Carbon nitride

Industry

CPC
C23C16/347

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/347Carbon nitride

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming a nitrogen-containing carbon film and system for...
- Patent number 12,068,154
- Issue date Aug 20, 2024
- ASM IP Holding B.V.
- Hirotsugu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 12,065,736
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Naoya Miyashita
- B08 - CLEANING
Information Patent Grant
Method and system for forming a conformal silicon carbon nitride la...
- Patent number 12,031,205
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Ling Chi Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,967,500
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 11,788,188
- Issue date Oct 17, 2023
- Kokusai Electric Corporation
- Naoya Miyashita
- B08 - CLEANING
Information Patent Grant
Process of manufacture a nuclear component with metal substrate by...
- Patent number 11,634,810
- Issue date Apr 25, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Frédéric Schuster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vanadium nitride film, and member coated with vanadium nitride film...
- Patent number 11,613,463
- Issue date Mar 28, 2023
- Dowa Thermotech Co., Ltd.
- Satoru Habuka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Nuclear reactor component having a coating of amorphous chromium ca...
- Patent number 11,545,273
- Issue date Jan 3, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Frédéric Schuster
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Coated tool, and cutting tool comprising same
- Patent number 11,517,966
- Issue date Dec 6, 2022
- Kyocera Corporation
- Yuusaku Sugawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Coated tool and cutting tool including the same
- Patent number 11,311,946
- Issue date Apr 26, 2022
- Kyocera Corporation
- Ayano Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Surface-coated cutting tool and method for manufacturing the same
- Patent number 11,130,181
- Issue date Sep 28, 2021
- Sumitomo Electric Hardmetal Corp.
- Anongsack Paseuth
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vanadium nitride film, and member coated with vanadium nitride film...
- Patent number 11,014,814
- Issue date May 25, 2021
- Dowa Thermotech Co., Ltd.
- Satoru Habuka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Amorphous carbon thin film, manufacturing method thereof and optica...
- Patent number 11,004,659
- Issue date May 11, 2021
- National Chiao Tung University
- Jih-Perng Leu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graded in-situ charge trapping layers to enable electrostatic chuck...
- Patent number 10,930,475
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using DLI-MOCVD to provide a nuclear reactor component wi...
- Patent number 10,811,146
- Issue date Oct 20, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Frédéric Schuster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool
- Patent number 10,744,568
- Issue date Aug 18, 2020
- KYOCERA Corporation
- Kou Ri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,734,218
- Issue date Aug 4, 2020
- Kokusai Electric Corporation
- Arito Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated extrusion tool
- Patent number 10,675,665
- Issue date Jun 9, 2020
- IHI Ionbond AG.
- Michael Auger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sliding member and method for producing the same
- Patent number 10,669,624
- Issue date Jun 2, 2020
- Toyota Jidosha Kabushiki Kaisha
- Kazuyoshi Manabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated cutting tool
- Patent number 10,612,133
- Issue date Apr 7, 2020
- Tungaloy Corporation
- Hiroyuki Satoh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Coated cutting tool
- Patent number 10,612,134
- Issue date Apr 7, 2020
- Tungaloy Corporation
- Hiroyuki Satoh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Surface-coated cutting tool in which hard coating layers exhibits e...
- Patent number 10,456,841
- Issue date Oct 29, 2019
- Mitsubishi Materials Corporation
- Kenichi Sato
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for manufacturing semiconductor devices
- Patent number 10,262,865
- Issue date Apr 16, 2019
- ASM IP Holding B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
G-C3N4 film
- Patent number 10,252,253
- Issue date Apr 9, 2019
- Riken
- Daigo Miyajima
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of manufacturing integrated circuit device
- Patent number 10,176,989
- Issue date Jan 8, 2019
- Samsung Electronics Co., Ltd.
- Yong-suk Tak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Graded in-situ charge trapping layers to enable electrostatic chuck...
- Patent number 10,128,088
- Issue date Nov 13, 2018
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organodisilane precursors for ALD/CVD silicon-containing film appli...
- Patent number 10,006,122
- Issue date Jun 26, 2018
- American Air Liquide, Inc.
- Guillaume Husson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated tool
- Patent number 9,970,104
- Issue date May 15, 2018
- Kyocera Corporation
- Takahito Tanibuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CXNYHZ film, deposition method, magnetic recording medium and metho...
- Patent number 9,524,742
- Issue date Dec 20, 2016
- Youtec Co., Ltd.
- Haruhito Hayakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amino-silyl amine compound, method for preparing the same and silic...
- Patent number 9,245,740
- Issue date Jan 26, 2016
- DNF Co., Ltd.
- Se Jin Jang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240363334
