by moving the substrates between spatially separate sputtering and reaction stations

Industry

CPC
C23C14/0078

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0078by moving the substrates between spatially separate sputtering and reaction stations

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for producing coated substrates
- Patent number 11,814,718
- Issue date Nov 14, 2023
- Bühler Alzenau GmbH
- Jürgen Pistner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-refractive-index hydrogenated silicon film and methods for pre...
- Patent number 11,643,716
- Issue date May 9, 2023
- ZHEJIANG CRYSTAL-OPTECH CO., LTD.
- Ruizhi Zhang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Manufacturing flexible organic electronic devices
- Patent number 11,637,271
- Issue date Apr 25, 2023
- Universal Display Corporation
- Ruiqing Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings of non-planar substrates and methods for the production th...
- Patent number 11,630,244
- Issue date Apr 18, 2023
- Corning Incorporated
- Robert Alan Bellman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Film formation apparatus
- Patent number 10,903,059
- Issue date Jan 26, 2021
- Shibaura Mechatronics Corporation
- Daisuke Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus
- Patent number 10,896,841
- Issue date Jan 19, 2021
- Shibaura Mechatronics Corporation
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing flexible organic electronic devices
- Patent number 10,862,074
- Issue date Dec 8, 2020
- Universal Display Corporation
- Ruiqing Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings of non-planar substrates
- Patent number 10,802,179
- Issue date Oct 13, 2020
- Corning Incorporated
- Robert Alan Bellman
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method for producing a multilayer coating and device for carrying o...
- Patent number 10,418,231
- Issue date Sep 17, 2019
- Leybold Optics GmbH
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 10,392,688
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 10,262,838
- Issue date Apr 16, 2019
- Vaeco Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of optical substrates using closed field system
- Patent number 9,562,283
- Issue date Feb 7, 2017
- Applied Multilayers LLC
- Desmond Gibson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Translucent hard thin film
- Patent number 9,422,620
- Issue date Aug 23, 2016
- Shincron Co., Ltd.
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing film
- Patent number 9,365,920
- Issue date Jun 14, 2016
- Shincron Co., Ltd.
- Ichiro Shiono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 9,310,524
- Issue date Apr 12, 2016
- ULVAC, Inc.
- Haruhiko Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for depositing silicon carbide film
- Patent number 9,157,146
- Issue date Oct 13, 2015
- Shincron Co., Ltd.
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a multilayer coating and device for carrying o...
- Patent number 8,956,511
- Issue date Feb 17, 2015
- Leybold Optics GmbH
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical film thickness measuring device and thin film forming appar...
- Patent number 8,922,790
- Issue date Dec 30, 2014
- Shincron Co., Ltd.
- Kyokuyo Sai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with a rotating drum
- Patent number 8,758,580
- Issue date Jun 24, 2014
- Vaeco Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing group-III nitride semiconductor layer,...
- Patent number 8,383,439
- Issue date Feb 26, 2013
- Showa Denko K.K.
- Yasunori Yokoyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film coating system and method
- Patent number 8,133,361
- Issue date Mar 13, 2012
- Deposition Sciences, Inc.
- Norman L. Boling
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Thin film forming apparatus
- Patent number 8,011,315
- Issue date Sep 6, 2011
- ULVAC, Inc.
- Takafumi Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy device and method for producing the same
- Patent number 7,816,032
- Issue date Oct 19, 2010
- Panasonic Corporation
- Kazuyoshi Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer system
- Patent number 7,713,638
- Issue date May 11, 2010
- Schott AG
- Christoph Moelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing layers and layer systems, and coated substrate
- Patent number 7,641,773
- Issue date Jan 5, 2010
- Schott AG
- Christoph Moelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated object
- Patent number 7,381,469
- Issue date Jun 3, 2008
- Schott AG
- Christoph Moelle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of oxygen-containing gases in fabrication of granular perpendic...
- Patent number 7,354,630
- Issue date Apr 8, 2008
- Seagate Technology LLC
- Rajiv Ranjan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing a thermal barrier coating
- Patent number 6,635,124
- Issue date Oct 21, 2003
- General Electric Company
- William Randolph Stowell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-anode device and methods for sputter deposition
- Patent number 6,440,280
- Issue date Aug 27, 2002
- Sola International, Inc.
- Clive H. Burton
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for a reliable return current path for sputter...
- Patent number 6,402,902
