARBON DIOXIDE CLEAN...
- Publication number 20230366126
- Publication date Nov 16, 2023
- Gerald Henrici
- B08 - CLEANING
Information Patent Application
METHOD AND INSTALLATION FOR CLEANING A FILTER MATERIAL
- Publication number 20230294146
- Publication date Sep 21, 2023
- UNIVERSITE DE BORDEAUX
- Cyril AYMONIER
- B08 - CLEANING
Information Patent Application
METHOD FOR COOLING AND/OR SEPARATING ADHESIVELY BONDED COMPONENTS A...
- Publication number 20230241651
- Publication date Aug 3, 2023
- MYCON GmbH
- Michael WIBBEKE
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20230211390
- Publication date Jul 6, 2023
- SEMES CO., LTD.
- Ki-Moon Kang
- B08 - CLEANING
Information Patent Application
Supercritical Fluid Cleaning for Components in Optical or Electron...
- Publication number 20230191461
- Publication date Jun 22, 2023
- KLA Corporation
- Jiulong Sun
- B08 - CLEANING
Information Patent Application
SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME
- Publication number 20230187231
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Ansook Sul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RAMAN SENSOR FOR SUPERCRITICAL FLUIDS METROLOGY
- Publication number 20230055423
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING DEVICE COMPRISING DOOR UNIT HAVING INCLINED SU...
- Publication number 20230001462
- Publication date Jan 5, 2023
- KCTECH CO., LTD.
- Hyung Chul KIM
- B08 - CLEANING
Information Patent Application
APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...
- Publication number 20220362817
- Publication date Nov 17, 2022
- SEMES CO., LTD.
- Sangmin LEE
- B08 - CLEANING
Information Patent Application
METHOD FOR SEPARATING ADHESIVES
- Publication number 20220306917
- Publication date Sep 29, 2022
- Evonik Operations GmbH
- Nicolai Kolb
- B08 - CLEANING
Information Patent Application
Sterilization Validation System and Method
- Publication number 20220296759
- Publication date Sep 22, 2022
- Aramark Uniform & Career Apparel Group, Inc.
- Daniel R. Gensinger
- D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information Patent Application
SEALING MEMBER AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20220178446
- Publication date Jun 9, 2022
- SEMES CO., LTD.
- SEUNG HOON OH
- B08 - CLEANING
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE
- Publication number 20220172966
- Publication date Jun 2, 2022
- SEMES CO., LTD.
- JUN YOUNG CHOI
- B08 - CLEANING
Information Patent Application
DEVICE FOR GENERATING A CO2 SNOW JET
- Publication number 20220168762
- Publication date Jun 2, 2022
- ACP SYSTEMS AG
- Felix JÄGER
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20220020609
- Publication date Jan 20, 2022
- SEMES CO., LTD.
- Miso PARK
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220008964
- Publication date Jan 13, 2022
- SEMES CO., LTD.
- JUNYOUNG CHOI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220013372
- Publication date Jan 13, 2022
- SEMES CO., LTD.
- Miso PARK
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR REMOVAL OF MICROSCOPIC CONTAMINANT PARTICU...
- Publication number 20210316340
- Publication date Oct 14, 2021
- Jefferson Science Associates, LLC
- RONGLI GENG
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210313199
- Publication date Oct 7, 2021
- SCREEN Holdings Co., Ltd.
- Noritake SUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20210202271
- Publication date Jul 1, 2021
- Semes Co., LTD.
- Youngseop CHOI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210159095
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Toru Ihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20210104418
- Publication date Apr 8, 2021
- SEMES CO., LTD.
- Miso PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210086238
- Publication date Mar 25, 2021
- SCREEN Holdings Co., Ltd.
- Akira HORIKOSHI
- H01 - BASIC ELECTRIC ELEMENTS

by liquid gases or supercritical fluids

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Method and apparatus for removal of microscopic contaminant particu...

Substrate processing apparatus and apparatus for manufacturing inte...

Apparatus and method for treating substrate

Apparatus for treating substrate and method for treating substrate

Apparatuses for processing a substrate and methods of processing a...

Fluid supply unit and substrate treating apparatus having the same

Substrate processing apparatus

Substrate processing device comprising door unit having inclined su...

Raman sensor for supercritical fluids metrology

Method of cleaning a torch of a plasma-coating plant and a plasma-c...

Substrate processing apparatus

Method for treating substrate

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus and control method thereof

Method and system for cleaning a process chamber

Wafer cleaning apparatus based on light irradiation and wafer clean...

Method of cleaning substrate processing apparatus, and substrate pr...

Substrate processing apparatus and substrate processing method

Drying process for high aspect ratio features

Substrate processing apparatus

Substrate processing apparatus and substrate processing system incl...

Method and apparatus for cleaning semiconductor wafers

Soot blower and method of cleaning tubular heat exchanger by using...

Method of processing semiconductor device

Substrate processing apparatus and substrate processing method

Method and apparatus for removing a fouling substance from a pressu...

Contamination removal apparatus and method

Turbine blade internal hot corrosion oxide cleaning

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

PROCESSING CHAMBER CLEANING METHOD, CLEANING ATTACHMENT AND SUBSTRA...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...

APPARATUS AND METHOD OF ORIFICE INSPECTION AND CARBON DIOXIDE CLEAN...

METHOD AND INSTALLATION FOR CLEANING A FILTER MATERIAL

METHOD FOR COOLING AND/OR SEPARATING ADHESIVELY BONDED COMPONENTS A...

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

Supercritical Fluid Cleaning for Components in Optical or Electron...

SUBSTRATE DRYING DEVICE AND METHOD OF DRYING SUBSTRATE USING THE SAME

RAMAN SENSOR FOR SUPERCRITICAL FLUIDS METROLOGY

SUBSTRATE PROCESSING DEVICE COMPRISING DOOR UNIT HAVING INCLINED SU...

APPARATUSES FOR PROCESSING A SUBSTRATE AND METHODS OF PROCESSING A...

METHOD FOR SEPARATING ADHESIVES

Sterilization Validation System and Method

SEALING MEMBER AND APPARATUS FOR TREATING SUBSTRATE

APPARATUS FOR TREATING SUBSTRATE

DEVICE FOR GENERATING A CO2 SNOW JET

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

METHOD AND APPARATUS FOR REMOVAL OF MICROSCOPIC CONTAMINANT PARTICU...

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS