by vapour phase deposition

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H01L41/316

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L41/00Piezo-electric devices in general Electrostrictive devices in general Magnetostrictive devices in general Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof Details thereof

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H01L41/316by vapour phase deposition

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus including horizontal flow reactor with a central injector...
- Patent number 11,618,968
- Issue date Apr 4, 2023
- AKOUSTIS, INC.
- Craig Moe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
FBAR devices having multiple epitaxial layers stacked on a same sub...
- Patent number 11,616,488
- Issue date Mar 28, 2023
- Intel Corporation
- Sansaptak Dasgupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bulk-acoustic wave resonator
- Patent number 11,601,110
- Issue date Mar 7, 2023
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Ran Hee Shin
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method for manufacturing a monocrystalline piezoelectric layer
- Patent number 11,600,766
- Issue date Mar 7, 2023
- Soitec
- Bruno Ghyselen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and structure of single crystal electronic devices with enha...
- Patent number 11,557,716
- Issue date Jan 17, 2023
- AKOUSTIS, INC.
- Shawn R. Gibb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric device and method of forming the same
- Patent number 11,527,701
- Issue date Dec 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film structure body and method for manufacturing the same
- Patent number 11,527,706
- Issue date Dec 13, 2022
- KRYSTAL INC.
- Takeshi Kijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-layered piezoelectric ceramic-containing structure
- Patent number 11,527,703
- Issue date Dec 13, 2022
- Agency for Science, Technology and Research
- Kui Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric resonator device
- Patent number 11,515,857
- Issue date Nov 29, 2022
- Daishinku Corporation
- Takuya Kojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacture for single crystal capacitor dielectric for a...
- Patent number 11,495,734
- Issue date Nov 8, 2022
- AKOUSTIS, INC.
- Jeffrey B. Shealy
- C30 - CRYSTAL GROWTH
Information Patent Grant
Physical vapor deposition of piezoelectric films
- Patent number 11,489,105
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Highly dispersive bulk acoustic wave resonators
- Patent number 11,489,511
- Issue date Nov 1, 2022
- Texas Instruments Incorporated
- Jeronimo Segovia Fernandez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium nitride structure, piezoelectric element, method of manufac...
- Patent number 11,451,211
- Issue date Sep 20, 2022
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inorganic piezoelectric materials formed on fibers and applications...
- Patent number 11,421,376
- Issue date Aug 23, 2022
- Intel Corporation
- Shawna M. Liff
- D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information Patent Grant
Methods of forming group III piezoelectric thin films via removal o...
- Patent number 11,411,169
- Issue date Aug 9, 2022
- AKOUSTIS, INC.
- Craig Moe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming group III piezoelectric thin films via sputtering
- Patent number 11,411,168
- Issue date Aug 9, 2022
- AKOUSTIS, INC.
- Craig Moe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film piezoelectric-material element, method of manufacturing t...
- Patent number 11,411,162
- Issue date Aug 9, 2022
- SAE Magnetics (H. K.) Ltd.
- Wei Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hafnium-zirconium oxide (HZO) ferroelectric transducer and method o...
- Patent number 11,393,973
- Issue date Jul 19, 2022
- University of Florida Research Foundation, Incorporated
- Mayur Ghatge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High breakdown strength ferroelectric SrHfO3 materials
- Patent number 11,335,845
- Issue date May 17, 2022
- Alliance for Sustainable Energy, LLC
- Lauren Marie Garten
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Potassium sodium niobate sputtering target
- Patent number 11,313,029
- Issue date Apr 26, 2022
- JX Nippon Mining & Metals Corporation
- Ryosuke Sakashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film piezoelectric material substrate, thin-film piezoelectric...
- Patent number 11,295,770
- Issue date Apr 5, 2022
- Sae Magnetics (H.K.) Ltd.
- Wei Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and structure for single crystal acoustic resonator devices...
- Patent number 11,245,382
- Issue date Feb 8, 2022
- AKOUSTIS, INC.
- Shawn R. Gibb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS process power
- Patent number 11,217,741
- Issue date Jan 4, 2022
- Vesper Technologies Inc.
- Robert Littrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric film, piezoelectric element, and method for manufactu...
- Patent number 11,195,983
- Issue date Dec 7, 2021
- FUJIFILM Corporation
- Daigo Sawaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Using piezoelectric electrodes as active surfaces for electroplatin...
- Patent number 11,173,258
- Issue date Nov 16, 2021
- Analog Devices, Inc.
- Gabriele Vigevani
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Piezoelectric element and method for manufacturing piezoelectric el...
- Patent number 11,165,011
- Issue date Nov 2, 2021
- FUJIFILM Corporation
- Takamichi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Laminated substrate with piezoelectric thin film, piezoelectric thi...
- Patent number 11,107,971
- Issue date Aug 31, 2021
- Sumitomo Chemical Company, Limited
- Kenji Shibata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the production of a single-crystal film, in particular p...
- Patent number 11,101,428
- Issue date Aug 24, 2021
- Soitec
- Bruno Ghyselen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminate structure, piezoelectric element, and method of manufactur...
- Patent number 11,081,637
- Issue date Aug 3, 2021
- FUJIFILM Corporation
- Takamichi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoelectric element, piezoelectric microphone, piezoelectric reso...
- Patent number 11,012,787
- Issue date May 18, 2021
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- H03 - BASIC ELECTRONIC CIRCUITRY

Patents Applicationslast 30 patents

Information Patent Application
PROCESS OF EPITAXIAL GROWN PZT FILM AND METHOD OF MAKING A PZT DEVICE
- Publication number 20240065105
- Publication date Feb 22, 2024
- FUJIFILM DIMATIX, INC.
- Youming Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING SURFACE DEFECTS IN ACTIVE FILM LAYERS
- Publication number 20230345836
- Publication date Oct 26, 2023
- Ming GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STRUCTURE AND METHOD FOR PRODUCING THE SAME
- Publication number 20230172069
- Publication date Jun 1, 2023
- MicroInnovators Laboratory, Inc.
- Akio KONISHI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND STRUCTURE OF SINGLE CRYSTAL ELECTRONIC DEVICES WITH ENHA...
- Publication number 20230123976
- Publication date Apr 20, 2023
- Akoustis, Inc.
- Shawn R. GIBB
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A PIEZOELECTRIC FILM
- Publication number 20230113584
- Publication date Apr 13, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Kezia Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, MANUFACT...
- Publication number 20230103499
- Publication date Apr 6, 2023
- NITTO DENKO CORPORATION
- Daisuke NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC SPEAKER
- Publication number 20230096425
- Publication date Mar 30, 2023
- FUJIFILM CORPORATION
- Naohiro OHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH CANTILEVERED SEPARATION
- Publication number 20230092374
- Publication date Mar 23, 2023
- Skyworks Solutions, Inc.
- You Qian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC FILM LAMINATED BODY AND MANUFACTURING METHOD OF THE SAME
- Publication number 20230083830
- Publication date Mar 16, 2023
- DENSO CORPORATION
- AKIHIKO TESHIGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20230079756
- Publication date Mar 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION OF PIEZOELECTRIC FILMS
- Publication number 20230032638
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A...
- Publication number 20230023845
- Publication date Jan 26, 2023
- Akoustis, Inc.
- Jeffrey B. SHEALY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE PIEZO ELEMENT AND METHOD FOR PRODUCING A MOVABLE PIEZO ELEMENT
- Publication number 20230013976
- Publication date Jan 19, 2023
- Thomas KÄMPFE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS
- Publication number 20230009085
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Lizhong SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMECHANICAL RESPONSIVE FILM, STACKED ARRANGEMENT AND METHODS...
- Publication number 20220367787
- Publication date Nov 17, 2022
- Agency for Science, Technology and Research
- Huajun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA REMOVAL O...
- Publication number 20220352456
- Publication date Nov 3, 2022
- Craig Moe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA SPUTTERING
- Publication number 20220344576
- Publication date Oct 27, 2022
- Akoustis, Inc.
- Craig Moe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ALUMINUM NITRIDE FILMS
- Publication number 20220320417
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC COATING AND DEPOSITION PROCESS
- Publication number 20220263009
- Publication date Aug 18, 2022
- Evatec AG
- Andrea Mazzalai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIEZOELECTRIC FILM, PIEZOELECTRIC LAYERED BODY, PIEZOELECTRIC ELEME...
- Publication number 20220254988
- Publication date Aug 11, 2022
- Sumitomo Chemical Company, Limited
- Toshiaki KURODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR COMPONENT INCLUDING A DIELECTRIC LAYER
- Publication number 20220238791
- Publication date Jul 28, 2022
- ROBERT BOSCH GmbH
- Daniel Monteiro Diniz Reis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR COMPONENT INCLUDING A DIELECTRIC LAYER
- Publication number 20220231219
- Publication date Jul 21, 2022
- ROBERT BOSCH GmbH
- Daniel Monteiro Diniz Reis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACOUSTIC WAVE DEVICE
- Publication number 20220216392
- Publication date Jul 7, 2022
- Murata Manufacturing Co., Ltd.
- Takashi YAMANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS PROCESS POWER
- Publication number 20220199893
- Publication date Jun 23, 2022
- Vesper Technologies Inc.
- Robert J. Littrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN-FILM PIEZOELECTRIC MATERIAL ELEMENT
- Publication number 20220180896
- Publication date Jun 9, 2022
- SAE MAGNETICS (H. K) LTD.
- Wei XIONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD...
- Publication number 20220181542
- Publication date Jun 9, 2022
- NITTO DENKO CORPORATION
- Daisuke NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY MODULE AND FABRICATION METHOD THEREOF, AND DISPLAY DEVICE
- Publication number 20220157901
- Publication date May 19, 2022
- BOE TECHNOLOGY GROUP CO., LTD.
- Yuju CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PURITY PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING ELE...
- Publication number 20220149802
- Publication date May 12, 2022
- Sang Jeong AN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPODITING AlN THIN FILM
- Publication number 20220119936
- Publication date Apr 21, 2022
- Korea Electronics Technology Institute
- Sungmin HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Method
- Publication number 20220085275
- Publication date Mar 17, 2022
- SPTS TECHNOLOGIES LIMITED
- Scott Haymore
- H01 - BASIC ELECTRIC ELEMENTS

