Carbon layers

Industry

CPC
H01L21/3146

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3146Carbon layers

Industries

Patents Grantslast 30 patents

Information Patent Grant
PECVD films for EUV lithography
- Patent number 9,618,846
- Issue date Apr 11, 2017
- Lam Research Corporation
- Nader Shamma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
PECVD films for EUV lithography
- Patent number 9,304,396
- Issue date Apr 5, 2016
- Lam Research Corporation
- Nader Shamma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Boron-doped carbon-based hardmask etch processing
- Patent number 9,129,911
- Issue date Sep 8, 2015
- Applied Materials, Inc.
- Kenny Linh Doan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of aftertreatment of amorphous hydrocarbon film and method f...
- Patent number 8,936,829
- Issue date Jan 20, 2015
- Tokyo Electron Limited
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern forming method and manufacturing method of semiconductor de...
- Patent number 8,815,495
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Masato Kushibiki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface treatment for a fluorocarbon film
- Patent number 8,765,605
- Issue date Jul 1, 2014
- Tokyo Electron Limited
- Masahiro Horigome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming amorphous carbon nitride film, amorphous carbon...
- Patent number 8,741,396
- Issue date Jun 3, 2014
- Tokyo Electron Limited
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method for forming structure including amorphous carbon...
- Patent number 8,652,973
- Issue date Feb 18, 2014
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device having multi-layered...
- Patent number 8,609,543
- Issue date Dec 17, 2013
- Hynix Semiconductor Inc.
- Myung-Ok Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory cell that includes a carbon-based memory element and methods...
- Patent number 8,557,685
- Issue date Oct 15, 2013
- Sandisk 3D LLC
- Huiwen Xu
- G11 - INFORMATION STORAGE
Information Patent Grant
Adhesiveness of fluorocarbon (CFX) film by doping of amorphous carbon
- Patent number 8,557,714
- Issue date Oct 15, 2013
- Tokyo Electron Limited
- Yoshiyuki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Memory cell that includes a carbon-based reversible resistance swit...
- Patent number 8,551,855
- Issue date Oct 8, 2013
- Sandisk 3D LLC
- Huiwen Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method for passivation of silicon wafers
- Patent number 8,541,317
- Issue date Sep 24, 2013
- ABB Technology AG
- Kranthi Akurati
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Memory cell that includes a carbon-based memory element and methods...
- Patent number 8,466,044
- Issue date Jun 18, 2013
- Sandisk 3D LLC
- Huiwen Xu
- G11 - INFORMATION STORAGE
Information Patent Grant
Method for processing amorphous carbon film, and semiconductor devi...
- Patent number 8,461,047
- Issue date Jun 11, 2013
- Tokyo Electron Limited
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced adhesion of PECVD carbon on dielectric materials by provid...
- Patent number 8,415,257
- Issue date Apr 9, 2013
- GLOBALFOUNDRIES Inc.
- Hartmut Ruelke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for reactive ion etching a layer of diamond like carbon
- Patent number 8,409,458
- Issue date Apr 2, 2013
- Texas Instruments Incorporated
- Erika Leigh Shoemaker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Air gap integration scheme
- Patent number 8,389,376
- Issue date Mar 5, 2013
- Applied Materials, Inc.
- Alexandros T. Demos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aftertreatment method for amorphous carbon film
- Patent number 8,377,818
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Frequency doubling using a photo-resist template mask
- Patent number 8,357,618
- Issue date Jan 22, 2013
- Applied Materials, Inc.
- Christopher Dennis Bencher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,349,679
- Issue date Jan 8, 2013
- Fujitsu Semiconductor Limited
- Wensheng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature process for depositing a high extinction coefficien...
- Patent number 8,338,316
- Issue date Dec 25, 2012
- Applied Materials, Inc.
- Vijay Parihar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and manufacturing method therefor
- Patent number 8,334,204
- Issue date Dec 18, 2012
- Tokyo Electron Limited
- Takaaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for purifying acetylene gas for use in semiconductor processes
- Patent number 8,309,473
- Issue date Nov 13, 2012
- Novellus Systems, Inc.
- Gishun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Field effect transistors, methods of fabricating a carbon-insulatin...
- Patent number 8,310,014
- Issue date Nov 13, 2012
- Samsung Electronics Co., Ltd.
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation mask forming method
- Patent number 8,241,512
- Issue date Aug 14, 2012
- Samsung Electronics Co., Ltd.
- Yong-Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor-on-diamond devices and associated methods
- Patent number 8,236,594
- Issue date Aug 7, 2012
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Batch processing method for forming structure including amorphous c...
- Patent number 8,222,162
- Issue date Jul 17, 2012
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor-on-diamond devices and methods of forming
