characterised by a coating or a hardness or a material

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CPC
H01L21/68757

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68757characterised by a coating or a hardness or a material

Industries

Patents Grantslast 30 patents

Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer placement table
- Patent number 12,150,215
- Issue date Nov 19, 2024
- NGK Insulators, Ltd.
- Seiya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz susceptor for accurate non-contact temperature measurement
- Patent number 12,134,835
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- C30 - CRYSTAL GROWTH
Information Patent Grant
Superstrate and method of making it
- Patent number 12,136,564
- Issue date Nov 5, 2024
- Canon Kabushiki Kaisha
- Fen Wan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment with high temperature resistant...
- Patent number 12,128,494
- Issue date Oct 29, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck and method for manufacturing electrostatic chuck
- Patent number 12,125,731
- Issue date Oct 22, 2024
- Kyocera Corporation
- Hiroshi Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminate and method for producing same
- Patent number 12,116,671
- Issue date Oct 15, 2024
- Resonac Corporation
- Akira Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoupled XY parallel micro-positioning stage
- Patent number 12,106,999
- Issue date Oct 1, 2024
- GUANGDONG UNIVERSITY OF TECHNOLOGY
- Jian Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 12,106,994
- Issue date Oct 1, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table and method of manufacturing the same
- Patent number 12,087,613
- Issue date Sep 10, 2024
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microstructure control of conducting materials through surface coat...
- Patent number 12,084,763
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Marc Shull
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer placement table
- Patent number 12,087,609
- Issue date Sep 10, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support plate for localized heating in thermal processing systems
- Patent number 12,080,568
- Issue date Sep 3, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamping jig and cleaning device
- Patent number 12,057,328
- Issue date Aug 6, 2024
- Kyocera Corporation
- Hiroshi Hamashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bipolar electrostatic chuck to limit DC discharge
- Patent number 12,057,339
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater component
- Patent number 12,046,459
- Issue date Jul 23, 2024
- Tocalo Co., Ltd.
- Shikou Abukawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck, focus ring, support base, plasma processing ap...
- Patent number 12,046,457
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and wafer holding table for s...
- Patent number 12,046,488
- Issue date Jul 23, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Glass-based article with engineered stress distribution and method...
- Patent number 12,040,183
- Issue date Jul 16, 2024
- Corning Incorporated
- Sumalee Likitvanichkul Fagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing holding device and holding device
- Patent number 12,027,406
- Issue date Jul 2, 2024
- NITERRA CO., LTD.
- Makoto Kuribayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preheat processes for millisecond anneal system
- Patent number 12,027,427
- Issue date Jul 2, 2024
- Mattson Technology, Inc.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for joining quartz pieces and quartz electrodes and other de...
- Patent number 12,020,971
- Issue date Jun 25, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor heat treatment member and manufacturing method thereof
- Patent number 12,014,948
- Issue date Jun 18, 2024
- COORSTEK GK
- Sayaka Togashi
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
PROCESS CHAMBER
- Publication number 20250006546
- Publication date Jan 2, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20240420932
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...
- Publication number 20240420971
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...
- Publication number 20240412989
- Publication date Dec 12, 2024
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240393703
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...
- Publication number 20240387234
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- JUNHYUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER BORE HOLE PLUG
- Publication number 20240387236
- Publication date Nov 21, 2024
- SCHUNK XYCARB TECHNOLOGY B.V.
- Moritz WIPPERLING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLET FOR PICKUP A SEMICONDUCTOR CHIP
- Publication number 20240387231
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Jungho PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...
- Publication number 20240376595
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Marc Shull
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS
- Publication number 20240379328
- Publication date Nov 14, 2024
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATE STRUCTURE, STAGE, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20240347371
- Publication date Oct 17, 2024
- NHK Spring Co., Ltd.
- Yusuke OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, FOCUS RING, SUPPORT BASE, PLASMA PROCESSING AP...
- Publication number 20240347322
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME
- Publication number 20240321625
- Publication date Sep 26, 2024
- KYOCERA CORPORATION
- Masahiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Ceramic Pedestal Shaft with Heated/Cooled Gas Tube
- Publication number 20240304491
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFERENTIAL SUBSTRATE BACKSIDE COOLING
- Publication number 20240304486
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
- Publication number 20240304492
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Hui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20240304502
- Publication date Sep 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
- Publication number 20240282556
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- B08 - CLEANING
Information Patent Application
ULTRATHIN CONFORMAL COATINGS FOR ELECTROSTATIC DISSIPATION IN SEMIC...
- Publication number 20240284650
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Gayatri Natu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF OPERATING...
- Publication number 20240282618
- Publication date Aug 22, 2024
- KIOXIA Corporation
- Kentaku ARAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH IMPROVED PROCESS UNIFORMITY
- Publication number 20240282551
- Publication date Aug 22, 2024
- LAM RESEARCH CORPORATION
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR IMPROVEMENT
- Publication number 20240274464
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Matthew Gabriel GOODMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR
- Publication number 20240266208
- Publication date Aug 8, 2024
- NGK Insulators, Ltd.
- Keiichi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Wide Bandgap Epitaxial Susceptors and Method Therefor
- Publication number 20240266207
- Publication date Aug 8, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- B08 - CLEANING
Information Patent Application
LIFT PIN ASSEMBLY
- Publication number 20240266206
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION
- Publication number 20240266202
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS

characterised by a coating or a hardness or a material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Support structure for thermal processing systems

Multi zone spot heating in EPI

Wafer placement table

Vacuum apparatus

Quartz susceptor for accurate non-contact temperature measurement

Superstrate and method of making it

Semiconductor processing equipment with high temperature resistant...

Electrostatic chuck and method for manufacturing electrostatic chuck

Multi-zone pedestal heater without vias

Laminate and method for producing same

Substrate handling device and processing chamber

Susceptor arrangement of a CVD reactor

Decoupled XY parallel micro-positioning stage

Electrostatic chuck

Wafer placement table and method of manufacturing the same

Microstructure control of conducting materials through surface coat...

Wafer placement table

Support plate for localized heating in thermal processing systems

Permanent secondary erosion containment for electrostatic chuck bonds

Clamping jig and cleaning device

Bipolar electrostatic chuck to limit DC discharge

Heater component

Electrostatic chuck, focus ring, support base, plasma processing ap...

Semiconductor manufacturing apparatus and wafer holding table for s...

Substrate lift mechanism and reactor including same

Glass-based article with engineered stress distribution and method...

Method for manufacturing holding device and holding device

Preheat processes for millisecond anneal system

Method for joining quartz pieces and quartz electrodes and other de...

Semiconductor heat treatment member and manufacturing method thereof

Patents Applicationslast 30 patents

PROCESS CHAMBER

SUBSTRATE SUPPORT

VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...

THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

PROCESSING TOOL AND METHOD

HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...

SUBSTRATE CARRIER BORE HOLE PLUG

Support Plate for Localized Heating in Thermal Processing Systems

COLLET FOR PICKUP A SEMICONDUCTOR CHIP

MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...

PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS

LAMINATE STRUCTURE, STAGE, SEMICONDUCTOR MANUFACTURING DEVICE, AND...

ELECTROSTATIC CHUCK, FOCUS RING, SUPPORT BASE, PLASMA PROCESSING AP...

ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Ceramic Pedestal Shaft with Heated/Cooled Gas Tube

DIFFERENTIAL SUBSTRATE BACKSIDE COOLING

BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR

Preheat Processes for Millisecond Anneal System

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN

ULTRATHIN CONFORMAL COATINGS FOR ELECTROSTATIC DISSIPATION IN SEMIC...

JIG, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF OPERATING...

SUBSTRATE SUPPORT WITH IMPROVED PROCESS UNIFORMITY

SUSCEPTOR IMPROVEMENT

SUSCEPTOR

Cleaning Wide Bandgap Epitaxial Susceptors and Method Therefor

LIFT PIN ASSEMBLY

ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION