Calibration

Industry

CPC
H01J2237/2826

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2826Calibration

Industries

Patents Grantslast 30 patents

Information Patent Grant
Charged particle microscope for examining a specimen, and method of...
- Patent number 12,080,512
- Issue date Sep 3, 2024
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for high-performance electron microscopy
- Patent number 12,073,541
- Issue date Aug 27, 2024
- The Board of Regents of the University of Texas System
- Zbyszek Otwinowski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for calibrating a scanning charged particle microscope
- Patent number 11,972,922
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Hermanus Adrianus Dillen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and charged particle beam device calib...
- Patent number 11,848,171
- Issue date Dec 19, 2023
- HITACHI HIGH-TECH CORPORATION
- Akio Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,798,780
- Issue date Oct 24, 2023
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for calibrating a scanning charged particle microscope
- Patent number 11,646,174
- Issue date May 9, 2023
- ASML Netherlands, B.V.
- Hermanus Adrianus Dillen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method of controlling sample ch...
- Patent number 11,545,338
- Issue date Jan 3, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH
- Dominik Patrick Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,456,150
- Issue date Sep 27, 2022
- HITACHI HIGH-TECH CORPORATION
- Kaori Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,239,052
- Issue date Feb 1, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for alignment of cathodoluminescence optics
- Patent number 11,205,559
- Issue date Dec 21, 2021
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Local alignment point calibration method in die inspection
- Patent number 11,043,356
- Issue date Jun 22, 2021
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for beam position visualization
- Patent number 10,998,166
- Issue date May 4, 2021
- FEI Company
- Branislav Straka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and specimen tilt angle adjustment method
- Patent number 10,867,771
- Issue date Dec 15, 2020
- Jeol Ltd.
- Shuji Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reference sample with inclined support base, method for evaluating...
- Patent number 10,847,342
- Issue date Nov 24, 2020
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki Kaneko
- G01 - MEASURING TESTING
Information Patent Grant
Image processing system and method of processing images
- Patent number 10,804,074
- Issue date Oct 13, 2020
- Nanojehm Inc.
- Matthew Daniel Zotta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope objective lens calibration using X-Y v...
- Patent number 10,790,114
- Issue date Sep 29, 2020
- KLA-Tencor Corporation
- Ichiro Honjo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 10,720,306
- Issue date Jul 21, 2020
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method and electron microscope
- Patent number 10,714,308
- Issue date Jul 14, 2020
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reference sample with inclined support base, method for evaluating...
- Patent number 10,699,873
- Issue date Jun 30, 2020
- Kwansei Gakuin Educational Foundation
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a sample using an assembly comprising a scann...
- Patent number 10,651,009
- Issue date May 12, 2020
- DELMIC IP B.V.
- Jacob Pieter Hoogenboom
- G02 - OPTICS
Information Patent Grant
Method and device for characterizing an electron beam
- Patent number 10,586,683
- Issue date Mar 10, 2020
- Arcam AB
- Tomas Lock
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Local alignment point calibration method in die inspection
- Patent number 10,497,538
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device, calibration method of measurement device, and c...
- Patent number 10,438,771
- Issue date Oct 8, 2019
- Hitachi High-Technologies Corporation
- Michio Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, alignment method of charged partic...
- Patent number 10,312,053
- Issue date Jun 4, 2019
- Hitachi High-Technologies Corporation
- Kazuki Ishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and pattern inspection apparatus
- Patent number 10,281,415
- Issue date May 7, 2019
- NuFlare Technology, Inc.
- Takafumi Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 10,249,474
- Issue date Apr 2, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component handling assembly and method of adjusting a component han...
- Patent number 10,157,475
- Issue date Dec 18, 2018
- Ismeca Semiconductor Holding SA
- Pierrick Abrial
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample holder for scanning electron microscopy (SEM) and atomic for...
- Patent number 10,026,587
- Issue date Jul 17, 2018
- Instituto Mexicano del Petroleo
- Florentino Leyte Guerrero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for orienting a sample using a diffraction pattern
- Patent number 9,978,557
- Issue date May 22, 2018
- FEI Company
- John Francis Flanagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration standard with pre-determined features
- Patent number 9,797,924