- Issue date Jun 11, 2002
- Deposition Sciences, Inc.
- Norman L. Boling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20230221467
- Publication date Jul 13, 2023
- Corning Incorporated
- Robert Alan Bellman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR PREPARING BACTERICIDAL FILM HAVING SILICON NITRIDE BINDI...
- Publication number 20210198782
- Publication date Jul 1, 2021
- Fook Chi MAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF TREATING A SUBSTRATE AND VACUUM DEPOSITION APPARATUS
- Publication number 20210040596
- Publication date Feb 11, 2021
- Evatec AG
- Edmund Schüngel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20210003744
- Publication date Jan 7, 2021
- Corning Incorporated
- Robert Alan Bellman
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM
- Publication number 20200219704
- Publication date Jul 9, 2020
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM
- Publication number 20190214234
- Publication date Jul 11, 2019
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20180155817
- Publication date Jun 7, 2018
- Junichi TAKEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING COATED SUBSTRATES
- Publication number 20180087142
- Publication date Mar 29, 2018
- BÜHLER ALZENAU GMBH
- Jürgen Pistner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...
- Publication number 20180011225
- Publication date Jan 11, 2018
- Corning Incorporated
- Robert Alan Bellman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition System With Integrated Cooling On A Rotating Drum
- Publication number 20170117119
- Publication date Apr 27, 2017
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR PRODUCING UNIFORM FILMS ON MOVING SUBSTRATES...
- Publication number 20160254127
- Publication date Sep 1, 2016
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Translucent Hard Thin Film
- Publication number 20140356601
- Publication date Dec 4, 2014
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Deposition Apparatus and Film Deposition Method
- Publication number 20140295104
- Publication date Oct 2, 2014
- Haruhiko Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Deposition System With A Rotating Drum
- Publication number 20140262765
- Publication date Sep 18, 2014
- Vaeco, Inc.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Depositing Silicon Carbide Film
- Publication number 20140205844
- Publication date Jul 24, 2014
- SHINCRON CO., LTD.
- Takuya Sugawara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FILM THICKNESS MEASURING DEVICE AND THIN FILM FORMING APPAR...
- Publication number 20140016139
- Publication date Jan 16, 2014
- Shincron Co., LTD
- Kyokuyo Sai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED ARTICLE AND METHOD FOR MANUFACTURING SAME
- Publication number 20130157043
- Publication date Jun 20, 2013
- FIH (HONG KONG) LIMITED
- DA-HUA CAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR THE PRODUCTION OF OXIDE AND NITRIDE COATINGS AND ITS USE
- Publication number 20120164051
- Publication date Jun 28, 2012
- Stefan Bruns
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH A ROTATING DRUM
- Publication number 20120045588
- Publication date Feb 23, 2012
- VAECO INC.
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIREFLECTION COATING FOR MULTI-JUNCTION SOLAR CELLS
- Publication number 20110232745
- Publication date Sep 29, 2011
- Deposition Sciences, Inc.
- Lucas Alves
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing Method of Optical Filter
- Publication number 20110168544
- Publication date Jul 14, 2011
- Shincron Co., LTD
- Ichiro Shiono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING FILM
- Publication number 20110151138
- Publication date Jun 23, 2011
- SHINCRON Co., Ltd.
- Ichiro Shiono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING METHOD AND DEVICE USING A PLASMA-ENHANCED CHEMICAL REACTION
- Publication number 20110091662
- Publication date Apr 21, 2011
- Matthias Fahland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20110014398
- Publication date Jan 20, 2011
- ULVAC, Inc.
- Haruhiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering And Ion Beam Deposition
- Publication number 20100264022
- Publication date Oct 21, 2010
- Mun-Sik Chim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM ACOUSTIC REFLECTOR STACK
- Publication number 20100001814
- Publication date Jan 7, 2010
- Koninklijke Philips Electronics N.V.
- Hans-Peter Lobl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin film coating system and method
- Publication number 20090145745
- Publication date Jun 11, 2009
- Norman L. Boling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING GROUP-III NITRIDE SEMICONDUCTOR LAYER,...
- Publication number 20090114942
- Publication date May 7, 2009
- SHOWA DENKO K.K.
- Yasunori YOKOYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coating of Optical Substrates Using Closed Field System
- Publication number 20080223715
- Publication date Sep 18, 2008
- APPLIED MULTILAYERS LIMITED
- Desmond Gibson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin Film Forming Apparatus
- Publication number 20080141943
- Publication date Jun 19, 2008
- Takafumi Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by moving the substrates between spatially separate sputtering and reaction stations