- Patent number 8,168,969
- Issue date May 1, 2012
- RiteDia Corporation
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low dielectric constant films and manufacturing method thereof, as...
- Patent number 8,158,536
- Issue date Apr 17, 2012
- RORZE Corporation
- Toshio Sakurai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PECVD FILMS FOR EUV LITHOGRAPHY
- Publication number 20140239462
- Publication date Aug 28, 2014
- Nader Shamma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BORON-DOPED CARBON-BASED HARDMASK ETCH PROCESSING
- Publication number 20140213059
- Publication date Jul 31, 2014
- Kenny Linh Doan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR-ON-DIAMOND DEVICES AND ASSOCIATED METHODS
- Publication number 20130200394
- Publication date Aug 8, 2013
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DE...
- Publication number 20130122429
- Publication date May 16, 2013
- TOKYO ELECTRON LIMITED
- Masato KUSHIBIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING
- Publication number 20120273775
- Publication date Nov 1, 2012
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON...
- Publication number 20120238107
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20120208373
- Publication date Aug 16, 2012
- Applied Materials, Inc.
- DEENESH PADHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD OF AMORPHOUS CARBON FILM AND MANUFACTURING METH...
- Publication number 20120156884
- Publication date Jun 21, 2012
- TOKYO ELECTRON LIMITED
- Toshihisa Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESIVENESS OF FLUOROCARBON (CFX) FILM BY DOPING OF AMORPHOUS CARBON
- Publication number 20120100725
- Publication date Apr 26, 2012
- TOKYO ELECTRON LIMITED
- Yoshiyuki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120077288
- Publication date Mar 29, 2012
- FUJITSU SEMICONDUCTOR LIMITED
- Wensheng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Field effect transistors, methods of fabricating a carbon-insulatin...
- Publication number 20120043625
- Publication date Feb 23, 2012
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT FOR A FLUOROCARBON FILM
- Publication number 20110318919
- Publication date Dec 29, 2011
- Tokyo Electron Limited
- Masahiro Horigome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE PROCESS FOR DEPOSITING A HIGH EXTINCTION COEFFICIEN...
- Publication number 20110223773
- Publication date Sep 15, 2011
- APPLIED MATERIALS, INC.
- Vijay Parihar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AMORPHOUS CARBON NITRIDE FILM, AMORPHOUS CARBON...
- Publication number 20110201206
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Method for Passivation of Silicon Wafers
- Publication number 20110189861
- Publication date Aug 4, 2011
- ABB TECHNOLOGY AG
- Magnus Kunow
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING
- Publication number 20110163312
- Publication date Jul 7, 2011
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Field effect transistors, methods of fabricating a carbon-insulatin...
- Publication number 20110121409
- Publication date May 26, 2011
- SAMSUNG ELECTRONICS CO., LTD.
- David Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
- Publication number 20110104400
- Publication date May 5, 2011
- Deenesh Padhi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED ADHESION OF PECVD CARBON ON DIELECTRIC MATERIALS BY PROVID...
- Publication number 20110104866
- Publication date May 5, 2011
- Hartmut Ruelke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY CELL THAT INCLUDES A CARBON-BASED REVERSIBLE RESISTANCE SWIT...
- Publication number 20110095257
- Publication date Apr 28, 2011
- Huiwen Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DE...
- Publication number 20110065049
- Publication date Mar 17, 2011
- TOKYO ELECTRON LIMITED
- Masato KUSHIBIKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PROCESSING AMORPHOUS CARBON FILM, AND SEMICONDUCTOR DEVI...
- Publication number 20110053375
- Publication date Mar 3, 2011
- TOKYO ELECTRON LIMITED
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
- Publication number 20110001197
- Publication date Jan 6, 2011
- TOKYO ELECTRON LIMITED
- Noriaki Fukiage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20100323516
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- Hiraku Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS C...
- Publication number 20100311251
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF AFTERTREATMENT OF AMORPHOUS HYDROCARBON FILM AND METHOD F...
- Publication number 20100304014
- Publication date Dec 2, 2010
- TOKYO ELECTRON LIMITED
- Hiraku Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PURIFYING ACETYLENE GAS FOR USE IN SEMICONDUCTOR PROCESSES
- Publication number 20100297853
- Publication date Nov 25, 2010
- Novellus
- Gishun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING HIGHLY CONFORMAL AMORPHOUS CARBON LAYER
- Publication number 20100291713
- Publication date Nov 18, 2010
- ASM JAPAN K.K.
- Woo-Jin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING AN AMORPHOUS CARBON LAYER AND METHODS OF FORMING...
- Publication number 20100258526
- Publication date Oct 14, 2010
- Jaihyung Won
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low dielectric constant films and manufacturing method thereof, as...
- Publication number 20100237476
- Publication date Sep 23, 2010
- RORZE CORPORATION
- Toshio Sakurai
- H01 - BASIC ELECTRIC ELEMENTS