- Issue date Oct 24, 2017
- Seagate Technology LLC
- Gennady Gauzner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
- Publication number 20240347314
- Publication date Oct 17, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GLOBAL AND LOCAL OPTIMIZATION OF IMAGING RESOLUTION IN A...
- Publication number 20240274398
- Publication date Aug 15, 2024
- Carl Zeiss MultiSEM GmbH
- Christof Riedesel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Alignment Free Ion Column
- Publication number 20240222067
- Publication date Jul 4, 2024
- FEI Company
- Radek Smolka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...
- Publication number 20230282443
- Publication date Sep 7, 2023
- Shânêl Ondrej
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMAGING A SAMPLE WITH A CHARGED PARTICLE BEAM DEVICE, MET...
- Publication number 20230253177
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Kulpreet Singh VIRDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE
- Publication number 20230245851
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Hermanus Adrianus DILLEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Height Metrology Using an E-Beam System
- Publication number 20220392742
- Publication date Dec 8, 2022
- IMEC vzw
- Gian Francesco Lorusso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINING THE DETERMINATION OF SINGLE AND MUTUAL, PRESET PRESERVING...
- Publication number 20220375718
- Publication date Nov 24, 2022
- Frederick Winter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CONTROLLING SAMPLE CH...
- Publication number 20220359152
- Publication date Nov 10, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Patrick Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS MATCH DETECTION METHOD, DETECTION SYSTEM, PREWARNING METH...
- Publication number 20220328364
- Publication date Oct 13, 2022
- ChangXin Memory Technologies, Inc.
- Weigang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY
- Publication number 20220277427
- Publication date Sep 1, 2022
- The Board of Regents of the University of Texas System
- Raquel Bromberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE CALIB...
- Publication number 20220246392
- Publication date Aug 4, 2022
- HITACHI HIGH-TECH CORPORATION
- Akio YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220122804
- Publication date Apr 21, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210313140
- Publication date Oct 7, 2021
- Kaori BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS
- Publication number 20210125807
- Publication date Apr 29, 2021
- GATAN, INC.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR BEAM POSITION VISUALIZATION
- Publication number 20210035775
- Publication date Feb 4, 2021
- FEI Company
- Branislav Straka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20200312615
- Publication date Oct 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFERENCE SAMPLE WITH INCLINED SUPPORT BASE, METHOD FOR EVALUATING...
- Publication number 20200279716
- Publication date Sep 3, 2020
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE
- Publication number 20200211819
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Hermanus Adrianus DILLEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...
- Publication number 20200152416
- Publication date May 14, 2020
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20190180979
- Publication date Jun 13, 2019
- Hitachi High-Technologies Corporation
- Toshiyuki YOKOSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFERENCE SAMPLE WITH INCLINED SUPPORT BASE, METHOD FOR EVALUATING...
- Publication number 20190148107
- Publication date May 16, 2019
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR ORIENTING A SAMPLE USING A DIFFRACTION PATTERN
- Publication number 20170309441
- Publication date Oct 26, 2017
- FEI Company
- John F. Flanagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE MICROSCOPE WITH ASTIGMATISM COMPENSATION AND ENERG...
- Publication number 20170221673
- Publication date Aug 3, 2017
- FEI Company
- Bohuslav Sed'a
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for inspecting a sample using an assembly comprising a scann...
- Publication number 20170221675
- Publication date Aug 3, 2017
- DELMIC B.V.
- Jacob Pieter HOOGENBOOM
- G02 - OPTICS
Information Patent Application
MEASUREMENT DEVICE, CALIBRATION METHOD OF MEASUREMENT DEVICE, AND C...
- Publication number 20170092462
- Publication date Mar 30, 2017
- Hitachi High-Technologies Corporation
- Michio HATANO
- G01 - MEASURING TESTING
Information Patent Application
CAD-ASSISTED TEM PREP RECIPE CREATION
- Publication number 20170062178
- Publication date Mar 2, 2017
- FEI Company
- Jason Arjavac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND...
- Publication number 20160300689
- Publication date Oct 13, 2016
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CALIBRATION OF A CD-SEM CHARACTERISATION TECHNIQUE
- Publication number 20160203945
- Publication date Jul 14, 2016
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Johann FOUCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CALIBRATING A SCANNING TRANSMISSION CHARGED-PARTICLE MICR...
- Publication number 20160013016
- Publication date Jan 14, 2016
- FEI Company
- Maximus Theodorus Otten
- H01 - BASIC ELECTRIC ELEMENTS