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for producing coated substrates

High-refractive-index hydrogenated silicon film and methods for pre...

Manufacturing flexible organic electronic devices

Coatings of non-planar substrates and methods for the production th...

Film formation apparatus

Film formation apparatus

Manufacturing flexible organic electronic devices

Coatings of non-planar substrates

Method for producing a multilayer coating and device for carrying o...

Film forming apparatus

Deposition system with integrated cooling on a rotating drum

Coating of optical substrates using closed field system

Translucent hard thin film

Method for depositing film

Film deposition apparatus and film deposition method

Method for depositing silicon carbide film

Method for producing a multilayer coating and device for carrying o...

Optical film thickness measuring device and thin film forming appar...

Deposition system with a rotating drum

Apparatus for manufacturing group-III nitride semiconductor layer,...

Thin film coating system and method

Thin film forming apparatus

Energy device and method for producing the same

Layer system

Process for producing layers and layer systems, and coated substrate

Coated object

Use of oxygen-containing gases in fabrication of granular perpendic...

Method of depositing a thermal barrier coating

Multi-anode device and methods for sputter deposition

Apparatus and method for a reliable return current path for sputter...

Patents Applicationslast 30 patents

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

METHOD FOR PREPARING BACTERICIDAL FILM HAVING SILICON NITRIDE BINDI...

METHOD OF TREATING A SUBSTRATE AND VACUUM DEPOSITION APPARATUS

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

FILM FORMING APPARATUS

METHOD FOR PRODUCING COATED SUBSTRATES

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION TH...

Deposition System With Integrated Cooling On A Rotating Drum

METHOD AND DEVICE FOR PRODUCING UNIFORM FILMS ON MOVING SUBSTRATES...

Translucent Hard Thin Film

Film Deposition Apparatus and Film Deposition Method

Deposition System With A Rotating Drum

Method for Depositing Silicon Carbide Film

OPTICAL FILM THICKNESS MEASURING DEVICE AND THIN FILM FORMING APPAR...

COATED ARTICLE AND METHOD FOR MANUFACTURING SAME

METHOD FOR THE PRODUCTION OF OXIDE AND NITRIDE COATINGS AND ITS USE

DEPOSITION SYSTEM WITH A ROTATING DRUM

ANTIREFLECTION COATING FOR MULTI-JUNCTION SOLAR CELLS

Manufacturing Method of Optical Filter

METHOD FOR DEPOSITING FILM

COATING METHOD AND DEVICE USING A PLASMA-ENHANCED CHEMICAL REACTION

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

Sputtering And Ion Beam Deposition

THIN FILM ACOUSTIC REFLECTOR STACK

Thin film coating system and method

APPARATUS FOR MANUFACTURING GROUP-III NITRIDE SEMICONDUCTOR LAYER,...

Coating of Optical Substrates Using Closed Field System

Thin Film Forming Apparatus