Carbon layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

PECVD films for EUV lithography

PECVD films for EUV lithography

Boron-doped carbon-based hardmask etch processing

Method of aftertreatment of amorphous hydrocarbon film and method f...

Pattern forming method and manufacturing method of semiconductor de...

Surface treatment for a fluorocarbon film

Method for forming amorphous carbon nitride film, amorphous carbon...

Processing method for forming structure including amorphous carbon...

Method for manufacturing semiconductor device having multi-layered...

Memory cell that includes a carbon-based memory element and methods...

Adhesiveness of fluorocarbon (CFX) film by doping of amorphous carbon

Memory cell that includes a carbon-based reversible resistance swit...

Deposition method for passivation of silicon wafers

Memory cell that includes a carbon-based memory element and methods...

Method for processing amorphous carbon film, and semiconductor devi...

Enhanced adhesion of PECVD carbon on dielectric materials by provid...

Process for reactive ion etching a layer of diamond like carbon

Air gap integration scheme

Aftertreatment method for amorphous carbon film

Frequency doubling using a photo-resist template mask

Semiconductor device and method of manufacturing the same

Low temperature process for depositing a high extinction coefficien...

Semiconductor device and manufacturing method therefor

Method for purifying acetylene gas for use in semiconductor processes

Field effect transistors, methods of fabricating a carbon-insulatin...

Ion implantation mask forming method

Semiconductor-on-diamond devices and associated methods

Batch processing method for forming structure including amorphous c...

Semiconductor-on-diamond devices and methods of forming

Low dielectric constant films and manufacturing method thereof, as...

Patents Applicationslast 30 patents

PECVD FILMS FOR EUV LITHOGRAPHY

BORON-DOPED CARBON-BASED HARDMASK ETCH PROCESSING

SEMICONDUCTOR-ON-DIAMOND DEVICES AND ASSOCIATED METHODS

PATTERN FORMING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DE...

SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING

PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON...

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

FILM FORMING METHOD OF AMORPHOUS CARBON FILM AND MANUFACTURING METH...

ADHESIVENESS OF FLUOROCARBON (CFX) FILM BY DOPING OF AMORPHOUS CARBON

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

Field effect transistors, methods of fabricating a carbon-insulatin...

SURFACE TREATMENT FOR A FLUOROCARBON FILM

LOW TEMPERATURE PROCESS FOR DEPOSITING A HIGH EXTINCTION COEFFICIEN...

METHOD FOR FORMING AMORPHOUS CARBON NITRIDE FILM, AMORPHOUS CARBON...

Deposition Method for Passivation of Silicon Wafers

SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING

Field effect transistors, methods of fabricating a carbon-insulatin...

METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...

ENHANCED ADHESION OF PECVD CARBON ON DIELECTRIC MATERIALS BY PROVID...

MEMORY CELL THAT INCLUDES A CARBON-BASED REVERSIBLE RESISTANCE SWIT...

PATTERN FORMING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DE...

METHOD FOR PROCESSING AMORPHOUS CARBON FILM, AND SEMICONDUCTOR DEVI...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

BATCH PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS C...

METHOD OF AFTERTREATMENT OF AMORPHOUS HYDROCARBON FILM AND METHOD F...

METHOD FOR PURIFYING ACETYLENE GAS FOR USE IN SEMICONDUCTOR PROCESSES

METHOD OF FORMING HIGHLY CONFORMAL AMORPHOUS CARBON LAYER

METHODS OF FORMING AN AMORPHOUS CARBON LAYER AND METHODS OF FORMING...

Low dielectric constant films and manufacturing method thereof, as...