Changing orientation of the substrate

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CPC
H01L21/67718

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67718Changing orientation of the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 12,159,800
- Issue date Dec 3, 2024
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 12,131,930
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Asaf Schlezinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor flipper
- Patent number 12,068,190
- Issue date Aug 20, 2024
- Yaskawa Europe Technology Ltd.
- Ran Klumel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 11,984,337
- Issue date May 14, 2024
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to evaporate an OLED layer stack in a vertical or...
- Patent number 11,972,964
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Sebastian Gunther Zang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
- Patent number 11,908,720
- Issue date Feb 20, 2024
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Linghan Shen
- B08 - CLEANING
Information Patent Grant
Substrate holding hand and substrate conveying apparatus
- Patent number 11,837,485
- Issue date Dec 5, 2023
- Kawasaki Jukogyo Kabushiki Kaisha
- Tetsuya Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 11,817,337
- Issue date Nov 14, 2023
- Tokyo Electron Limited
- Munehisa Kodama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing glass film
- Patent number 11,787,724
- Issue date Oct 17, 2023
- Nippon Electric Glass Co., Ltd.
- Hiroki Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus
- Patent number 11,721,568
- Issue date Aug 8, 2023
- Samsung Electronics Co., Ltd.
- Sangho Jang
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Method and gripper for rotating a cleanroom container
- Patent number 11,664,255
- Issue date May 30, 2023
- Schiller Automatisierungstechnik GmbH
- Tobias Nirschl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for transferring wafers
- Patent number 11,551,958
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Hsung Yang
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate positioning apparatus, substrate positioning method, and...
- Patent number 11,545,383
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Tetsuya Maki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device for display panel
- Patent number 11,449,040
- Issue date Sep 20, 2022
- HKC CORPORATION LIMITED
- Chung-Kuang Chien
- B08 - CLEANING
Information Patent Grant
Substrate transporter and substrate transport method
- Patent number 11,276,595
- Issue date Mar 15, 2022
- SCREEN Holdings Co., Ltd.
- Yukiteru Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 11,264,257
- Issue date Mar 1, 2022
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Article transporter in semiconductor fabrication
- Patent number 11,251,063
- Issue date Feb 15, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jheng-Si Su
- B24 - GRINDING POLISHING
Information Patent Grant
Weighing apparatus, substrate liquid processing apparatus, weighing...
- Patent number 11,152,234
- Issue date Oct 19, 2021
- Tokyo Electron Limited
- Teruaki Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonding equipment
- Patent number 11,145,618
- Issue date Oct 12, 2021
- SHARP KABUSHIKI KAISHA
- Katsuji Iguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead transport vehicle, overhead transport system, and control...
- Patent number 11,069,549
- Issue date Jul 20, 2021
- Murata Machinery, Ltd.
- Eiji Wada
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Systems and methods for fixed focus ring processing
- Patent number 10,950,483
- Issue date Mar 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Huan-Lisng Tzeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,916,456
- Issue date Feb 9, 2021
- Tokyo Electron Limited
- Hironobu Hyakutake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic component mounting apparatus
- Patent number 10,910,248
- Issue date Feb 2, 2021
- Shinkawa Ltd.
- Kohei Seyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer placement position determination method and sem...
- Patent number 10,903,099
- Issue date Jan 26, 2021
- Sumco Corporation
- Ikuhiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,818,532
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Keiji Onzuka
- B08 - CLEANING
Information Patent Grant
Article transferring method in semiconductor fabrication
- Patent number 10,804,133
- Issue date Oct 13, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jheng-Si Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic element inspection equipment and chip inspection method...
- Patent number 10,794,951
- Issue date Oct 6, 2020
- Winbond Electronics Corp.
- Ting-Ming Fu
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Turn table transport carriage
- Patent number 10,737,365
- Issue date Aug 11, 2020
- Shin-Etsu Handotai Co., Ltd.
- Michito Sato
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate transporter and substrate transport method
- Patent number 10,734,266
- Issue date Aug 4, 2020
- SCREEN Holdings Co., Ltd.
- Yukiteru Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inverting device, substrate processing apparatus, and sub...
- Patent number 10,622,242
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Ryo Muramoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HOLDER, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSF...
- Publication number 20250079217
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Yukiyoshi Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250038028
- Publication date Jan 30, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLACK WHEELS FOR TRANSPORTING ULTRA-THIN SILICON WAFER
- Publication number 20250038026
- Publication date Jan 30, 2025
- TCL ZHONGHUAN RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Muren BAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM
- Publication number 20240429078
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Asaf SCHLEZINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONNECTING SOLAR CELLS
- Publication number 20240372031
- Publication date Nov 7, 2024
- MONDRAGON ASSEMBLY, S.COOP.
- Jean-Philippe AGUERRE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLIPPING APPARATUS
- Publication number 20240347361
- Publication date Oct 17, 2024
- ACM RESEARCH (SHANGHAI), INC.
- He Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240258144
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Itsuki KAJINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240206307
- Publication date Jun 20, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATION METHOD OF BONDED SUBSTRATES
- Publication number 20240194492
- Publication date Jun 13, 2024
- SKY TECH INC.
- JUNG-HUA CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PICKING AND PLACING APPARATUS
- Publication number 20240186165
- Publication date Jun 6, 2024
- HERMES-EPITEK CORPORATION
- Cheng-Huang Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE HANDLING ARCHITECTURE FOR HIGH WORKPIECE THROUGHPUT
- Publication number 20240145270
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE HANDLING ARCHITECTURE FOR HIGH WORKPIECE THROUGHPUT
- Publication number 20240145271
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105483
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105482
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105484
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105486
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Kenji AMAHISA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240030047
- Publication date Jan 25, 2024
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20230282493
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Keita HIRASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230147919
- Publication date May 11, 2023
- SEMES CO., LTD.
- Gui Su PARK
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230096569
- Publication date Mar 30, 2023
- SEMES CO., LTD.
- Jun Young CHOI
- B08 - CLEANING
Information Patent Application
INSPECTION SYSTEM
- Publication number 20230075394
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Asaf SCHLEZINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODOLOGY FOR SUBSTRATE TO CATHODE PLANARITY AND CENTERING ALIGNMENT
- Publication number 20220406640
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Thomas BREZOCZKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD TO EVAPORATE AN OLED LAYER STACK IN A VERTICAL OR...
- Publication number 20220293892
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Sebastian Gunther ZANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD TO EVAPORATE AN OLED LAYER STACK IN A VERTICAL OR...
- Publication number 20220254669
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Sebastian Gunther ZANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FLIPPER
- Publication number 20220181194
- Publication date Jun 9, 2022
- Yaskawa Europe Technology Ltd.
- Ran KLUMEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SELF-ASSEMBLING SEMICONDUCTOR LIGHT-EMITTING DIODES
- Publication number 20220139747
- Publication date May 5, 2022
- LG ELECTRONICS INC.
- Inbum YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMP WAFER CLEANING EQUIPMENT, WAFER TRANSFER ROBOT AND WAFER FLIPPI...
- Publication number 20210398834
- Publication date Dec 23, 2021
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Linghan Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TRANSFERRING WAFERS
- Publication number 20210366752
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-Hsung Yang
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210327738
- Publication date Oct 21, 2021
- TOKYO ELECTRON LIMITED
- Munehisa KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITIONING APPARATUS, SUBSTRATE POSITIONING METHOD, AND...
- Publication number 20210249293
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Tetsuya Maki
- H01 - BASIC ELECTRIC ELEMENTS

Changing orientation of the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device for self-assembling semiconductor light-emitting diodes

Inspection system

Semiconductor flipper

Device for self-assembling semiconductor light-emitting diodes

System and method to evaporate an OLED layer stack in a vertical or...

CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...

Substrate holding hand and substrate conveying apparatus

Substrate processing system and substrate processing method

Method for producing glass film

Substrate transfer apparatus

Method and gripper for rotating a cleanroom container

Apparatus and method for transferring wafers

Substrate positioning apparatus, substrate positioning method, and...

Cleaning device for display panel

Substrate transporter and substrate transport method

Device for self-assembling semiconductor light-emitting diodes

Article transporter in semiconductor fabrication

Weighing apparatus, substrate liquid processing apparatus, weighing...

Bonding equipment

Overhead transport vehicle, overhead transport system, and control...

Systems and methods for fixed focus ring processing

Substrate liquid processing apparatus and substrate liquid processi...

Electronic component mounting apparatus

Semiconductor wafer placement position determination method and sem...

Substrate processing apparatus

Article transferring method in semiconductor fabrication

Electronic element inspection equipment and chip inspection method...

Turn table transport carriage

Substrate transporter and substrate transport method

Substrate inverting device, substrate processing apparatus, and sub...

Patents Applicationslast 30 patents

SUBSTRATE HOLDER, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSF...

SUBSTRATE PROCESSING SYSTEM

BLACK WHEELS FOR TRANSPORTING ULTRA-THIN SILICON WAFER

INSPECTION SYSTEM

APPARATUS AND METHOD FOR CONNECTING SOLAR CELLS

FLIPPING APPARATUS

CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS

MANUFACTURING DEVICE OF DISPLAY DEVICE

SEPARATION METHOD OF BONDED SUBSTRATES

WAFER PICKING AND PLACING APPARATUS

WORKPIECE HANDLING ARCHITECTURE FOR HIGH WORKPIECE THROUGHPUT

WORKPIECE HANDLING ARCHITECTURE FOR HIGH WORKPIECE THROUGHPUT

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

APPARATUS AND METHOD FOR TREATING SUBSTRATE

INSPECTION SYSTEM

METHODOLOGY FOR SUBSTRATE TO CATHODE PLANARITY AND CENTERING ALIGNMENT

SYSTEM AND METHOD TO EVAPORATE AN OLED LAYER STACK IN A VERTICAL OR...

SYSTEM AND METHOD TO EVAPORATE AN OLED LAYER STACK IN A VERTICAL OR...

SEMICONDUCTOR FLIPPER

DEVICE FOR SELF-ASSEMBLING SEMICONDUCTOR LIGHT-EMITTING DIODES

CMP WAFER CLEANING EQUIPMENT, WAFER TRANSFER ROBOT AND WAFER FLIPPI...

APPARATUS AND METHOD FOR TRANSFERRING WAFERS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE POSITIONING APPARATUS, SUBSTRATE POSITIONING METHOD, AND...