Calibration

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle microscope for examining a specimen, and method of...

Methods for high-performance electron microscopy

Method for calibrating a scanning charged particle microscope

Charged particle beam device and charged particle beam device calib...

Charged particle beam device

Method for calibrating a scanning charged particle microscope

Charged particle beam apparatus and method of controlling sample ch...

Charged particle beam device

Charged particle beam device

System and method for alignment of cathodoluminescence optics

Local alignment point calibration method in die inspection

System and method for beam position visualization

Electron microscope and specimen tilt angle adjustment method

Reference sample with inclined support base, method for evaluating...

Image processing system and method of processing images

Scanning electron microscope objective lens calibration using X-Y v...

Charged particle beam device

Measurement method and electron microscope

Reference sample with inclined support base, method for evaluating...

Method for inspecting a sample using an assembly comprising a scann...

Method and device for characterizing an electron beam

Local alignment point calibration method in die inspection

Measurement device, calibration method of measurement device, and c...

Charged particle beam apparatus, alignment method of charged partic...

Pattern inspection method and pattern inspection apparatus

Charged particle beam device

Component handling assembly and method of adjusting a component han...

Sample holder for scanning electron microscopy (SEM) and atomic for...

System for orienting a sample using a diffraction pattern

Calibration standard with pre-determined features

Patents Applicationslast 30 patents

TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY

METHOD OF GLOBAL AND LOCAL OPTIMIZATION OF IMAGING RESOLUTION IN A...

Method for Alignment Free Ion Column

TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...

METHOD OF IMAGING A SAMPLE WITH A CHARGED PARTICLE BEAM DEVICE, MET...

METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE

Pattern Height Metrology Using an E-Beam System

COMBINING THE DETERMINATION OF SINGLE AND MUTUAL, PRESET PRESERVING...

CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CONTROLLING SAMPLE CH...

APPARATUS MATCH DETECTION METHOD, DETECTION SYSTEM, PREWARNING METH...

METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY

CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM DEVICE CALIB...

Charged Particle Beam Device

Charged Particle Beam Device

SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS

SYSTEM AND METHOD FOR BEAM POSITION VISUALIZATION

Charged Particle Beam Device

REFERENCE SAMPLE WITH INCLINED SUPPORT BASE, METHOD FOR EVALUATING...

METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE

CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...

CHARGED PARTICLE BEAM DEVICE

REFERENCE SAMPLE WITH INCLINED SUPPORT BASE, METHOD FOR EVALUATING...

SYSTEM FOR ORIENTING A SAMPLE USING A DIFFRACTION PATTERN

CHARGED-PARTICLE MICROSCOPE WITH ASTIGMATISM COMPENSATION AND ENERG...

Method for inspecting a sample using an assembly comprising a scann...

MEASUREMENT DEVICE, CALIBRATION METHOD OF MEASUREMENT DEVICE, AND C...

CAD-ASSISTED TEM PREP RECIPE CREATION

SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND...

METHOD FOR CALIBRATION OF A CD-SEM CHARACTERISATION TECHNIQUE

METHOD OF CALIBRATING A SCANNING TRANSMISSION CHARGED-PARTICLE MICR...