- Publication date Oct 31, 2024
- Kokusai Electric Corporation
- Keitaro HAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING BORON CARBON NITRIDE
- Publication number 20240222115
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Antti Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...
- Publication number 20230313371
- Publication date Oct 5, 2023
- Kokusai Electric Corporation
- Naoya MIYASHITA
- B08 - CLEANING
Information Patent Application
Process of Manufacture a Nuclear Component with Metal Substrate by...
- Publication number 20230227967
- Publication date Jul 20, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Frédéric SCHUSTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING A CONFORMAL SILICON CARBON NITRIDE LA...
- Publication number 20230167544
- Publication date Jun 1, 2023
- ASM IP HOLDING B.V.
- Ling Chi Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and Method for Thermally Cracking Ammonia
- Publication number 20210395883
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A NITROGEN-CONTAINING CARBON FILM AND SYSTEM FOR...
- Publication number 20210320003
- Publication date Oct 14, 2021
- ASM IP HOLDING B.V.
- Hirotsugu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VANADIUM NITRIDE FILM, AND MEMBER COATED WITH VANADIUM NITRIDE FILM...
- Publication number 20210246023
- Publication date Aug 12, 2021
- DOWA THERMOTECH CO., LTD.
- Satoru HABUKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATED TOOL, AND CUTTING TOOL COMPRISING SAME
- Publication number 20210114115
- Publication date Apr 22, 2021
- KYOCERA CORPORATION
- Yuusaku SUGAWA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATED TOOL AND CUTTING TOOL INCLUDING THE SAME
- Publication number 20210107066
- Publication date Apr 15, 2021
- KYOCERA CORPORATION
- Ayano TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
NUCLEAR COMPONENT WITH AMORPHOUS CRC COATING
- Publication number 20210074439
- Publication date Mar 11, 2021
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Frédéric SCHUSTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...
- Publication number 20200407845
- Publication date Dec 31, 2020
- Kokusai Electric Corporation
- Naoya MIYASHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200335328
- Publication date Oct 22, 2020
- Kokusai Electric Corporation
- Arito OGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface-Coated Cutting Tool and Method for Manufacturing the Same
- Publication number 20200061716
- Publication date Feb 27, 2020
- SUMITOMO ELECTRIC HARDMETAL CORP.
- Anongsack PASEUTH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
NUCLEAR COMPONENT WITH AMORPHOUS CRC COATING, METHOD FOR THE PRODUC...
- Publication number 20200035369
- Publication date Jan 30, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Frédéric SCHUSTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NUCLEAR COMPONENT WITH A METAL SUBSTRATE, METHOD FOR THE PRODUCTION...
- Publication number 20200032387
- Publication date Jan 30, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Frédéric SCHUSTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRADED IN-SITU CHARGE TRAPPING LAYERS TO ENABLE ELECTROSTATIC CHUCK...
- Publication number 20190252158
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Prashant Kumar KULSHRESHTHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMORPHOUS CARBON THIN FILM, MANUFACTURING METHOD THEREOF AND OPTICA...
- Publication number 20190122862
- Publication date Apr 25, 2019
- NATIONAL CHIAO-TUNG UNIVERSITY
- JIH-PERNG LEU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190019673
- Publication date Jan 17, 2019
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20180301342
- Publication date Oct 18, 2018
- ASM IP HOLDING B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
- Publication number 20180286676
- Publication date Oct 4, 2018
- Samsung Electronics Co., Ltd.
- Yong-suk TAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON DOPED TUNGSTEN CARBIDE FOR HARDMASK APPLICATIONS
- Publication number 20180218902
- Publication date Aug 2, 2018
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL
- Publication number 20180112308
- Publication date Apr 26, 2018
- TUNGALOY CORPORATION
- Hiroyuki SATOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL
- Publication number 20180105931
- Publication date Apr 19, 2018
- TUNGALOY CORPORATION
- Hiroyuki SATOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLIDING MEMBER AND METHOD FOR PRODUCING THE SAME
- Publication number 20180087151
- Publication date Mar 29, 2018
- Toyota Jidosha Kabushiki Kaisha
- Kazuyoshi MANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYERS EXHIBITS E...
- Publication number 20180071830
- Publication date Mar 15, 2018
- MITSUBISHI MATERIALS CORPORATION
- Kenichi SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARD COATING
- Publication number 20180073124
- Publication date Mar 15, 2018
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Hiroaki NII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED TOOL
- Publication number 20180015548
- Publication date Jan 18, 2018
- KYOCERA CORPORATION
- Kou RI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYER EXHIBITS EX...
- Publication number 20170298505
- Publication date Oct 19, 2017
- MITSUBISHI MATERIALS CORPORATION
- Sho TATSUOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ORGANODISILANE PRECURSORS FOR ALD/CVD SILICON-CONTAINING FILM APPLI...
- Publication number 20170298510
- Publication date Oct 19, 2017
- American Air Liquide, Inc.
- Guillaume HUSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Carbon nitride

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming a nitrogen-containing carbon film and system for...

Cleaning method, method of manufacturing semiconductor device, and...

Method and system for forming a conformal silicon carbon nitride la...

Method of manufacturing semiconductor device, substrate processing...

Cleaning method, method of manufacturing semiconductor device, and...

Process of manufacture a nuclear component with metal substrate by...

Vanadium nitride film, and member coated with vanadium nitride film...

Nuclear reactor component having a coating of amorphous chromium ca...

Coated tool, and cutting tool comprising same

Coated tool and cutting tool including the same

Surface-coated cutting tool and method for manufacturing the same

Vanadium nitride film, and member coated with vanadium nitride film...

Amorphous carbon thin film, manufacturing method thereof and optica...

Graded in-situ charge trapping layers to enable electrostatic chuck...

Method of using DLI-MOCVD to provide a nuclear reactor component wi...

Coated tool

Method of manufacturing semiconductor device, substrate processing...

Coated extrusion tool

Sliding member and method for producing the same

Coated cutting tool

Coated cutting tool

Surface-coated cutting tool in which hard coating layers exhibits e...

Methods for manufacturing semiconductor devices

G-C3N4 film

Method of manufacturing integrated circuit device

Graded in-situ charge trapping layers to enable electrostatic chuck...

Organodisilane precursors for ALD/CVD silicon-containing film appli...

Coated tool

CXNYHZ film, deposition method, magnetic recording medium and metho...

Amino-silyl amine compound, method for preparing the same and silic...

Patents Applicationslast 30 patents

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD AND SYSTEM FOR DEPOSITING BORON CARBON NITRIDE

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...

Process of Manufacture a Nuclear Component with Metal Substrate by...

METHOD AND SYSTEM FOR FORMING A CONFORMAL SILICON CARBON NITRIDE LA...

System and Method for Thermally Cracking Ammonia

METHOD OF FORMING A NITROGEN-CONTAINING CARBON FILM AND SYSTEM FOR...

VANADIUM NITRIDE FILM, AND MEMBER COATED WITH VANADIUM NITRIDE FILM...

COATED TOOL, AND CUTTING TOOL COMPRISING SAME

COATED TOOL AND CUTTING TOOL INCLUDING THE SAME

NUCLEAR COMPONENT WITH AMORPHOUS CRC COATING

CLEANING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Surface-Coated Cutting Tool and Method for Manufacturing the Same

NUCLEAR COMPONENT WITH AMORPHOUS CRC COATING, METHOD FOR THE PRODUC...

NUCLEAR COMPONENT WITH A METAL SUBSTRATE, METHOD FOR THE PRODUCTION...

GRADED IN-SITU CHARGE TRAPPING LAYERS TO ENABLE ELECTROSTATIC CHUCK...

AMORPHOUS CARBON THIN FILM, MANUFACTURING METHOD THEREOF AND OPTICA...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES

METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE

BORON DOPED TUNGSTEN CARBIDE FOR HARDMASK APPLICATIONS

COATED CUTTING TOOL

COATED CUTTING TOOL

SLIDING MEMBER AND METHOD FOR PRODUCING THE SAME

SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYERS EXHIBITS E...

HARD COATING

COATED TOOL

SURFACE-COATED CUTTING TOOL IN WHICH HARD COATING LAYER EXHIBITS EX...

ORGANODISILANE PRECURSORS FOR ALD/CVD SILICON-CONTAINING FILM APPLI...