TREA

characterised by means for introducing or removing gases

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  • CPC
  • C23C14/0063
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0063characterised by means for introducing or removing gases
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus and method for manufacturing part having fil...
    • Patent number 11,919,032
    • Issue date Mar 5, 2024
    • Tokyo Electron Limited
    • Takayuki Ishii
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus and method for reducing arcing
    • Patent number 11,885,008
    • Issue date Jan 30, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Po-Wei Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive particles supply system
    • Patent number 11,810,765
    • Issue date Nov 7, 2023
    • Applied Materials Israel Ltd.
    • Asaf Gutman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Strain gauge
    • Patent number 11,702,730
    • Issue date Jul 18, 2023
    • MINEBEA MITSUMI INC.
    • Toshiaki Asakawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus including gas distribution system
    • Patent number 11,674,213
    • Issue date Jun 13, 2023
    • Cardinal CG Company
    • Klaus Hartig
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputter deposition of dielectric films
    • Patent number 11,584,982
    • Issue date Feb 21, 2023
    • Viavi Solutions Inc.
    • Georg J. Ockenfuss
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus and method for reducing arcing
    • Patent number 11,578,402
    • Issue date Feb 14, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Po-Wei Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Strain gauge
    • Patent number 11,542,590
    • Issue date Jan 3, 2023
    • MINEBEA MITSUMI INC.
    • Toshiaki Asakawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus including gas distribution system
    • Patent number 11,501,959
    • Issue date Nov 15, 2022
    • Cardinal CG Company
    • Klaus Hartig
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Energy source apparatus
    • Patent number 11,298,177
    • Issue date Apr 12, 2022
    • Olympus Corporation
    • Tsuyoshi Hayashida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering apparatus and film formation method for composi...
    • Patent number 11,021,783
    • Issue date Jun 1, 2021
    • SHINCRON CO., LTD.
    • Shinichiro Saisho
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputter deposition of dielectric films
    • Patent number 10,920,310
    • Issue date Feb 16, 2021
    • VIAVI Solutions Inc.
    • Georg J. Ockenfuss
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin film forming method
    • Patent number 10,494,709
    • Issue date Dec 3, 2019
    • Murata Manufacturing Co., Ltd.
    • Munehito Chatani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,392,688
    • Issue date Aug 27, 2019
    • Tokyo Electron Limited
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition device and deposition method
    • Patent number 10,309,005
    • Issue date Jun 4, 2019
    • Tokyo Electron Limited
    • Yasuhiko Kojima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition system with integrated cooling on a rotating drum
    • Patent number 10,262,838
    • Issue date Apr 16, 2019
    • Vaeco Inc.
    • Richard DeVito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma source device and methods
    • Patent number 10,224,186
    • Issue date Mar 5, 2019
    • AES Global Holdings, PTE. LTD
    • Scott Polak
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrode substrate film and method of manufacturing the same
    • Patent number 10,026,524
    • Issue date Jul 17, 2018
    • Sumitomo Metal Mining Co., Ltd.
    • Hideharu Okami
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputter deposition of silicon films
    • Patent number 9,988,705
    • Issue date Jun 5, 2018
    • VIAVI Solutions Inc.
    • Georg J. Ockenfuss
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for gas injection in a physical vapor deposition chamber
    • Patent number 9,957,601
    • Issue date May 1, 2018
    • Applied Materials, Inc.
    • Muhammad Rasheed
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering apparatus
    • Patent number 9,905,401
    • Issue date Feb 27, 2018
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film formation method and film formation apparatus
    • Patent number 9,903,012
    • Issue date Feb 27, 2018
    • ULVAC, Inc.
    • Takashi Yoshida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition systems and methods
    • Patent number 9,822,439
    • Issue date Nov 21, 2017
    • FLIR Systems, Inc.
    • Tommy Marx
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus including gas distribution system
    • Patent number 9,812,296
    • Issue date Nov 7, 2017
    • Cardinal CG Company
    • Klaus Hartig
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 9,551,060
    • Issue date Jan 24, 2017
    • Tokyo Electron Limited
    • Atsushi Gomi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering device
    • Patent number 9,340,868
    • Issue date May 17, 2016
    • Samsung Display Co., Ltd.
    • Jin Ho Hwang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cathode sputtering gas distribution apparatus
    • Patent number 9,228,254
    • Issue date Jan 5, 2016
    • Seagate Technology LLC
    • Chang Bok Yi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus and film forming method
    • Patent number 9,175,377
    • Issue date Nov 3, 2015
    • Canon Anelva Corporation
    • Shigenori Ishihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reactive sputtering apparatus
    • Patent number 9,034,152
    • Issue date May 19, 2015
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering method and sputtering apparatus
    • Patent number 8,992,743
    • Issue date Mar 31, 2015
    • Canon Anelva Corporation
    • Nobuo Yamaguchi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents