by resistance or inductive heating of the source

Industry

CPC
C23C14/26

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/26by resistance or inductive heating of the source

Industries

Patents Grantslast 30 patents

Information Patent Grant
Elemental alkali-metal dispenser
- Patent number 11,920,235
- Issue date Mar 5, 2024
- David Hostutler
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Material deposition apparatus having at least one heating assembly...
- Patent number 11,905,589
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Andreas Lopp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making metal nanostructures using low temperature deposition
- Patent number 11,898,235
- Issue date Feb 13, 2024
- KING FAISAL UNIVERSITY
- Nagih Mohammed Shaalan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Galvanized steel sheet having excellent hardness and galling resist...
- Patent number 11,781,207
- Issue date Oct 10, 2023
- POSCO Co., Ltd
- Kyung-Hoon Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC single crystal manufacturing apparatus
- Patent number 11,761,113
- Issue date Sep 19, 2023
- Resonac Corporation
- Kotaro Ishita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,674,225
- Issue date Jun 13, 2023
- Tokyo Electron Limted
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-performance wafer-level lead sulfide near infrared photosensit...
- Patent number 11,661,648
- Issue date May 30, 2023
- HANGZHOU MIL-CHIP ELECTRONIC TECH. CO., LTD.
- Jijun Qiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapour deposition evaporator device
- Patent number 11,613,804
- Issue date Mar 28, 2023
- Dyson Technology Limited
- Michael Edward Rendall
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum lock and method for transferring a substrate carrier
- Patent number 11,597,998
- Issue date Mar 7, 2023
- Singulus Technologies AG
- Bernhard Cord
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control roller, transporting arrangement and vacuum arr...
- Patent number 11,566,321
- Issue date Jan 31, 2023
- VON ARDENNE Asset GmbH & Co. KG
- Uwe Wehner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder for film formation and material for film formation
- Patent number 11,371,131
- Issue date Jun 28, 2022
- NIPPON YTTRIUM CO., LTD.
- Ryuichi Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for vapor deposition of optical substrate
- Patent number 11,286,553
- Issue date Mar 29, 2022
- Essilor International
- Brian McCrady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making metal nanostructures using low temperature deposition
- Patent number 11,242,595
- Issue date Feb 8, 2022
- KING FAISAL UNIVERSITY
- Nagih Mohammed Shaalan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Zinc alloy plated steel having excellent weldability and corrosion...
- Patent number 11,192,336
- Issue date Dec 7, 2021
- POSCO
- Young-Jin Kwak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition apparatus and vapor deposition method
- Patent number 11,111,574
- Issue date Sep 7, 2021
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Youyuan Kuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Homogeneous linear evaporation source
- Patent number 10,982,319
- Issue date Apr 20, 2021
- FLISOM AG
- Marta Ruth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation source heating system with soaking layer
- Patent number 10,954,592
- Issue date Mar 23, 2021
- SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Liang Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High performance nano/micro composite fiber capable of storing elec...
- Patent number 10,950,392
- Issue date Mar 16, 2021
- AICT
- SangYoon Park
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Linear evaporation source and deposition apparatus having the same
- Patent number 10,907,245
- Issue date Feb 2, 2021
- Samsung Display Co., Ltd.
- Min-Gyu Seo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Crucible, evaporation preparation device, evaporation equipment and...
- Patent number 10,889,886
- Issue date Jan 12, 2021
- BOE Technology Group Co., Ltd.
- Yongqi Shen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating device for evaporation, evaporation device and evaporation...
- Patent number 10,870,914
- Issue date Dec 22, 2020
- BOE Technology Group Co., Ltd.
- Jiunsung Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of retrofitting a vacuum deposition chamber
- Patent number 10,844,472
- Issue date Nov 24, 2020
- Essilor International (Compagnie Générale d'Optique)
- Brian McCrady
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor evaporation source
- Patent number 10,801,101
- Issue date Oct 13, 2020
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Xin Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method of evaporating a material from a metal melt
- Patent number 10,767,255
- Issue date Sep 8, 2020
- Freiberger Compound Materials GMBH
- Gleb Lukin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Linear evaporation source and vacuum deposition apparatus including...
- Patent number 10,689,749
- Issue date Jun 23, 2020
- Samsung Display Co., Ltd.
- Min Ho Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Evaporation source
- Patent number 10,676,812
- Issue date Jun 9, 2020
- FLISOM AG
- Marta Ruth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-coated cutting tool
- Patent number 10,569,339
- Issue date Feb 25, 2020
- Mitsubishi Materials Corporation
- Kazuaki Senbokuya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Elemental alkali-metal dispenser
- Patent number 10,519,537
- Issue date Dec 31, 2019
- Utah State University Research Foundation
- David Hostutler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating a vapor for a CVD or PVD device
- Patent number 10,501,847
- Issue date Dec 10, 2019
- Aixtron SE
- Michael Long
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating unit
- Patent number 10,480,059
- Issue date Nov 19, 2019
- safematic GmbH
- Walter Colleoni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240141475
- Publication date May 2, 2024
- SAMSUNG DISPLAY CO., LTD.
- Jaewan SEOL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM COATING DEVICE FOR UNIFORMLY DISTRIBUTING METAL STEAM BY USI...
- Publication number 20230340657
- Publication date Oct 26, 2023
- Baoshan Iron & Steel Co., Ltd
- Sanbing REN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM COATING APPARATUS FOR UNIFORMLY DISTRIBUTING METAL VAPOR USI...
- Publication number 20230323526
- Publication date Oct 12, 2023
- Baoshan Iron & Steel Co., Ltd
- Sanbing REN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING METHOD OF PLASMA RESISTANT OXYFLUORIDE COATING LAYER
- Publication number 20230215701
- Publication date Jul 6, 2023
- KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY
- Sung min LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FOOD PACKAGING BARRIER FILM AND METHOD FOR PRODUCING THE SAME
- Publication number 20230109604
- Publication date Apr 6, 2023
- Nan Ya Plastics Corporation
- TE-CHAO LIAO
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
ZINC-BASED COATED STEEL MATERIAL HAVING EXCELLENT CORROSION RESISTA...
- Publication number 20230030466
- Publication date Feb 2, 2023
- POSCO
- Young-Jin Kwak
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
VACUUM COATING DEVICE
- Publication number 20220356556
- Publication date Nov 10, 2022
- Baoshan Iron & Steel Co., Ltd
- Sanbing Ren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING METAL NANOSTRUCTURES USING LOW TEMPERATURE DEPOSITION
- Publication number 20220316046
- Publication date Oct 6, 2022
- King Faisal University
- Nagih Mohammed Shaalan
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTIZONE CRUCIBLE APPARATUS
- Publication number 20220267890
- Publication date Aug 25, 2022
- Dyson Technology Limited
- Michael Edward RENDALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION UNIT AND VACUUM VAPOR DEPOSITION APPARATUS PROVIDE...
- Publication number 20220145443
- Publication date May 12, 2022
- Ulvac, Inc.
- Shuuji Saitou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING P...
- Publication number 20220074042
- Publication date Mar 10, 2022
- POSCO
- Yong-Hwa JUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATERIAL DEPOSITION APPARATUS HAVING AT LEAST ONE HEATING ASSEMBLY...
- Publication number 20220056575
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Andreas LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SOURCE EVAPORATING APPARATUS AND MANUFACTURING METHOD TH...
- Publication number 20220025509
- Publication date Jan 27, 2022
- SAMSUNG DISPLAY CO., LTD.
- Byounggu An
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
HETEROGENEOUS COATED STEEL SHEET HAVING EXCELLENT WORKABILITY AND C...
- Publication number 20220025508
- Publication date Jan 27, 2022
- POSCO
- Young-Jin KWAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATOR BOAT CONTROL SYSTEM, PVD MACHINE AND METHOD OF OPERATING...
- Publication number 20210388486
- Publication date Dec 16, 2021
- BOBST MANCHESTER LIMITED
- Omar NUNZIATI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-PERFORMANCE WAFER-LEVEL LEAD SULFIDE NEAR INFRARED PHOTOSENSIT...
- Publication number 20210388480
- Publication date Dec 16, 2021
- DALIAN UNIVERSITY OF TECHNOLOGY
- Jijun Qiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM EVAPORATION DEVICE
- Publication number 20210332472
- Publication date Oct 28, 2021
- Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Zhijun Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR VAPORIZATION AND VAPOR DISTRIBUTION
- Publication number 20210301387
- Publication date Sep 30, 2021
- First Solar, Inc.
- John Barden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Evaporation Boat
- Publication number 20210238730
- Publication date Aug 5, 2021
- Kennametal Inc.
- Alexander Draken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOUR DEPOSITION EVAPORATOR DEVICE
- Publication number 20210230737
- Publication date Jul 29, 2021
- Dyson Technology Limited
- Michael Edward RENDALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF METAL-ORGANIC FRAMEWORKS
- Publication number 20210230191
- Publication date Jul 29, 2021
- Trustees of Dartmouth College
- Katherine A. Mirica
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOUR DEPOSITION EVAPORATOR DEVICE
- Publication number 20210230738
- Publication date Jul 29, 2021
- Dyson Technology Limited
- Michael Edward RENDALL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES
- Publication number 20210198783
- Publication date Jul 1, 2021
- First Solar, Inc.
- Markus Eberhard Beck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...
- Publication number 20210172049
- Publication date Jun 10, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Jiao DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND METHOD
- Publication number 20210172052
- Publication date Jun 10, 2021
- Raytheon Technologies Corporation
- Erik M. Nielsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTI-MICROBIAL IMPLANT COATING
- Publication number 20210128782
- Publication date May 6, 2021
- WALDEMAR LINK GmbH & Co. KG
- Helmut D. Link
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
VACUUM EVAPORATION SOURCE
- Publication number 20210062323
- Publication date Mar 4, 2021
- Alpha Plus Co., Ltd.
- Do Weon Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20210017640
- Publication date Jan 21, 2021
- POSCO
- Kyung-Hoon NAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Lock and Method for Transferring a Substrate Carrier
- Publication number 20210002757
- Publication date Jan 7, 2021
- SINGULUS TECHNOLOGIES AG
- Bernhard CORD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION SOURCE, ELECTRON BEAM VACUUM DEPOSITION APPARATUS,...
- Publication number 20200377991
- Publication date Dec 3, 2020
- Sumitomo Chemical Company, Limited
- Shinichi MORISHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by resistance or inductive heating of the source