by vapour phase deposition

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus including horizontal flow reactor with a central injector...

FBAR devices having multiple epitaxial layers stacked on a same sub...

Bulk-acoustic wave resonator

Method for manufacturing a monocrystalline piezoelectric layer

Method and structure of single crystal electronic devices with enha...

Piezoelectric device and method of forming the same

Film structure body and method for manufacturing the same

Multi-layered piezoelectric ceramic-containing structure

Piezoelectric resonator device

Method of manufacture for single crystal capacitor dielectric for a...

Physical vapor deposition of piezoelectric films

Highly dispersive bulk acoustic wave resonators

Gallium nitride structure, piezoelectric element, method of manufac...

Inorganic piezoelectric materials formed on fibers and applications...

Methods of forming group III piezoelectric thin films via removal o...

Methods of forming group III piezoelectric thin films via sputtering

Thin-film piezoelectric-material element, method of manufacturing t...

Hafnium-zirconium oxide (HZO) ferroelectric transducer and method o...

High breakdown strength ferroelectric SrHfO3 materials

Potassium sodium niobate sputtering target

Thin-film piezoelectric material substrate, thin-film piezoelectric...

Method and structure for single crystal acoustic resonator devices...

MEMS process power

Piezoelectric film, piezoelectric element, and method for manufactu...

Using piezoelectric electrodes as active surfaces for electroplatin...

Piezoelectric element and method for manufacturing piezoelectric el...

Laminated substrate with piezoelectric thin film, piezoelectric thi...

Method for the production of a single-crystal film, in particular p...

Laminate structure, piezoelectric element, and method of manufactur...

Piezoelectric element, piezoelectric microphone, piezoelectric reso...

Patents Applicationslast 30 patents

PROCESS OF EPITAXIAL GROWN PZT FILM AND METHOD OF MAKING A PZT DEVICE

METHODS FOR REDUCING SURFACE DEFECTS IN ACTIVE FILM LAYERS

FILM STRUCTURE AND METHOD FOR PRODUCING THE SAME

METHOD AND STRUCTURE OF SINGLE CRYSTAL ELECTRONIC DEVICES WITH ENHA...

METHOD FOR FORMING A PIEZOELECTRIC FILM

MULTILAYER STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, MANUFACT...

PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC SPEAKER

PIEZOELECTRIC MEMS MICROPHONE WITH CANTILEVERED SEPARATION

PIEZOELECTRIC FILM LAMINATED BODY AND MANUFACTURING METHOD OF THE SAME

PIEZOELECTRIC DEVICE AND METHOD OF FORMING THE SAME

PHYSICAL VAPOR DEPOSITION OF PIEZOELECTRIC FILMS

METHOD OF MANUFACTURE FOR SINGLE CRYSTAL CAPACITOR DIELECTRIC FOR A...

MOVABLE PIEZO ELEMENT AND METHOD FOR PRODUCING A MOVABLE PIEZO ELEMENT

METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS

ELECTROMECHANICAL RESPONSIVE FILM, STACKED ARRANGEMENT AND METHODS...

METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA REMOVAL O...

METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA SPUTTERING

METHOD OF MANUFACTURING ALUMINUM NITRIDE FILMS

PIEZOELECTRIC COATING AND DEPOSITION PROCESS

PIEZOELECTRIC FILM, PIEZOELECTRIC LAYERED BODY, PIEZOELECTRIC ELEME...

SEMICONDUCTOR COMPONENT INCLUDING A DIELECTRIC LAYER

SEMICONDUCTOR COMPONENT INCLUDING A DIELECTRIC LAYER

ACOUSTIC WAVE DEVICE

MEMS PROCESS POWER

THIN-FILM PIEZOELECTRIC MATERIAL ELEMENT

LAYERED STRUCTURE, PIEZOELECTRIC DEVICE USING THE SAME, AND METHOD...

DISPLAY MODULE AND FABRICATION METHOD THEREOF, AND DISPLAY DEVICE

HIGH PURITY PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING ELE...

METHOD OF DEPODITING AlN THIN FILM

Deposition Method