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Elemental alkali-metal dispenser

Material deposition apparatus having at least one heating assembly...

Method of making metal nanostructures using low temperature deposition

Galvanized steel sheet having excellent hardness and galling resist...

SiC single crystal manufacturing apparatus

Substrate processing apparatus

High-performance wafer-level lead sulfide near infrared photosensit...

Vapour deposition evaporator device

Vacuum lock and method for transferring a substrate carrier

Temperature control roller, transporting arrangement and vacuum arr...

Powder for film formation and material for film formation

Method for vapor deposition of optical substrate

Method of making metal nanostructures using low temperature deposition

Zinc alloy plated steel having excellent weldability and corrosion...

Vapor deposition apparatus and vapor deposition method

Homogeneous linear evaporation source

Evaporation source heating system with soaking layer

High performance nano/micro composite fiber capable of storing elec...

Linear evaporation source and deposition apparatus having the same

Crucible, evaporation preparation device, evaporation equipment and...

Heating device for evaporation, evaporation device and evaporation...

Method of retrofitting a vacuum deposition chamber

Vapor evaporation source

Device and method of evaporating a material from a metal melt

Linear evaporation source and vacuum deposition apparatus including...

Evaporation source

Surface-coated cutting tool

Elemental alkali-metal dispenser

Apparatus and method for generating a vapor for a CVD or PVD device

Coating unit

Patents Applicationslast 30 patents

DEPOSITION APPARATUS

VACUUM COATING DEVICE FOR UNIFORMLY DISTRIBUTING METAL STEAM BY USI...

VACUUM COATING APPARATUS FOR UNIFORMLY DISTRIBUTING METAL VAPOR USI...

FORMING METHOD OF PLASMA RESISTANT OXYFLUORIDE COATING LAYER

FOOD PACKAGING BARRIER FILM AND METHOD FOR PRODUCING THE SAME

ZINC-BASED COATED STEEL MATERIAL HAVING EXCELLENT CORROSION RESISTA...

VACUUM COATING DEVICE

METHOD OF MAKING METAL NANOSTRUCTURES USING LOW TEMPERATURE DEPOSITION

MULTIZONE CRUCIBLE APPARATUS

VAPOR DEPOSITION UNIT AND VACUUM VAPOR DEPOSITION APPARATUS PROVIDE...

APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING P...

MATERIAL DEPOSITION APPARATUS HAVING AT LEAST ONE HEATING ASSEMBLY...

DEPOSITION SOURCE EVAPORATING APPARATUS AND MANUFACTURING METHOD TH...

HETEROGENEOUS COATED STEEL SHEET HAVING EXCELLENT WORKABILITY AND C...

EVAPORATOR BOAT CONTROL SYSTEM, PVD MACHINE AND METHOD OF OPERATING...

HIGH-PERFORMANCE WAFER-LEVEL LEAD SULFIDE NEAR INFRARED PHOTOSENSIT...

VACUUM EVAPORATION DEVICE

SYSTEMS AND METHODS FOR VAPORIZATION AND VAPOR DISTRIBUTION

Evaporation Boat

VAPOUR DEPOSITION EVAPORATOR DEVICE

FORMATION OF METAL-ORGANIC FRAMEWORKS

VAPOUR DEPOSITION EVAPORATOR DEVICE

FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES

METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...

VAPOR DEPOSITION APPARATUS AND METHOD

ANTI-MICROBIAL IMPLANT COATING

VACUUM EVAPORATION SOURCE

DEPOSITION APPARATUS AND DEPOSITION METHOD

Vacuum Lock and Method for Transferring a Substrate Carrier

VAPOR DEPOSITION SOURCE, ELECTRON BEAM VACUUM DEPOSITION APPARATUS,...